Atomic Layer Deposition (ALD) with an integrated glovebox transfer system
Closed Solicitation Posted
- Solicitation number
- N00173-21-R-AM11
- Agency
- Office of Naval Research Secretary of the Navy, Department of Defense
- Responses due
- Set-aside
- Total Small Business
Opportunity facts
- NAICS code
- 333242 Semiconductor Machinery Manufacturing
- Place of performance
- Washington, District of Columbia 20375, United States
Notice details come from SAM.gov. Updated .
About this opportunity
The Department of the Navy Secretary of the Navy Office of Naval Research seeks proposals to deliver and install an atomic layer deposition reactor with an integrated glovebox transfer system. Key requirements for the system include an ALD base system, oil-free dry pump, variable residence mode throttle valve, high conductance foreline particle filtration, additional vapor draw and source flow-through modules, remote plasma source, gas compatibility programmable logic controller, dual door single wafer load lock configured for glovebox integration, and associated installation and training services. Proposals are due by the response date listed. The Navy will evaluate offers based on technical capability, component functionality, service and support, supplier past performance, and price reasonableness, with technical performance the most important factor.
The solicitation is set aside for total small business and falls under NAICS code 334516, Photographic and Photocopying Equipment Manufacturing, with a PSC code of Q1XD. Proposals are requested from qualified suppliers with no written solicitation to be issued. The place of performance is the Naval Research Laboratory facilities in Washington, D.C.
Notice text
3 versions
Update #3 · Latest ·
This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Federal Acquisition Regulations (FAR) Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. Solicitation documents and incorporated provisions are those in effect through Federal Acquisition Circular 2021-05, DPN 20210520, and NMCARS 18-17.
Please see the PDF version of the combined synoposis/solicitation.
Please see the revised PDF verison of the combined synoposis/solicitation, that updated LINE 0012 to remove NSP. Please price along with all others.
Please see the attached Q&A dated 4 August 2021.
Update #2 ·
This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Federal Acquisition Regulations (FAR) Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. Solicitation documents and incorporated provisions are those in effect through Federal Acquisition Circular 2021-05, DPN 20210520, and NMCARS 18-17.
Please see the PDF version of the combined synoposis/solicitation.
Please see the revised PDF verison of the combined synoposis/solicitation, that updated LINE 0012 to remove NSP. Please price along with all others.
Update #1 ·
This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Federal Acquisition Regulations (FAR) Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. Solicitation documents and incorporated provisions are those in effect through Federal Acquisition Circular 2021-05, DPN 20210520, and NMCARS 18-17.
Please see the PDF version of the combined synoposis/solicitation.
Attachments
| File | Type | Posted |
|---|---|---|
| ALD_QA 8_4_21.pdf | ||
| Combined Synopsis_Solicitation_AMEND1.pdf | ||
| Combined Synopsis_Solicitation.pdf | ||
| Att (1) Specifications.pdf | ||
| Att (2) Reqts for Onsite Contractors.pdf |
Notice history
| Notice | Type | Posted |
|---|---|---|
| Atomic Layer Deposition (ALD) with an integrated glovebox transfer system | Solicitation | |
| Atomic Layer Deposition (ALD) with an integrated glovebox transfer system | Pre-Solicitation |
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