To develop a platform for manufacturing miniature atomic vapor cells compatible with cmos and integrated photonic elements and demonstrate their implementation in a prototype device

The National Institute of Standards and Technology awarded a $150,000 cooperative agreement to The Pennsylvania State University under the Measurement and Engineering Research and Standards program to develop a platform for manufacturing miniature atomic vapor cells compatible with CMOS and integrated photonic elements. Over the one-year period from October 1, 2022 to September 30, 2023, Penn State researchers will develop a novel microfabrication process to encapsulate atomic vapors inside glass cavities compatible with semiconductor processes used in electronics and photonics manufacturing. This includes implementing a wafer bonding process using a triple stack with patterned etching to fabricate scalable dielectric vapor cells. Optical characterization of the vapor cells will occur at NIST in Boulder, Colorado. The intended beneficiaries are the scientific community developing room temperature quantum sensors with Rydberg atoms. No subawards are planned under this cooperative agreement.

Activities

The researchers will develop a novel microfabrication process to enable the encapsulation of atomic vapors inside glass cavities. These cavities would be compatible with the semiconductor processes used to build cmos electronics and photonic integrated circuits. We will implement a wafer bonding process involving a triple stack of wafers. The middle wafer would be patterned using etching technologies such as drie and laser etching. The optical characterization of the vapor cells will be conducted at NIST (boulder).

Expected outcomes

A novel methodology to fabricate scalable dielectric vapor cells with multiple geometries incorporating only dielectric materials.

Intended beneficiaries

The scientific community developing room temperature quantum sensors with rydberg atoms. The possibility of having access to reliable fabrication of atomic vapor cells would directly impact a broad range of applications, such as magnetometers, quantum antennas, timing, and length and rotation sensing. Moreover, integrating photonics and electronics elements with quantum vapor cells would provide a path toward low-cost manufacturing of quantum-based sensors enabling self-calibrating systems with zero-chain traceability.

Subrecipient activities

The recipient does not intend to sub-award funds.