Steam instruments will implement a rapid and accurate high-resolution ION microscopy technology on a prototype instrument and apply IT to materials characterization challenges of direct interest to…

The National Institute of Standards and Technology (NIST) awarded a $289,529 Cooperative Agreement (CFDA 11.042 - CHIPS Research and Development) to Steam Instruments Inc. for the development of a high-resolution ion microscope prototype. The project aims to implement rapid and accurate high-resolution ion microscopy technology to address materials characterization challenges of direct interest to the U.S. semiconductor industry, such as improving dopant concentration determinations and compositional analysis. The awardee plans to subaward funds to support specimen preparation, experimentation, and analysis activities. The project has a performance period from October 1, 2024 to March 30, 2027 and is expected to deliver an instrument that will make improvements in composition-versus-structure analysis, benefiting the U.S. semiconductor industry and researchers.

Activities

The awardee will develop a high-resolution ION microscope product to enable rapid and accurate nanoscale characterization.

Expected outcomes

Instrument will make improvements in composition-versus-structure analysis.

Intended beneficiaries

U.S. Semiconductor industry and researchers.

Subrecipient activities

The recipient plans to subaward funds for specimen preparation, experimentation and analysis.