SB1341-15-RQ-0839_SOW.pdf

STATEMENT OF WORK

TITLE: Procurement of a high brightness X-ray source

LAB REQUESTING SERVICE: Material Measurement Laboratory, Material Science and Engineering Division

I. BACKGROUND INFORMATION

The Dimensional Metrology for Nanomanufacturing Project (within the Functional Polymers Group of the Material Science and Engineering Division) at the National Institute of Standards and Technology (NIST) develops and advances X-ray and neutron scattering methods as quantitative tools to characterize the shape, size, orientation, degree of ordering, and fidelity of nanoscale features patterned by advanced lithography and self-assembly techniques for the semiconductor industry. X-ray metrology works effectively using high-intensity, high energy (~20 keV) synchrotron radiation at national user facilities; however it is a challenging measurement for commercially available laboratory sources due to insufficient source intensity. This purchase will upgrade the X-ray source of our laboratory scattering system with a higher brightness compact source increasing the measurement throughput, decreasing the measurement spot size, and allow measurements previously unavailable outside of a synchrotron. This X-ray source purchase is essential for proof of concept testing of the Critical-Dimension Small-Angle X-ray Scattering (CDSAXS) method as a measurement of the dimensional features in a transmission scattering geometry on semiconductor structures such as patterned lines of known nanoscale pitch. The X-ray source will also be used to support other Functional Polymer Group projects where grazing incidence diffraction is required to determine the crystal structure and orientation of thin films.

II. SCOPE OF WORK

Purchase of a high brightness compact X-ray source and associated X-ray optics for producing both higher energy X-rays ≥20 keV and ≤25 keV) for transmission, small angle X-ray scattering measurements through silicon wafers, and lower energy X-rays (≥6 keV and ≤10 keV) for grazing incidence diffraction measurements. The X-ray beam needs to be highly collimated and focused in a small spot for the target applications. The source will be coupled to the existing NIST CDSAXS system and will be controlled by a single NIST owned laboratory computer. The system includes three (3) scatterless slit assemblies for collimating and aperturing the beam.

III. SPECIFICATIONS

The Government requires one (1) compact X-ray source and associated controls and X-ray optics that meets the following minimum technical requirements. The Contractor shall install the source at NIST and provide training as described below.

System Requirements:

The system shall be compatible with existing NIST CDSAXS system, Rigaku P-SAXS in that the X-ray emission from optic must be between 114 cm and 130 cm above the floor and be parallel to the floor The system shall have a high energy X-ray mode for transmission Small Angle X-Ray

Scattering (SAXS) that meets or exceeds the following:

o X-ray energy must be between 20 keV and 25 keV o Energy bandwidth must be less than or equal to 2 % o System must include necessary X-ray optics to produce high intensity, low divergence spot on sample meeting the following parameters:

Distance between source and sample must be less than or equal to 1.5 m X-ray flux on sample must be a minimum of 107 photons/sec in a 50 m diameter (full-width half-max) spot on the sample with a beam divergence less than or equal to 2 mrad.

X-ray optic tilt axis must be computer controllable through Labview interface.

The system shall have a low energy mode for Grazing-Incidence Small-Angle X-Ray

Scattering (GISAXS) that meets or exceeds the following:

o X-ray energy must between 6 keV and 10 keV o Energy bandwidth must be less than or equal to 1 % o System must include necessary X-ray optics to produce high intensity, low divergence spot on sample meeting the following parameters:

Distance between source and sample must be less than or equal to 1.5 m X-ray flux on sample must be greater than or equal to 108 photons/sec in a 500 m diameter spot (full-width half-max) on the sample with a beam divergence less than or equal to 1 mrad

X-ray optic tilt axis must be computer controllable through Labview interface.

The system must be designed such that a single user can change between the low energy and high energy modes without requiring a service request.

The system must meet the following spot and power stability requirements:

o Intensity must be stable with less than or equal to 5% drift over 24 hrs.

o Apparent source position must be stable to within +/- 20 um in 24 hrs.

The source must be controllable by an external computer o The vendor must supply instructions to NIST on connecting to and controlling the source controller with NIST Windows 7 computers and Labview interface.

o The vendor shall provide the list of commands and controls, and communication parameters for the source.

o The source power (current and voltage) and shutter must be controllable through an external computer and the current source monitoring feedback parameters (vacuum pressure, temperature, filament current, etc) must be readable by the external computer during operation.

The source must include interlocks on the shutter and source power supply that can be controlled externally o The vendor must supply instructions and interlock circuit schematics to NIST for interfacing the interlock system to preexisting safety controls on the NIST SAXS system enclosure.

The system must include an operations and maintenance manual covering proper operation, routine maintenance, and trouble shooting for the instrument and controlling software.

o The manual must be supplied in electronic format in either Adobe PDF or Microsoft Word.

The system footprint (excluding peripheral items like control electronics, vacuum pumps, and water chillers) must fit in a 1.5 m (direction of the beam) by 3 m (perpendicular to the beam) by 2.5 m high space.

Installation:

The Contractor shall install the instrument in Building 224, Room B321, at NIST Gaithersburg, MD. Installation shall include, at a minimum, rigging, uncrating/unpacking of all equipment, set-up and hook-up of all equipment, start-up, and demonstration of performance specifications.

The Contractor shall provide an installation report documenting that the system meets performance specifications. Instrument shall operate to required specifications upon installation.

Installation shall take place during normal business hours, between 8:30 am and 5:00 pm Eastern Time, Monday through Friday except Federal Holidays, and shall be coordinated with the NIST Technical Point of Contact (TPOC). Installation shall occur within 10 days of delivery of the system.

