questions_with_answers.pdf

Questions and Answers – NB672030-19-02410 Automated Probe Station

Base Probe Station:

1. Chuck size? >= 200 mm. See Item 1. Semiautomatic probe station.

2. Device under test dimensions? <= 200 mm

3. Pad sizes to be probed? >= 10 um

4. Stage resolution and accuracy? +/-4 um XY positioning accuracy, +/-4 um Z positioning accuracy Item 1.

Semiautomatic probe station.

5. Are there any thermal requirements for the wafer chuck? Temperature range of 25-100C. See Item 2.

Thermal control

6. Are there any additional probes/positioners that will be used with the probe station? See Item 4.

Programmable micropositioner for right-hand probe. and Item 5. Manual micropositioner for left-hand probe.

Optics:

1. Magnification required? Item 3. Zoom microscope with XYZ movement and color camera

2. Are eyepieces required, or video-only? Video only is OK. See Item 3. Zoom microscope with XYZ movement and color camera

3. Do you require programmable positioning of microscope? X & Y range? No

RF Probing:

1. Make(s) and model(s) of VNA, and frequency extenders to be used with the probe station? OML for frequency extenders below 500 GHz, VDI above 500 GHz.

2. X, Y, and Z range of RF positioners? See Item 4. Programmable micropositioner for right-hand probe. and Item 5. Manual micropositioner for left-hand probe.

3. Resolution and accuracy of programmable RF positioner? See Item 4. Programmable micropositioner for right-hand probe.

NOTES:

**We will have to make RF measurements and measurements with the extender heads. We also will need to supply bias from the north, south or both. The OML extender heads are of type V06VNA2-T/R.

The VDI extender heads are of the older type shown below. As I am not at work today, I don’t have the model numbers, but I hope that this is enough. If not, ask Lia and I will get them to you Monday.

**For the thermal chuck, we only need to heat smaller die, and either electrically heated or fluid would be acceptable.

Accessories:

1. Is an anti-vibration table required? No, unless required to meet other specifications.

2. Does N.I.S.T. have vacuum and high-pressure air available? Yes.

Specifications I sent you:

Item 1. Semiautomatic probe station.

Specification 1.1 Chuck of 200 mm or greater diameter Specification 1.2 200 mm of total XY stage movement or greater

Questions and Answers – NB672030-19-02410 Automated Probe Station

Specification 1.3 10 mm of Z movement or greater Specification 1.4 Chuck theta rotation Specifiaction 1.5 Automated prober controller with computer and two monitors Specification 1.6 +/-4 um XY positioning accuracy, +/-4 um Z positioning accuracy Specification 1.7 Platen with vacuum hold-down for 10 mm, 50 mm, 100 mm and 150 mm wafers

Item 2. Thermal control Specification 2.1 25 x 25 mm area for wafer or integrated circuit Specification 2.2 Temperature range of 25-100C Specification 2.3 May be built into chuck or placed on chuck Specification 2.4 Vacuum hold down

Item 3. Zoom microscope with XYZ movement and color camera Specification 3.1 Optical resolution of 2 um or better Specification 3.2 Optical zoom factor of 10:1 or greater Specification 3.3 3 MP camera or better Specification 3.4 Display (separate or integrated with system controller display)

Item 4. Programmable micropositioner for right-hand probe.

Specification 4.1 Minimum 25 mm travel in XY, 10 mm travel in Z with +/-2 um accuracy Specification 4.2 Ability to hold OML, VDI and Keysight 1.0 mm and RWG extender heads in fashion suitable for microwave probing Specification 4.3 Automated, closed-loop positioning with encoder Specification 4.4 Accomodates direct probe mount or probe mount on extender head to minimize signal path.

Specification 4.5 Probe planarity adjustment

Item 5. Manual micropositioner for left-hand probe.

Specification 4.1 Minimum 25 mm travel in XY, 10 mm travel in Z with +/-2 um accuracy Specification 4.2 Ability to hold OML, VDI and Keysight 1.0 mm and RWG extender heads in fashion suitable for microwave probing Specification 4.3 Accomidates direct probe mount or probe mount on externder head to minimize signal path Specification 4.4 Probe planarity adjustment

Item 6. Isolation table appropriate for holding above positioning tolerances during auotmated microwave probing with less than +/-2 um of probe movement with respect to the wafer during contact and data acquisition.

Item 7. On-site installation, instruction, warrenty repair and maintainance as detailed below.