SOW FESEM.docx

STATEMENT OF WORK FORMAT

Field Emission Scanning Electron Microscope

PCN:

Background The GSFC Detector Development Laboratory (DDL) has a requirement to acquire a scanning electron microscope with a field emission source. The system is used for high resolution imaging of micro and nanoscale structures built in the detector development laboratory. The system should be suitable for secondary electron and backscatter electron imaging at low accelerating voltages.

Objectives The objective of this project is to procure a Field Emission Scanning Electron Microscope (FESEM).

Scope The scope of this work includes production and delivery of a field emission scanning electron microscope. The FESEM consists of electron optics and detectors, a specimen stage, a vacuum system, and computer control. The equipment is essential for nearly all device fabrication projects in GSFC’s Detector System Branch. In particular, the equipment is immediately needed for development for the cosmic microwave background polarization technology, microwave kinetic inductor detectors, far-infrared detectors, large format magnetic calorimeters, and microfluidic components which are important to Goddard’s lines of business.

No prototypes or one-of-a-kind systems will be considered. The unit must be a pro-duction model with at least 10 similar units working in the field. Work will consist of the following:

a) Construction of FESEM that meets the SOW requirements at the vendor facility.

b) Crating and Shipping the unit to GSFC where the vendor’s personnel shall install it.

c) Installing, demonstrating, and training, of GSFC personnel, on the FESEM at GSFC.

d) Phase II/acceptance testing of the FESEM at NASA.

Tasks or Requirements The Supplier shall provide a new FESEM. The Supplier shall insure that it is equipped with the following equipment and meet the following requirements prior to Acceptance of System:

1. Field Emission Scanning Electron Microscope

1.1. A brand new unit is required; no used equipment or accessories, listed below, are acceptable.

1.2. The tool shall meet current industry standard requirements SEMI-S2 or equivalent for safety, including shielding, and interlocks for hazardous areas such as high voltages, radiation, and moving parts.

1.3. The vendor shall provide a GSFC site survey visit to evaluate the proposed location for the FESEM for vibration, acoustic noise, and stray magnetic fields.

2. Electron Optics

2.1. The electron source shall consist of a Schottky type thermal field emission gun.

2.2. The emitter shall be a Zr/O tungsten tip with up to 100uA emission. Emitter shall be guaranteed for 3 years and fully covered under the normal service contract, with typical lifetime of the gun expected to be over 6 yrs.

2.3. The system shall include a battery backup power supply for the gun to eliminate the need gun bake out after power outage.

2.4. The magnification range shall be 10X to 2,000,000X (128x96 mm photo)

2.5. The magnification shall be microprocessor linked to changes in kV and WD

2.6. Resolution with Secondary Electron Imaging: 0.5nm at 15kV guaranteed and 0.5 nm at 0.5 kV, 0.7nm at 1kV guaranteed.

2.7. Accelerating Voltages variable from 10V to 30kV in 10V steps

2.8. Probe current > 500nA at 30kV and > 100nA at 5kV.

2.9. The system shall include an objective lens with electrostatic/electromagnetic hybrid design allowing observation of any type of specimen (including magnetic materials) with high resolution. The lens shall incorporate a scintillator type upper hybrid detector for high resolution imaging.

2.10. The system shall include a lens setting for long depth of field imaging.

2.11. The lens system shall enable optimal aperture angle of the objective lens over the whole probe current range minimizing spread in electrons to maintain the smallest probe size.

3. Detectors

3.1. The FESEM shall include an Everhart-Thornley Secondary Electron Detector

3.2. The FESEM shall include an upper electron through the lens detector with user controllable energy filter incorporated for collection of secondary or backscattered electrons or a mixture depending on filtering grid selection

3.3. The vendor shall include with their quote as optional a pneumatically actuated retractable 6 segment solid-state back scatter electron detector with working distance 2mm or long and demonstrated resolution of 1.5nm at 15kV. Purchase of the retractable backscatter detector shall be optional at NASA’s discretion.

3.4. The system shall include an absorbed current meter for measurement of the absorbed specimen current.

4 Specimen Stage/Chamber

4.1 Stage travel range shall be at least 50mm in X, 50 mm in Y and 40 mm maximum height in Z. The stage shall hold wafers up to 100 mm in diameter.

