01630_SOW.doc
DOC document 27 KB Posted
- Attached to
- 6" Reticle Blanks Federal contract opportunity
- Solicitation number
- NB686020-15-01630
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SOW Specifications
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Other files for this federal contract opportunity
| File | Type | Posted |
|---|---|---|
| pg_2_CD492_Signed.pdf | ||
| pg_2_CD492_Signed.pdf | ||
| NFR_grade_Sodalime_Mask_Blanks_2010-12.pdf |
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STATEMENT OF WORK
NB686020-15-01630
PURPOSE:
NIST requires 6” reticle blanks for use in fabrication of devices in the cleanroom. These reticles consist of a 6” square transparent substrate coated with a Cr based opaque material and photoresist. We require a quantity of 320 plates.
TECHNICAL SPECIFICATIONS:
Material: Soda lime glass
Size: Min 151.6 mm Max 152.4 mm (nominal 6”)
Thickness: 3.05 +/- 0.1 mm (nominal 0.12”)
Squareness: < 8 parts/thousand
The following must be met in a circle of quality of 100 mm diameter
Flatness: 15 um or better
Cr nominal thickness: 95 nm -115 nm
Cr thickness variation: < 10 nm
Optical density: > 3 @ 365 nm
Pinholes: 0 > 5um
Photoresist: AZ1350 or equivalent – 500 nm thick
Surface particles: 0 > 10um
Conforming to SEMI Spec SEMI P1-0708
“SPECIFICATION FOR HARD SURFACE PHOTOMASK SUBSTRATES”
DELIVERABLE SCHEDULE:
ASAP and no later than 4 weeks ARO
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