NIST Requirements.docx

NIST Requirements Document Optical Tables with Vibration Isolation System

I. Background

The requirement is for an Optical Tables with Vibration Isolation System that will the supporting platform for newly procured infrared wavelength laser, the generation of vacuum- and extreme-ultraviolet light from that laser and associated vacuum beamlines. The project being pursued will allow the measurement of nanoscale semiconductor patterns by shining EUV and VUV light onto such samples and measuring the reflected, diffracted, and scattered light to determine the dimensions of these patterned features. Such projects have been carried out at longer wavelengths at NIST, but this requirement is necessary to facilitate the necessary stiffness and vibrational stability needed when using short wavelengths of light to yield better information about nanoscale dimensions especially as semiconductor dimensions continue to decrease.

Scope

Optical Tables and Vibration Isolation System: Quantity (1)

This combined Optical Table and Vibration Isolation System with be the mounting surface and supports to enable the demonstration of a recently procured table-top lab-based laser source, high-harmonic generator, and its beamlines so that we can meet our mission of determining nanoscale dimensions of patterned wafers from reflected, scattered, and diffracted light, in support of the US Semiconductor Industry.

II. Minimum Requirements The system shall meet or exceed the minimum requirements identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

The Contractor shall provide the following (1) Optical Tables with Vibration Isolation System that meet the following minimum specifications:

1. Components of the System:

1.1 The Optical Table and Vibration Isolation System shall consist of two subsystems:

i) honeycomb tables and

ii) vibration isolators.

1.2. A “honeycomb table” shall be assumed to mean “… an optical test table made up of two outer layers or "skins'' bonded to either side of a honeycomblike core, usually of aluminum or steel. It results in equal quality with greatly reduced weight relative to a granite surface plate of the same size.” Source: website “Photonics Marketplace” (accessed 10/5/2023) https://www.photonics.com/Buyers_Guide/Honeycomb_Tables/ca62800/

2. Honeycomb Tables

2.1 These specifications assume that two separate tables shall be capable of being joined together, as the specified shape requirement S2.5 cannot fit through the doors and corridors at NIST as a single custom table.

2.2 The top “skin” of the Honeycomb Tables shall be perforated with holes tapped for ¼-20 bolts.

i. These tapped holes shall be in a square grid spaced 1 inch apart, and

ii. The distance from the edges of the grid pattern to the edges of the top “skin” must be less than 2 inches on all sides.

iii. The tapped holes shall be sealed from below the top “skin.”

2.3 These Honeycomb Tables shall have rounded edges for safety.

2.4 The Honeycomb Tables shall have on its bottom “skin” the necessary all tapped holes, brackets, etc. to connect vibration isolation components to these Tables.

2.5 Viewed from above, the Optical Table and Vibration Isolation System shall be shaped in an inverted “L” shape.

i. The two Honeycomb Tables shall be configurable on site at NIST into the inverted “L” shape using connecting hardware provided by the vendor.

ii. Listed clockwise with the lower left defined as (x,y) = (0, 0), the outer perimeter of the inverted “L” shall be the line connecting (0, 0) -> (0, 10) -> (5, 10) -> (5,5) -> (5, 17) -> (0, 17) > (0, 0), in feet. Tolerances for vertices are defined in specifications 2.7, 2.8, and 2.9.

2.6 The first and second Honeycomb Tables shall be joined along the line defined by the vertices, in feet: (0,5) -> (5,5).

2.7 The first Honeycomb Table shall be (5 ± 0.2) feet x (10 ± 0.2) feet x (18 ± 0.3) inches.

2.8 The second Honeycomb Table shall be (5 ± 0.2) feet x (12 ± 0.2) feet x (18 ± 0.3) inches.

2.9 The overall dimensions of the System shall be (10 ± 0.2) feet x (17 ± 0.05) feet x (18 ± 0.3) inches. The vendor shall ensure that the combination of tables yields a 17- foot long combined table length with up to 0.05 feet of tolerance.

2.10 The first Honeycomb Table shall allow an approximate 800 lb. load on the tabletop.

2.11 The second Honeycomb Table shall allow an approximate 200 lb. load on the tabletop.

2.12 For each of the Honeycomb Tabletops:

i) The Natural frequency shall be at least 100 Hz,

ii) Q factor, or Max amplification at first resonance, shall be at most 10.

3. Vibration Isolators:

3.1 As these specifications assume the use of two separate tables joined together (Specification 2.1), the vibration system shall have a minimum of eight legs, at least four per table.

3.2 Pneumatic isolation legs shall be self-leveling using house compressed air ≤ 100 psi.

3.3 The height, h, of the Optical Table and Vibration Isolation System shall be between 30” and 34” (30” ≤ h ≤ 34”).

3.4 The pneumatic isolators shall provide an over-travel limiting mechanism for safety precautions.

3.5 For each of the two Honeycomb Tables, the Vibration Isolation shall have a weight capacity that is at least 1200 lbs. greater than the Honeycomb Table weight.

3.6 Pneumatic isolators shall have a natural frequency in the vertical direction of ≤ 1.8 Hz in response to true, low-seismic (micro-g) level inputs consistent with “real-world” floors. High-seismic input level frequency response will not be evaluated.

3.7 Pneumatic isolators should have a natural frequency in the horizontal direction of ≤ 2.9 Hz in response to true, low-seismic (micro-g) level inputs consistent with “real-world” floors. High-seismic input level frequency response will not be evaluated.