4.2 The vendor shall include as an option on their quote a sample stage that can hold samples up to 200 mm diameter.

4.3 The sample stage shall be a large goniometer with mechanically fully eucentric tilt at all Z positions and tilts.

4.4 The tilt range must be -5° to +70° with the tilt axis perpendicular to dedicated Energy Dispersive spectrometer (EDS) port.

4.5 All 5 stage Axes (X, Y, R, T, Z) shall be motorized and automated and include computer eucentric rotation.

4.6 The stage shall be capable of meeting all resolution specifications without a stage lock or clamp.

4.7 The chamber shall also be capable of accommodating multiple EDS detectors simultaneously and accommodating EDS, and WDS (wavelength dispersive spectrometry) simultaneously.

4.8 The sample substage shall be electrically isolated and a sample current feed thru shall be provided to measure absorbed current (or true probe current when a Faraday cup is mounted on the sample holder).

4.9 The FESEM shall include a user-selectable bias (up to 5kV specimen bias) applied to the specimen for primary beam deceleration (operational at all kVs). Allowing imaging down to 10V.

4.10 The system shall include a camera that acquires an optical image of the specimen during specimen exchange which can then uploaded into software and used for subsequent navigation on the sample.

4.11 The stage automation system shall be controlled through mouse control and trackball and allow the following functions:

a. Computer eucentric rotation

b. Continuous movement with the speed linked to magnification.

c. Mouse drag and drop movement

d. Snap shot image capture for sample survey (up to four images)

e. Step distance defined by user

f. Field by field with user defined % overlap.

g. Click center and zoom

h. Points table and on-screen graphics

i. Hard limits and soft limits linked to sample holder and user input of sample height offset.

j. Stage return to location of any stored image.

5 Vacuum System

5.1 The FESEM shall include a high vacuum system for maintaining column, chamber and gun vacuum levels. The UHV gun chamber shall be ion pumped. The sample chamber shall be pumped with a turbo molecular pump. All valves, pumps and gauges shall be fully automated and fail-safe computer controlled and monitored.

5.2 Valving shall be pneumatically controlled.

5.3 The FESEM shall include heaters for baking out the UHV gun chamber.

5.4 A water recirculator for cooling shall be included with the system.

6 Microscope Control and Hardware

6.1 The microscope shall be fully computer controlled via a customized graphical user interface running Microsoft Windows 10 or higher.

6.2 The operation of the electron optics system shall be computer aided through the control graphical user interface (GUI), so that a minimum of fine tuning is required even when changing accelerating voltages.

6.3 This system shall also allow the following functions:

a. Image archiving and data base management with thumbnail display, search capability, montaging, percent area phase analysis, image filtration and a customizable report generator

b. Network interfacing

c. Image processing

d. Mouse, keyboard, knob control operation

e. Image annotation with: changeable fonts, colors and special characters.

f. Automated beam alignment

g. A password protected master column and gun alignment with overriding user adjustments

h. No additional or optional software or hardware shall be required on the microscope to allow full control via 3rd party accessories such as EDS, and WDS.

6.4 Image acquisition functions such as frame averaging, frame integration pixel integration, Charge Free scan function, and pixel binning shall be built into the computer control system.

6.5 Auto functions such as Auto-Focus, Auto-Stigmation and Auto-Exposure shall be included.

6.6 The operation system shall have both standard “recipes” of common operating conditions for standard sample types as well as user created recipes for custom applications which can be stored and recalled.

6.7 The FESEM shall include an infrared camera. Operation of the chamber scope camera will be fully integrated with the FESEM’s GUI, allowing users to view inside the chamber during electron imaging.

6.8 With user input of the sample size, the software shall initiate stop conditions and limit stage travel to reduce or eliminate the possibility of collisions of samples with detectors and system internal components.

7 DIGITAL SCAN GENERATOR / IMAGING:

7.1 The digital scan generator shall be capable of high-speed scanning and image acquisition of up to 7680 X 5760 pixels.

7.2 The system must allow for image acquisition at 8 or 16 bit resolution.

7.3 The system shall provide for user selectable image acquisition parameters including time per frame, slow scan acquisition, frame averaging, frame integration, block integration mode (charge reduction mode).

7.4 The system shall include a digital scan rotation feature that automatically corrects for accelerating voltage and working distance and any user entered angle of scan rotation to maintain orthogonal motion on the display.

7.5 The imaging software shall include dynamic focus to maintain focus on steeply tilted specimens.

7.6 The system shall have the following scanning modes:

- Full frame, Line scan, point (spot), Dynamic focus for highly tilted samples, Tilt correction, user defined reduced raster with continuously adjustable size, shape and scan speed on live image.

