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This document outlines requirements for a low vacuum scanning electron microscope system. NASA Glenn Research Center intends to issue a sole source contract to JEOL USA, Inc. for a JSM-IT700HRLA Low Vacuum Field Emission Scanning Electron Microscope with chamber scope, dry SDD-EDS detector, and particle analysis system. Interested parties may submit capabilities and qualifications to Ian Park at NASA by March 16th to be considered for conducting the acquisition through full and open competition. Otherwise, NASA will proceed with a sole source award based on responses received. The microscope system will be used for research and installed at NASA Glenn Research Center in Cleveland, Ohio within five months of order receipt.

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STATEMENT OF WORK

1. OBJECTIVE/REQUIREMENTS

An analytical, high resolution, thermal Schottky type field emission scanning electron microscope (FE-SEM). Including both high and low vacuum modes of operation for organic and inorganic sample evaluation, with integrated ESD (Energy-dispersive X-ray spectroscopy), particle analysis, and a stage large enough to image samples up to 200mm and 2kg of weight without destruction of sample. The FE-SEM will be used to evaluate polymer, metal and ceramic materials. Current SEM in area is at end of life, additionally it is not capable of accepting samples of critical test size that need to remain uncut for follow-on testing. An FE-SEM will allow for high resolution imaging of samples for high-cycle fatigue and reaction zones in high temperature testing and materials development in our research area.

2. CHARACTERISTICS, SCOPE, AND SPECS

FE-SEM Specifications

- Large eucentric sample stage – stage size 200mm, with 2kg weight capability in XYZRT and 6kg weight capability in XYZR. Travel in X: 125mm, Y: 100mm, Z: 90mm

- Acquires simultaneous Back-Scatter Electron and Secondary Electron Images, while giving real-time EDS data. Accelerating voltage 0.5kV – 30kV. Both high and low-vacuum modes for imaging multiple types of samples. In-lens Schottky type Field Emission electron gun. Built in Montage Imaging, vibration dampening.

- Magnification range from 5X to 600,000X print,14X to 1,679,449 display

- Resolution Requirements: 1nm resolution at 20kV & 3nm resolution at 1kV in high vacuum mode. 1.8nm resolution at 15kV in low vacuum mode

- Field Emission electron gun positioned in the field of the first condenser lens to maximizes the current (+300nA) generated into the probe. Built-in aperture angle control lens (ACL) to optimize the convergence angle to ensure optimum performance at all accelerating voltages and probe currents. ACL integrated control to provide the smallest probe diameter at low probe currents and the optimum probe geometry for high resolution imaging at high probe currents. Field Emission emitter shall be guaranteed for 3 years or more

- Low power and facilities requirement: Single Phase AC100V, 50/60Hz, 3.0kVA and Dry Compressed Air

EDS Specifications

Dry (no liquid N2 needed) SDD detector, detects elements Be to U

3. PLACE OF PERFORMANCE

Equipment to be installed at NASA Glenn Research Center, 21000 Brookpark Rd, Cleveland, OH 44135

4. PERIOD OF PERFORMANCE

Delivery of equipment is expected within five (5) months After Receipt of Order (ARO).

A service installation visit will be scheduled upon arrival of the equipment and once appropriate clearance has been given to admit outside visitors on-Center due to COVID- 19 situation.

(End of Statement of Work)

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