NIST Requirements (final).docx

NIST REQUIREMENTS DOCUMENT

Atomic Force Microscope (AFM) system

I. BACKGROUND INFORMATION

In support of the CHIPS Act, the National Institute of Standards and Technology is acquiring nano fabrication and nano characterization equipment that will address the major metrology research and development grand challenges for the reliable production of next-generation microelectronic devices

The National Institute of Standards and Technology (NIST)/Center for Nanoscale Science and Technology (CNST) enables science and industry by providing essential measurement methods, instrumentation, and standards to support all phases of nanotechnology development from discovery to production. The Nanofabrication Operations Group of the CNST has the mission of advancing measurement science by developing novel nanofabrication and nanomanufacturing techniques. The CNST NanoFab intends to procure a state-of-the-art Atomic Force Microscope (AFM) system that will be sited and used as a shared resource in the NanoFab cleanroom, accessible to researchers from industry, academia, NIST, and other government agencies. The AFM uses a nanometer scaled probe tip attached to the end of a cantilever which forms a spring. As the tip is brought close to the surface of a substrate, the cantilever bends and this motion is accurately detected using a laser diode and split photodetector. This bending is indicative of the tip-substrate interaction and provides a non-destructive measurement technique which recreates the material’s surface topography. The AFM is an essential tool in the NanoFab as it provides topographical measurements that are critical in the development of novel thin films and patterned media during the fabrication of nanostructured devices.

II. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Contract Line Item Number (CLIN) 0001 Description: Atomic Force Microscope (AFM) system Quantity: one (1) Technical Requirements:

A. System Design and Capabilities:

1. The system shall be capable of operating with the following imaging modes: Contact, Non-contact/tapping, Lateral force, Phase contrast, Magnetic force, and Electrostatic force

2. The system shall be designed and supplied with closed-loop scanning in X-Y directions that is decoupled from closed-loop scanning in the Z direction.

3. The closed-loop X-Y scan range shall be a minimum of 30 µm x 30 µm.

4. The closed-loop X-Y position sensor noise shall be < 150 pm RMS in typical imaging bandwidth of 625 Hz.

5. The closed-loop Z scan range shall be a minimum of 5 µm.

6. The closed-loop Z sensor noise shall be < 50 pm RMS in a typical imaging bandwidth of 625 Hz.

7. The scanner shall have a scan flatness of 2nm in Z over the entire X-Y scan range when measured using an optical flat reference.

8. The sample stage shall be motorized and accommodate samples of ≥ 10 mm in diameter up to and including samples 150 mm in diameter. The stage travel shall allow access to the full extent in all directions of a 150 mm diameter sample.

9. The Z direction movement shall be motorized and allow a minimum of 10 mm travel in Z.

10. The system shall be equipped with top view brightfield optics to allow sample imaging and probe tip placement. The optical system shall include a digital zoom function.

B. Acoustic and vibration isolation:

1. The system shall be designed and provided with an acoustically isolated enclosure.

2. The system shall be designed with and installed on a vibration-damped platform. The damping and isolation enclosure shall be sufficient for achieving closed-loop atomic-scale resolution without additional vibration isolation.

C. Data acquisition, software control and computer:

1. The system shall be supplied with dedicated system control software allowing full data acquisition of all imaging modes.

2. During image acquisition, the user shall be able to view all recorded channels simultaneously.

3. The user shall be able to perform data analysis while the AFM is acquiring data, including on a partially acquired image while that image is being acquired.

4. The sample X-Y stage movements shall be fully controlled through the software including the ability to map out and save specific scanning positions. The user shall be able to perform stage motion movements with the camera view on.

5. The system shall have the ability to physically center the laser spot with respect to the photodetector via software controls. The tip-sample engage process must be fully automated and software controlled.

6. The system shall come with a computer that has the capability of operating all the features of the system.

7. The computer operating system provided shall be Windows 10 or later.

8. The software shall come with software upgrades for a period of at least 3 years, at no additional cost to the Government.

