Requirements Document.pdf

STATEMENT OF WORK

[Metrology for Integration of New Magnetic Materials]

[Requesting Lab/Division: CTL/RF Technology Division 672.01]

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

The project requires an instrument to perform calibrated microwave wafer-probe measurements, at variable sample temperature, in a vertically oriented magnetic field. This probe station will be used in conjunction with a microwave vector network analyzer and associated signal measurement equipment to evaluate materials and devices that are relevant for semiconductor research in a magnetic field up to 2.5 Tesla. The ability to perform calibrated, probe-based measurements of materials and devices under such a magnetic field bias at temperatures down to 10 Kelvin will provide important information about the behavior of magnetic materials and devices, which are used for a number of different signal control applications for microelectronic circuits.

II. SCOPE

The Contractor shall deliver a quantity of one (1) vertical magnetic field, variable temperature microwave probe station with turbo pumping system, inclusive of FOB Destination delivery, training, and warranty.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below.

All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable. All items will be new unless otherwise specified.

Used or remanufactured equipment will not be considered for award.

Line Item 0001:

Closed Cycle Magnetic Field Enabled Probe Station Description: Vertical magnetic field, variable temperature microwave probe station for on-wafer measurement of chip- or wafer-based devices. The system will consist of a vacuum chamber enclosing a variable temperature sample stage with a minimum of six access ports for micromanipulated microwave and dc probes and include a cooled radiation shield. It will include a closed-cycle refrigerator with needed compressor to obtain a minimum sample chuck temperature below 10K. The system will include an integrated vertical-field (perpendicular to sample plane) magnet with bipolar power supply capable of achieving a variable magnetic field of +/-2.5T or greater at sample chuck with 1% uniformity over a 25mm diameter probe-able area. The system will include four integrated micro-manipulated probe arms with 67 GHz cabling, including cryogenic non-magnetic wafer probes, and two integrated micro-manipulated arms with dc cabling and probe card. System will include necessary power supplies, temperature controllers, temperature sensors, and integrated microscope with <5um spatial resolution and high-resolution display and will accommodate samples up to 50mm in diameter with at least a 25mm diameter probe-able area.

Quantity: 1

A. Technical Specifications

a. Magnetic field specifications

i. vertical direction, perpendicular to sample plane

ii. variable magnetic field strength of at least +/-2.5 T at the location of the sample stage

iii. magnetic field uniformity of better than 1% variation across a 25mm diameter at the sample location

iv. integrated bipolar power supply

v. include hall sensor and gaussmeter for measuring magnetic field strength

b. Operation Temperature

i. Sample chuck minimum temperature <10K with no sample loading

ii. Maximum chuck temperature greater than or equal to 400K.

iii. Closed Cycle Refrigerator for cryogen-free operation with 1W cooling power at 4.2K

iv. Compressor, hoses required for refrigerator operation

v. Temperature stability of +/- 10 mK from 10K to 300K

vi. Temperature Controller with at least 4 channels for sensor inputs, and at least 2 heater control loops and PID control

vii. Radiation Shield

1. Completely surrounds sample

2. With optically transparent top port for unrestricted viewing of entire sample (50mm or greater)

viii. Calibrated temperature sensors and temperature controller for

1. sample temperature monitoring/control (50W min for control)

2. magnet temperature monitoring

3. cold head temperature monitoring

4. radiation shield temperature monitoring/control (50W min for control)

5. probe arm mounting

c. Probe Arms: Four probe arms located at 0,90,180,270 degrees, each with

i. Cabling for 67 GHz operation with 1.85mm connectors

ii. Non-magnetic 67 GHz cryogenic compatible wafer probes with 150um pitch

iii. temperature sensor mounted on each probe arm

iv. micromanipulators that allow for cryogenic probing over a 25 mm diameter with +/- 5um resolution

1. travel of at least 50mm in axial direction

2. travel of at least 25mm in the lateral direction

3. travel of at least 12.5mm in the vertical direction

4. travel of at least +/-5 degrees for probe planarization

d. Microscope with high-resolution camera

i. 12.5:1 zoom

ii. 2 um resolution

iii. coaxial or ring light with variable intensity lamp

iv. 24 inch or larger monitor with 1080 or better resolution

v. Field of view at least between 12mm - 0.8mm or better

vi. xzy translation stage for camera

e. Vibration at sample stage < 1um with vibration damping

f. Remote interfaces

i. gpib interface

ii. LAN interface

g. Installation/Training

i. On-site training and verification

Turbo Pumping System Description: Turbo pumping system used to evacuate vacuum chamber. Should include turbopump that can achieve pressures below 5 x 10-9 Torr with a pumping speed of at least 50 liters/sec (Nitrogen) and include the necessary pump controller, vacuum gauge (full range from atm to 10-8 Torr), oil free dry scroll backing pump, electrical cabling, and necessary bellows and vacuum connectors to connect pumping system to probe station with minimal vibration.

Quantity: 1

A. Technical Specifications

a. Turbo pump

i. pressures below 5 x 10-9 Torr

ii. pumping speed of at least 50 liters/sec (Nitrogen)

iii. operates in any orientation

iv. ambient cooling

v. 120V operation for system

b. Vacuum gauge

i. full range from atm to 10-8 Torr

c. Backing pump

i. oil free dry scroll pump

d. Pump controller

i. control for turbo and backing pumps

e. Interface cabling

i. computer connection for monitoring/logging pressure

f. Vacuum connectors

i. sufficient to connect system to probe station

IV. DELIVERABLES

Standards of Acceptance: The NIST Designated Government Official (DGO) shall review instrument and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 28 days of receipt of deliverable.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 325 Broadway Attn: C/O/ TBA, Mail Stop 672.01, Rm. 81-1E117 Boulder, CO 80305

VI. TRAINING

The contractor shall conduct two days of training sessions for up to four users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during regular business hours immediately after installation/set-up and on-site measurements demonstrating that no damage or misalignment issues arose during transportation and installation but shall be completed no later than 28 days after installation.

Training shall include all aspects of system operation, including sample loading, cooldown, operation with and without applied magnetic field. Training will include demonstration of

CLIN Description Due Date

0001 Closed Cycle Magnetic Field Enabled Probe Station and Turbo Pumping System

3 months after receipt of order measurements up to 67 GHz on NIST-supplied samples at the minimum operation temperature and at the maximum magnetic field.

VII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Demonstration that the unit reaches specified base temperature.

2. Demonstration that the unit reaches the specified magnetic field strength.

3. Demonstration that appropriate contact can be made with all RF probes at the minimum operating temperatures, achieved by means of standard on-wafer calibrations.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST DGO to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within four weeks of the receipt of the equipment unless otherwise indicated above. Additional time is required for acceptance to allow for the system to be installed and for performance to be verified. The Government reserves the right to conduct quality assurance testing to confirm that the system meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VIII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include return-to-vendor service.

IX. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

Successful Inspection and Acceptance

100%

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

X. TRAVEL

a. The contractor shall be responsible for all travel expenses.

XI. CONTRACTOR SUPPLIED MATERIALS

a. The contractor shall supply all parts, hardware, equipment, and labor required to perform the tasks listed.

XII. MISCELLANEOUS INFORMATION

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Regular Business Hours. Regular business hours are 9am - 5pm Monday through Friday, Mountain Time, excluding Federal holidays and NIST closures.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office. The contractor shall provide personnel that pass required government background checks to be issued badges for work on site.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.