NFR_grade_Sodalime_Mask_Blanks_2010-12.pdf
PDF 397 KB Posted
- Attached to
- 6" Reticle Blanks Federal contract opportunity
- Solicitation number
- NB686020-15-01630
About this file
SPECIFICATION FOR HARD SURFACE PHOTOMASK SUBSTRATES
View the file
Other files for this federal contract opportunity
| File | Type | Posted |
|---|---|---|
| pg_2_CD492_Signed.pdf | ||
| pg_2_CD492_Signed.pdf | ||
| 01630_SOW.doc | DOC document |
On GovTribe
Work with this file on GovTribe
- Download the original file
- Contacts named in this file
- Similar government files
- Ask GovTribe AI about this file
Text version
ＵＬＣＯＡＴ Ｃｏｎｆｉｄｅｎｔｉａｌ July. 23rd, 2010.
Technical Information and Specifications of
“NFR” Grade Sodalime Mask Blanks
Glass Substrate Information
Size:
Flatness:
A B
| A - B | ≦ 5µm
Shape:
/inch /mm Min. Max. Min. Max. ±0.004 ±0.1
NFR-4006 101x101 3.97 4.00 100.8 101.6 0.06 1.50 NFR-4009 101x101 3.97 4.00 100.8 101.6 0.09 2.30 NFR-5009 127x127 4.97 5.00 126.2 127.0 0.09 2.30 NFR-6012 152x152 5.97 6.00 151.6 152.4 0.12 3.05 NFR-7012 177x177 6.97 7.00 177.0 177.8 0.12 3.05
Code Nominal Size /mm
Actual Size Plate Thickness /inch /mm
Code Guarantee Area
NFR-4006
NFR-4009
NFR-5009 15um
NFR-6012
NFR-7012
Chrome Film Information SEM Image: Chrome Pattern Profile
Current (DMFR Grade) NFR Grade
Chrome Film Characteristic -Spectroscopic Curves-
O.D. Curve: Reflectance Curve:
0.0
10.0
20.0
30.0
40.0
50.0
200 300 400 500 600 700 800
Wave Length /nm R ef le ct an ce
NFR Grade
Current
2.0
3.0
4.0
350 450 550 650 750 Wave Length /nm
O pt ic al
D en si ty
NFR Grade
Current
Sodalime Mask Blanks Specifications DMFR and NFR Grade
Product Grade DMFR NFR Product Code DMFR-5009(E)-LAZP1350 NFR-5009(E)-LAZP1350 Glass Type Soda Lime Soda Lime Polish Standard grade Mature grade Flatness and Code 15um=(E) (E)=15um Unified Flatness
Guarantee area 4" diameter 4" diameter Thickness 2.30mm +/-0.10mm 2.30mm +/-0.10mm Dimension 126.2-127.0 mm 126.2-127.0 mm Defect Glass Chip 0 @ > 1.0mm 0 @ > 1.0mm
Glass Pit 0 @ > 10.0um 0 @ > 10.0um Glass Scratch 0 @ > 10.0um 0 @ > 10.0um
Squareness =/< 6 parts per thousand =/< 6 parts per thousand Chrome Film
Film thickness 1050Å +/-80A 1050Å +/-80A Etch to Clear Test 43 +/- 5sec. 43 +/- 5sec.
Reflectivity (%meas. @436nm) 11.0 +/- 3.0% 11.0 +/- 3.0% Optical Density (@450nm) 3.0 +/- 0.2 3.0 +/- 0.2 Pinhole 0 > 5um 0 > 5um
Resist Type AZP1350 AZP1350 Guarantee area All area except 10 mm from edge All area except 10 mm from edge Thickness 5000Å +/-100Å 5000Å +/-100Å
Surface Particles 0 > 5um 0 > 5um
Product Code Information -Shipping Code (Label)-
Product Name： NFR-5009(E)-LAZ
N F R - 5 0 0 9 (E) - L A Z
Resist Type
L： Cr film @1050Å
E： Flatness @15um
09： Glass thickness of 2.3mm (0.9 inch)
50： Glass size of 127x127mm (5.0 inch Square)
R： Soda Lime
F： Square
N： NFR Grade
File details come from the government source that posted it. Updated .