D. Safety:

1. The user shall be protected from accidental eye exposure to the laser during cantilever exchange.

E. Other requirements:

1. The vendor shall provide footprint and facility requirement information within 7 days ARO.

F. Stronger consideration will be given to proposals that meet or exceed some or all of the following secondary specifications:

1. A guided software user interface that will allow inexperienced users the ability to perform image scans with minimal training. The software shall be a separate standalone product from the base software typically used to control the system.

2. Fully automated point and click alignment of laser spot and photodetector adjustment.

3. Closed-loop X -Y scan range greater than 80 um.

4. Closed-loop Z scan range greater than 10 um.

5. An ability to load samples with thickness greater than 20 mm.

6. Sample stage travel greater than 150 mm in the X- and Y- direction

7. Fast sample stage movement of 20 mm/sec or greater.

OPTION LINE ITEMS: THE FOLLOWING SERVICES ARE OPTION LINE ITEMS. PRICES QUOTED SHALL BE EFFECTIVE FOR A PERIOD OF ONE YEAR FROM THE DATE OF AWARD. AWARD OF OPTION LINE ITEMS IS AT THE SOLE DISCRETION OF THE GOVERNMENT IN ACCORDANCE WITH FAR 52.217-9.

CLIN 0002: OPTION LINE ITEM 1

Description: Tunneling Measurements Quantity: one (1) Technical Requirements:

A. Capability for tunneling measurements using a conductive probe.

CLIN 0002: OPTION LINE ITEM 2

Description: Contact Conductance Measurements Quantity: one (1) Technical Requirements:

A. Capability for contact conductance measurements using a conductive probe.

CLIN 0002: OPTION LINE ITEM 3

Description: Scanning Capacitance Microscopy Quantity: one (1) Technical Requirements:

A. Capability for scanning capacitance microscopy.

III. DELIVERABLES

Standards of Acceptance: The NIST TPOC or COR shall review (list deliverable) and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 30 days of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (draft plans, drawings, etc.)

IV. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899

***Due to ongoing limited site access of the NIST facilities, the Awardee SHALL confirm with the Designated Government Official and the Contracting Officer prior to ANY shipment to NIST***

V. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than thirty (30) days after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of system functions, and removal of trash. Onsite installation and demonstration shall be done at NIST, (Gaithersburg, MD)

VI. TRAINING

The contractor shall conduct training session for up to five (5) staff members at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 9:00 am to 5:00 pm immediately after installation and demonstration of specifications and must be completed no later than ten (10) days after installation. Further training requirements are identified below :

1. Contractor shall provide 1 business day of application engineering and 2 business days of basic operation and maintenance training following system installation.

VII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

a. The vendor shall provide a detailed system site acceptance testing plan with the proposal detailing tests to be completed which demonstrate system performance. Acceptance testing shall include at a minimum but not limited to:

b. Demonstrate required functional measurements to satisfy all primary requirements.

c. Demonstrate and measure vertical (z) noise floor level ensuring it is within system specifications.

d. Demonstrate the Z resolution by imaging single atomic layer height steps on terraces of highly orientated pyrolytic graphite (HOPG).

e. Demonstrate lateral spatial resolution using a known freshly-cleaved single crystal surface of KBr, HOPG, or equivalent.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST TPOC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 30 days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VIII. WARRANTY/ MAINTENANCE

The contractor shall warranty the entire system for a period of a minimum of one (1) after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

· Support shall include a response by phone within 1 business day and/or a qualified technical service engineer on site at NIST within 3 business days.

IX. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after installation and acceptance by the Contractor of fully installed system, AND

1. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

1. After successful demonstration by the instrumentation that it performs IAW the technical requirements set forth in this document AND

1. After receiving an invoice submitted properly, IAW the purchase order terms and conditions.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

X. MISCELLANEOUS INFORMATION

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Regular Business Hours. Regular business hours are Monday through Friday, 8:00 am to 5:00 pm Eastern Time, excluding Federal holidays and NIST closures.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.