Attahment_IV_-_Statement_of_Work.docm
DOCM document 162 KB Posted
- Attached to
- Automated Microwave Probe Station Federal contract opportunity
- Solicitation number
- NB672030-19-02410
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Statement of Work
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| File | Type | Posted |
|---|---|---|
| questions_with_answers.pdf | ||
| Attachment_I_-_Provisions_and_Clauses.docx | DOCX document | |
| Attachment_III_-_Evaluation_Criteria.docx | DOCX document | |
| Attachment_II_-_Pricing_Schedule.docx | DOCX document |
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Statement of Work
Use this Statement of Work document to purchase an item and/or item-related services.
TITLE: Automated Microwave Probe Station Requesting Lab/Division/Group: CTL 672.03 Requisition Number: NB672030-19-02410 Statement of Need NIST requires an automated microwave probe station for precision testing of on-wafer integrated circuits with microwave probes. The station must have a fully automated chuck, one manual probe positioner, and one automated probe positioner to allow for automated measurements of DUTs of different lengths. The station must be able to accommodate direct probe mounting or mounting of extender heads with directly attached probes.
Items and/or item-related services
| Section |
| Requirements |
| Related Information |
Items/Service (required)
Item 1. Semiautomatic probe station.
Specification 1.1 Chuck of 200 mm or greater diameter Specification 1.2 200 mm of total XY stage movement or greater Specification 1.3 10 mm of Z movement or greater Specification 1.4 Chuck theta rotation Specifiaction 1.5 Automated prober controller with computer and two monitors Specification 1.6 +/-4 um XY positioning accuracy, +/-4 um Z positioning accuracy Specification 1.7 Platen with vacuum hold-down for 10 mm, 50 mm, 100 mm and 150 mm wafers
Item 2. Thermal control Specification 2.1 25 x 25 mm area for wafer or integrated circuit Specification 2.2 Temperature range of 25-100C Specification 2.3 May be built into chuck or placed on chuck Specification 2.4 Vacuum hold down
Item 3. Zoom microscope with XYZ movement and color camera Specification 3.1 Optical resolution of 2 um or better Specification 3.2 Optical zoom factor of 10:1 or greater Specification 3.3 3 MP camera Specification 3.4 Display (separate or integrated with system controller)
Item 4. Programmable micropositioner for one probe.
Specification 4.1 Minimum 25 mm travel in XY, 10 mm travel in Z with +/-2 um accuracy Specification 4.2 Ability to hold OML, VDI and Keysight 1.0 mm and RWG extender heads in fashion suitable for microwave probing Specification 4.3 Automated, closed-loop positioning with encoder Specification 4.4 Accomidates direct probe mount or probe mount on extender head to minimize signal path.
Specification 4.5 Probe planarity adjustment
Item 5. Manual micropositioner for one probe.
Specification 4.1 Minimum 25 mm travel in XY, 10 mm travel in Z with +/-2 um accuracy Specification 4.2 Ability to hold OML, VDI and Keysight 1.0 mm and RWG extender heads in fashion suitable for microwave probing Specification 4.3 Accomidates direct probe mount or probe mount on externder head to minimize signal path Specification 4.4 Probe planarity adjustment
Item 6. Isolation table appropriate for holding above positioning tolerances during auotmated microwave probing with less than +/-2 um of probe movement with respect to the wafer during contact and data acquisition.
Item 7. On-site installation, instruction, warrenty repair and maintainance as detailed below.
☐ See attached document for detailed specifications
Shipping & Delivery ☐ N/A Delivery and on-site installation provided by vendor.
☒ Phased delivery is acceptable ☐ Software on USB / disk required ☐ Software electronic delivery acceptable Email address for software delivery
To be installed in 81 1E121
Installation
☐ Site visit recommended
Inspection and Acceptance
Prior to acceptance, NIST personnel will inspect and evaluate the item for proper performance against expected specifications.
☐ Government acceptance expected to take longer than 7 days
Warranty
Extended Warranty Required All parts and repair for manufacturing defects.
Period Length:3 year minimum warranty
| ☐ Option Period 1 |
| ☐ Option Period 2 |
| ☐ Option Period 3 |
| ☐ Option Period 4 |
Training
Training of NIST staff accomplished during installation.
Maintenance
Entire system ☐See attached document for detailed maintenance specifications Period Length: Extended maintainance agreement of at least 3 years must be offered
| ☐ Option Period 1 |
| ☐ Option Period 2 |
| ☐ Option Period 3 |
| ☐ Option Period 4 |
Repair
No repairs included outside of warranty period
Period Length: Ex. month, 6 month, year etc.
| ☐ Option Period 1 |
| ☐ Option Period 2 |
| ☐ Option Period 3 |
| ☐ Option Period 4 |
Government Furnished Material / Equipment
120 V 15A power, compressed air, vacuum, dry nitrogen
Travel ☐ N/A Installation, training, maintainance and warranty repair.
Vendor: To the maximum extent possible, include as part of appropriate sections above (maintenance, repair, etc.). Otherwise, it will be a separate line item, reimbursable per the Federal Travel Regulation.
Should be included in base estimate
Statement of Work: Automated Microwave Probe Station Last Saved: 6/28/2019 2:23 PM Double-click on for further assistance.
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