Evaluation_Criteria_and_Scoring_Sheet.docx

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Attached to
ASML Stepper Preventive Maintenance Federal contract opportunity
Solicitation number
NB687100-18-01655
Issued by
Department of Commerce National Institute of Standards and Technology

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Statement_of_Work.pdf PDF

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EVALUATION

ASML PAS 5500/150 i-Line Lithography System Maintenance

NB687100-18-01655

Criteria

1. Personnel

a. List the number of service personnel and their locations available to service our tool.

b. Describe the procedure to escalate service issues when the work is beyond the scope of the personnel.

2. Parts Supply:

a. Describe briefly the supply of repair parts available.

b. Describe plans to upgrade parts as they become obsolete or unavailable.

3. Past Experience:

Provide the names and phone numbers or email contacts of between 3 and 5 users under current service contracts for similar tools.

Evaluation Scoring Sheet

1. Personnel (30 points)

a. List the number of service personnel and their locations available to service our tool. (15 points)

b. Describe the procedure to escalate service issues when the work is beyond the scope of the personnel. (15 points)

2. Parts supply (30 points)

a. Describe briefly the supply of repair parts available. (15 points)

b. Describe plans to upgrade parts as they become obsolete or unavailable. (15 points)

3. Past Experience (40 points – see Reference Scoring Sheets)

Reference 1 Reference 2 Reference 3 Reference 4 Reference 5

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