- The system shall have a signal mixing function allowing different signals from the same field of view to be mixed to produce a combined image from up to 4 live images from different detectors.

7.7 The system shall include an integrated image database allowing the user to browse, view or edit or search various images.

7.8 Measurement software shall be included which allows multiple measurement features on saved or live images including point position, line length, distance between two lines, angle, radius, diameter, area or perimeter of square, rectangle or ellipse. Measurement software will allow use of grey or RGB level intensity to determine feature sizes within the image. Data from measurement should be easily exported in common formats such as .txt file. Image calibration routine for standards. Annotation can be saved, loaded and appended

8 PC interface

8.1 3.5GHz processor, 8GB RAM, 500GB Hard disk drive, DVD-RW optical drive

8.2 Windows 10 64bit or greater operating system

8.3 24” wide screen or larger LCD monitor, keyboard, mouse and/or trackball.

8.4 The vendor shall comply with IPV6 requirements for items within the system capable of using internet protocol networking to communicate.

8.5 The system shall have the following automated operations: Vacuum control, filament heating, gun alignment, aperture alignment, probe current optimized for set spot size, spot size optimized for magnification, contrast and brightness, focus and stigmation, restore image conditions based on image meta-data, Stage movement and stage positioning based on saved image.

8.6 The FESEM PC will monitor stage control and position and warn the user if samples are close to any integrated accessories (e.g. lenses, detectors) to avoid collisions. The software will record any time a user generates a potential collision and any time a user overrides a collision warning.

8.7 The FESEM will incorporate a comprehensive internal hardware diagnostics system encompassing all subsystems. All faults, errors, and unusual conditions or user settings are reported. All self-test results are appended to and permanently saved in log files.

8.8 The Vendor shall provide to NASA/GSFC an Accessibility Conformance Report using the Voluntary Product Accessibility Template version 2.x which addresses Section 508 of the Rehabilitation Act Compliance for each software update

9 Integration with other systems

9.1 The FESEM will allow complete functional integration with external systems and detectors (e.g. EDX, WDX).

10 Facilities

10.1 The FESEM and all required components (PC, vacuum pumps, etc) will operate from 120V/60Hz power.

10.2 Exterior surface parts shall be clean and free of grease or dust and compatible with operation in a Class 1000 cleanroom environment.

10.3 The FESEM shall include a water chiller for cooling the system.

10.4 The vendor shall include within their bid a quote for an optional uninterruptible power supply (UPS) as an option which may be purchased at the NASA’s discretion.

11 Installation and Training

11.1 The price of the FESEM shall include delivery of the instrument to Goddard Space Flight Center.

11.2 The price of the FESEM shall include installation at GSFC. Installation shall include a demonstration that the tool is within compliance with the specifications.

11.3 At the completion of installation and demonstration, the successful contractor will provide on-location training at GSFC.

12 Documentation and Warranty

12.1 A full set of all written documentation will be provided. This will include user manuals or equivalent as well as copies of software, and software manuals included with the system. This documentation shall be received by GSFC with the system hardware.

12.2 The system shall include a 1 year warranty on all parts and labor. Warranty terms must be included in the system price. The period of warranty will begin upon acceptance of the system. The supplier shall provide technical support from trained applications specialists.

The technical merit of the Suppliers’ proposal will be evaluated in terms of by how much they exceed the technical specifications listed in this statement of work.

Deliverables or Delivery Schedule Deliver complete specified (as described above) system. Set up and install all components at GSFC (in Bldg11 or in the DDL).

1. Demonstrate system with specified performance/acceptance criteria (described above). Acceptance of system will be conditional upon successful demonstration of functions.

1. Provide user training for equipment operation.

1. Equipment warranty on parts and labor for at least one year.

1. Operational manuals and maintenance manuals with circuit schematics and layouts.

Delivery Schedule Within 9 months after receipt of order.

Government-Furnished Equipment and Government-Furnished Information No Government-furnished equipment (GPE) and Government-furnished information (GFI) will be required

Security The Supplier Representative who will be installing the Scanning Electron Microscope and Training NASA personnel must be a US Citizen

Place of Performance The Construction of the field emission scanning electron microscope shall be performed at the Supplier’s facilities

The Installation and Training shall be performed at NASA/GSFC, Greenbelt, Maryland.