QA-2.docx

DOCX document 13 KB Posted

Attached to
Mask Aligner Federal contract opportunity
Solicitation number
W9132T20Q0061
Issued by
Department of the Army Corps of Engineers

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RFQ mod-2.pdf PDF
QA.docx DOCX document
RFQ mod.pdf PDF
RFQ.pdf PDF

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QUESTIONS AND ANSWERS

Q: Resolution requirement (specific to optics wavelength).

A: Proximity Contact: gap up to 50um Vacuum Contact: <0.8um Hard contact: 1um Soft contact: 2um

Q: The size of each wafer to be processed?

A: 1 up to 100 mm / 4" (round)

Q: The shape of each wafer to be processed?

A: Round

File details come from the government source that posted it. Updated .