NB687010-15-03387 _Statement_of_Work.pdf

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Attached to
Electron-beam evaporator system Federal contract opportunity
Solicitation number
NB687010-15-03387
Issued by
Department of Commerce National Institute of Standards and Technology

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Attached Statement of Work.

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National Institute of Standards and Technology

STATEMENT OF WORK

PURPOSE

The National Institute of Standards and Technology (NIST), requires an electron-beam evaporator system for deposition of silicon in an ultrahigh vacuum, scanning tunneling microscope system. The electron-beam evaporator will be mounted on the preparation chamber of a QuadraProbe scanning tunneling microscope system.

TECHNICAL SPECIFICATIONS:

1. The electron beam evaporator must be capable of vapor deposition of thin layers (sub-monolayer to a tens of monolayers) of Si, via evaporation from either a rod or a crucible. The evaporator must include a shutter.

2. The system must include a power supply, which will provide all necessary voltages and currents, including high voltages as well as the filament current. The system must also include appropriate cables for connecting the power supply to the evaporator.

3. The evaporator must be capable of being cooled with chilled water circulation.

4. The evaporator must be UHV compatible. The evaporator must be mountable on a 2.75-inch

Conflat (CF) flange. The vacuum side length must not exceed 220 mm. The vacuum side diameter must be less than 35 mm. The air side length must not exceed 200 mm.

DELIVERABLE SCHEDULE

The Contractor shall deliver no later than eight (8) weeks after receipt of order.

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