Training:

The contractor shall conduct training for up to two (2) technical personnel at NIST covering operation, troubleshooting, and routine maintenance for the system. The training shall include operation and alignment of the optics and changes of configuration between the high and low energy configuration. Training shall be provided during normal business hours, between 8:30am and 5:00pm Eastern Time, Monday through Friday, except Federal Holidays, and shall be coordinated with the NIST Technical Point of Contact (TPOC) to ensure maximum availability of NIST personnel. The training shall be completed on-site at NIST immediately after installation and demonstration of specifications.

Acceptance and Inspection Contractor must provide factory test results to the NIST COR demonstrating performance specifications for X-ray flux, divergence, and spot size for both energy configurations have been met. Contractor must provide sufficient description of the factory test method to allow for independent evaluation of results by NIST. NIST reserves the right to witness factory tests. NIST must be notified by the Contractor at least 30 days in advance of testing to allow for planning travel. The NIST COR will review the test results and communicate acceptance or denial of the results to the Contractor within five (5) business days. If the test results are rejected by the NIST COR, the Contractor shall fix all deficiencies and repeat the acceptance test in an identical manner. The Contractor shall not deliver the compact X-ray source and associated controls and X-ray optics to NIST until the factory test results have been accepted.

The final acceptance test shall be a demonstration of the required X-ray flux and divergence in the 50 m diameter (full-width half-max) target size in the high energy configuration on the laboratory system at NIST.

Warranty:

The Contractor shall provide, a one year warranty for the system. The warranty shall cover all labor, equipment, supplies parts, and typical consumables required for normal operation of this system. The contractor must be available during normal business hours of 8:00 am to 5:00 pm Eastern Standard Time for troubleshooting questions via phone or email and must respond on-site to service calls not later than five business days of the submission of the request for service.

The warranty shall commence upon successful completion of delivery, installation, training and acceptance of the system.

Maintenance Service:

The Contractor shall perform preventative service and repairs for the system at the expiration of the warranty period for up to three (3) option years. During this time, the contractor shall provide all labor, equipment, supplies and parts for this system. The contractor must be available during normal business hours of 8:00 am to 5:00 pm Eastern Standard Time for troubleshooting questions via phone or email and must respond on-site to service calls not later than five business days of the submission of the request for service.

Consumables:

Upon expiration of the warranty period, the Contractor shall provide all consumables required for the continued operation of the system at the expiration of the warranty period for up to three

(3) option years. For each year, the contractor shall cover all consumables required for normal operation of the system such as filaments, X-ray windows, ion gauges, and jet orifices.

IV. PLACE OF PERFORMANCE

Pre-delivery testing shall be completed at the Contractor’s facility. Delivery and installation of the system, warranty services, and maintenance services shall be performed at NIST, Gaithersburg, Maryland campus site. Normal duty hours are Monday through Friday, 8:30 a.m.

to 5:00 p.m. with the exception of Federal holidays.

If a foreign national is required for proper system installation, the contractor shall notify NIST immediately after award so that appropriate arrangements and requisite pre-approvals for building access can be accomplished.

V. DELIVERABLES

Description Quantity Due Date Operations and maintenance manual for the X-ray source; details and circuit diagrams for safety interlock system; instructions and command list for remotely controlling the source; and facility requirements.

Documents to be submitted in PDF Format

One (1) 10 days after award of this requirement submitted via email to the COR.

Factory Test Results in a PDF Format One (1) Delivered 90 days after award of this requirement or earlier if quoted submitted via email to the COR.

High brightness X-ray source One (1) 120 days after award of this requirement, or earlier if quoted.

Description Quantity Due Date High energy X-ray optic One (1) 120 days after award of this requirement, or earlier if quoted.

Low energy X-ray optic One (1) 120 days after award of this requirement, or earlier if quoted.

Installation of the X-ray source. Installation report in PDF format.

Once 20 days after delivery of the system or earlier if quoted submitted via email to the

COR.

Training of NIST personnel at NIST, Gaithersburg, MD. Training materials shall consist of the Operations and Maintenance Manual.

Once 10 days after installation.

Warranty services 12 Months

Warranty services of one year shall commence upon final acceptance of the system by the Government

Maintenance services 12 months per option year up to 3 option years

The first maintenance service option period shall commence upon expiration of the warranty service period. The remaining maintenance service periods shall commence upon expiration of the previous year for up to three years total.

Consumables contract 12 months per option year up to 3 option years

The first consumables contract option period shall commence upon expiration of the warranty service period. The remaining consumable contract periods shall commence upon expiration of the previous year for up to three years total.

VI. GENERAL INFORMATION

Safety: The Contractor employee shall be responsible for knowing and complying with NIST installation safety prevention regulations (http://www-i.nist.gov/mml/safety/policies/index.htm.)

Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and also is shown to the armed Security Police when entering the campus.

Identification Badges: Contractor employees shall comply with NIST identification and access requirements. The Contractor employee is responsible for absences due to expired identification and access documents. Each Contractor employee shall wear a visible identification badge provided by the NIST Security Office. The badge must show the full name, title, and if required by NIST, the words “Contractor” in front. The Contractor employee shall turn in the NIST identification badge and vehicle pass to the TPOC, COR, or Contracting Officer (CO) upon termination of their services under this contract.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass shall be displayed on the vehicle’s rear view mirror in accordance with instructions. The Contractor employee shall follow NIST procedures for removal and turn-in of the vehicle pass upon termination of services under this contract.

Media Inquiries: The Contractor employee shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the TPOC, COR, and/or CO. There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST Director.