Statement_of_Work.pdf

STATEMENT OF WORK

ASML PAS 5500/150 i-Line Lithography System Maintenance

NB687100-18-01655

ASML STEPPER PREVENTIVE MAINTENCE

STATEMENT OF WORK

I. BACKGROUND INFORMATION:

The Boulder MicroFabrication Facility (BMF) at the National Institute of Standards and Technology (NIST) provides access to microelectronic fabrication capabilities for the entire NIST-Boulder research community. One of the most critical fabrication tools in the BMF is the ASML PAS 5500/150 i-Line Lithography System (Wafer Stepper). A Wafer Stepper is the primary fabrication tool for patterning microelectronic circuits: it is used many times per day, and is essential to almost all users of the BMF. A Wafer Stepper is a very complex mechanical, optical and electronic instrument. The Wafer Stepper in the BMF was purchased in 2012 (SB1341-10-SU1239), and its current service contract expires August 17, 2018. For both safety and operational reasons, this tool requires routine periodic preventive maintenance service. In addition, should the tool experience any problems, it is vital that it be repaired as quickly as possible, since any "down time" will significantly impact the work in the BMF. Therefore, a standard Post Warranty Extended Service Contract is required on this tool, to cover both routine maintenance and emergency repair

II. SCOPE OF WORK:

a. PURPOSE: Contractor shall provide an industry standard Post Warranty Extended Service Contract for the ASML Model 5500/100D Wafer Stepper (SN: 4956) located in the Boulder MicroFabrication Facility. This Service Contract will cover regular periodic preventive maintenance visits and emergency repairs, with coverage of 5 days/week, 8 hours per day, and a 24-hour response time. Coverage will include parts and labor (except for consumable parts), the lens system and the light source for the instrument.

b. GENERAL:

(1) Confidential or Proprietary Data: This work does not involve confidential or proprietary data. The certification and accreditation requirements of Clause 1352.239-73 do not apply and a security accreditation package is not required.

(2) Safety: The Contractor employee shall be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

(3) Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and also is shown to the armed Security Police when entering the campus.

(4) Regular Business Hours. Regular business hours are Monday through Friday, 8:00 am to 5:00 pm Mountain Standard Time.

(5) Identification Badges: Contractor employees shall comply with NIST identification and access requirements. Each Contractor employee shall wear a visible identification badge provided by the NIST Security Office.

(6) Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass shall be displayed on the vehicle in accordance with NIST Security Office instructions.

c. SPECIFIC REQUIREMENTS:

(1) Contractor shall provide:

(a) Preventive Maintenance (PM) as per original manufacturer (ASML) specifications for this instrument

(b) Repair of equipment as needed to maintain operation and performance to manufacturer's specification. Repair includes parts and labor as required (excluding parts listed below).

(c) Installation of software upgrades as required by the manufacturer.

(2) Excluded Parts:

(a) Consumable Parts and Supplies

(b) Projection Lens

(c) Light Source

(3) Respond to service calls during regular business hours only - Monday through Friday, between 8:00 a.m. and 5:00 p.m. Mountain Time, with the exception of Federal Holidays. A service technician will provide on-site service at NIST Boulder within a maximum 24- hour response time after the call is placed. No weekend service visits shall be required. Telephone and email response and support during normal working hours.

(4) Service Conditions:

(a) All service provided under this agreement must be provided by trained personnel.

(b) Service must be rendered on-site at the NIST-Boulder campus. Contractor personnel will be met at the NIST-Boulder Campus Visitor Center and escorted to the

BMF.

III. PERIOD OF PERFORMANCE:

Period-of-Performance: From Through Base Year 08/18/2018 08/17/2019 Option Year I 08/18/2019 08/17/2020 Option Year II 08/18/2020 08/17/2021 Option Year III 08/18/2021 08/17/2022

Option Year IV 08/18/2022 08/17/2023

IV. PLACE OF PERFORMANCE:

U.S. DOC/NIST, 325 Broadway, Bldg 81, Boulder, CO 80305

Normal business hours are Monday through Friday, 8:00 a.m. to 5:00 p.m. Mountain Standard Time, with the exception of Federal holidays.

V. GOVERNMENT FURNISHED PROPERTY:

a. All property, data and information provided by the Government in the performance of this task remains the property of the Government and shall be surrendered to the government upon completion or termination of this requirement. Likewise, all deliverables generated under this requirement remain the property of the Government.

b. The Government will provide visitor’s access to the NIST facilities during the performance of this service contract.

VI. DELIVERABLES:

a. During the period of Performance, the Contractor will schedule regular periodic maintenance visits to maintain proper tool operation.

b. In the event of unscheduled needed repairs, the Contractor shall respond to requests for repairs within 24 hours (based on a 5 day per week, 8-hour working day). The response shall consist of a minimum of telephone or email response. If remote response is not adequate to rectify the problem with the wafer stepper, the response will include a schedule for on-site repairs to be performed by the Contractor.

c. Contractor shall provide written service reports following each service visit.

VII. ATTACHMENTS:

None

VIII. PERFORMANCE REQUIREMENT SUMMARY:

Task Performance Indicators

Performance Standards

Acceptability Quality Level

Surveillance Method

Maintain & Repair Wafer Stepper

Tool operates according to manufacturer’s specifications

Items defined in Specific Requirements are performed commencing Augusts 17, Repair uses Original Equipment Manufacturer’s (OEM) components.

Test and calibration are according to OEM normal specifications.

Calibration certificate from manufacturer and verification that Wafer Stepper operates according to

OEM

specifications.

IX. TRAVEL:

Travel to the NIST, Boulder is required. All travel expenses will be included in the price of this agreement, and are the responsibility of the Contractor.