Use NIST's soon-to-be-completed yield measurement apparatus to measure secondary and backscattered electron yields and emission energy spectra from well-characterized samples
Active Cooperative Agreement Awarded Last action
- Award ID
- 70NANB24H184
- Recipient
-
Theiss Research UEI F67SDLWMJH17
- Awarding agency
-
National Institute of Standards and Technology
Department of Commerce
- Obligated
- $251,616
Award facts
- Assistance listing
- 11.609 Measurement and Engineering Research and Standards
- Completion date 66% complete
- Place of performance
- La Jolla, CA 92037, USA
Award details come from USAspending.gov.
Description
- Purpose
- The purpose of this project is to use NIST's soon-to-be-completed yield measurement apparatus to measure secondary and backscattered electron yields and emission energy spectra from well-characterized samples.
- Activities
- The researcher will produce reference data on electron yield and energy spectra measured as functions of electron beam energy and angle of incidence on various samples. The researcher will be utilizing a novel measurement system, comprised of two chambers maintained at ultra-high vacuum levels, developed by NIST researchers. The researcher will prepare samples in-situ in a sample preparation chamber, employing various cleaning techniques such as ION sputtering, annealing (or flashing), and reactive gas cleaning. The researcher will verify the cleanliness of the samples through auger spectroscopy, followed by the creation of contamination maps. The researcher will then collect measurement data of the electron yield and energy spectra, measured through a measurement chamber using a custom-designed spherical retarding field analyzer.
- Expected outcomes
- The resulting electron yield data will be used to test and refine models developed by NIST researchers.
- Intended beneficiaries
- NIST researchers and the microelectronics industry that utilizes improved electron microscopy images for quantitative metrology will benefit from improved data and models.
- Subrecipient activities
- The recipient does not intend to subaward funds.
Transactions
| Action | Obligated | Date |
|---|---|---|
| Amendment | $140,676 | |
| Original award | $110,940 |
Quick answers
Who received award 70NANB24H184?
70NANB24H184 was awarded to Theiss Research by National Institute of Standards and Technology (Department of Commerce) on November 1, 2024.
How much is award 70NANB24H184 worth?
$251,616 has been obligated on 70NANB24H184.
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