3.8 Pneumatic isolator amplification factors at resonance shall be no more than 10x in response to true, low-seismic (micro-g) level inputs of “real-world” floors. They shall also have a high "roll-off" beyond resonance yielding the following attenuation factors:

i) In the vertical direction: ≥ 85% at 5 Hz and ≥ 95% beyond 10 Hz.

ii) In the horizontal direction: ≥ 75% at 5 Hz and ≥ 92% beyond 10 Hz.

4. Additional Specifications

4.1 The vendor shall provide a CAD drawing of the assembled System Optical Table and Vibration Isolation System.

4.2 If the vendor installs hardware into one 5’ long end of the 5’ x 12’ x 18” table to enable its joining per S2.6), the vendor shall also install such hardware into the opposite 5’ long end of the 5’ x 12’ x 18” table to accommodate future expansion of the System. A potential third table is not part of this procurement.

5. Assembly (“Rigging”)

5.1 Here, the verb “rig” is defined as “to fix a piece of equipment in place” (https://dictionary.cambridge.org/dictionary/english/rig, Accessed 11/16/2023). The noun “rigging” is defined as “a) lines and chains used aboard a ship especially in working sail and supporting masts and spars; b) a similar network (as in theater scenery) used for support and manipulation” (HYPERLINK "https://www.merriam-webster.com/dictionary/rigging" https://www.merriam-webster.com/dictionary/rigging, accessed 11/16/2023).

5.2 Due to the projected weight and specified dimensions of the optical tables, the vendor or their agent(s) shall be responsible for the placement and assembling of each table with their vibration isolators and also the joining of the two tables, thus fixing this Optical Table System with Vibration Control in place in Building 217/E116 at NIST in Gaithersburg, MD.

The full path for transporting the Optical Table System with Vibration control has been mapped by NIST staff and is available. The text of the path is as follows:

Total estimated travel path: approximately 800 ft travel truck to lab with minimum clearance 52” at laboratory doors and one freight elevator. Surfaces are vinyl tiles, concrete, and granite. About 10 turns, pivots, or shifts in direction required.

The loading dock (height 47”) is at the basement level of Building 215.

Path from the truck through outer Steel Door (clear 121”) to interior loading dock is 28’.

Once inside, pivot 90° left, 14’ path to inner Steel Door (clear 108”).

Inner Steel Door to Double Door (clear 89”), path is 148’.

Path from double doors in basement of Building 215 to Basement of Building 217/219 is 45’ straight, a 20° right turn, a 12’ path, a 20° left turn, and a 54’ path.

Connecting hallway to Building 217/219 requires a 135° left turn.

Path is a 160’corridor with Storage items along left wall (narrowest clearance 76”) Path is then a turn 90 ° at an 8’ turning radius into Freight Elevator.

Freight elevator is 11.5’ deep, 13’ wide, load max > 13000 kg.

Exit fright elevator on first floor into Building 217 turning right 180° at an 8’ turning radius.

Path is 14’ slightly to the left at 15° to align with double doors (clear 69”) Path is 67’ past double doors, turning 30° right, 13’ path, turning 30° left, 60’ path.

Pivot 90° left to hallway of the laboratory, 105’ path (min clearance 80”) Laboratory doors to be removed by NIST staff, (clear appx. 52”) Entrance to lab requires appx. 35° pivot to proceed through entrance.

Laboratory is 31’ x 23.5’ with 6’ 6” Unistrut rack min clearance.

Align long axis of 17’ System inverted “L” with the 20’ of Unistrut.

Unistrut is 3’ wide x 20’ long; 6” 6” minimum clearance.

Edge of 10’ x 5’ x 18” table roughly aligns with end of Unistrut at left (required clearance 3’) Edge of 5’ x 12’ x 18” table is offset 1’ such that table is centered with 3’ Unistrut width.

Clearance around table approximately 3’ 6” (minimum of 3’ required) at far corner of 10’ x 5’ table.

It is anticipated that the tables enter the room on their sides (vertical to floor), to be flipped to orientation horizontal to floor. Mobile gantries for this purpose may be hindered by Unistrut above final table positions. Two zones where gantries would not be impeded are:

1) Near the lab entrance door, approximately 9.5’ deep x 17.5’ long, maximum and

2) Away from the door on the other side of the Unistrut, approximately 9’ deep x 25’ long, maximum.

III. Delivery Delivery shall be FOB Destination (or equivalent terms, such as INCOTERMS Delivered Duties Paid) are required and shall occur not later than (NLT) 3 months ARO.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

The National Institute of Standards and Technology 100 Bureau Drive, Building 217 Room E116 Gaithersburg, MD 20899-1640 IV. Inspection and Acceptance In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Acceptance is dependent upon the successful rigging of the two joined Honeycomb Tables with attached Vibration Isolators forming the inverted “L” shape as delineated in Specification 2.5 in Building 217, E116.

The Government will test, inspect, and accept the equipment onsite within 7 business days of the receipt of the Optical Table and Vibration Isolation System. A visual inspection of the Optical Table and Vibration Isolation System will be performed by the NIST TPOC to identify surface defects or any form of indication that the Optical Table and Vibration Isolation System was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the Optical Table and Vibration Isolation System due to defects and/or nonconformance.

V. Warranty The contractor shall warrant the entire system for a period of a minimum of one year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4

VI. Payment Schedule The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after installation and acceptance by the TPOC of fully installed system.

2. The Government anticipates inspection will occur upon:

a. After the testing procedures set forth in this document have been completed