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1.Are you replacing a current PVD system? Yes If so, who is the vendor? Denton
If not, are you targeting a particular manufacturer for this PVD system? We are looking for a PVD system that meets our specifications
| 2.Do you envision loading the wafers into the system via SEMI Standard 6" |
| wafer load ports that accommodate 6" wafer cassettes? No |
| 3.In the semiconductor industry, such systems typically have an atmospheric |
| robot front-end module that transfers the wafers from the load ports into the |
| load locks. Does your envisioned design include an atmospheric robot |
| front-end module? No |
| 4.In the semiconductor industry, such systems are modular, so there are many |
| different configurations. Typically, a PVD chamber, or several PVD chambers, |
| are connected to a wafer transfer system that operates at high vacuum and that |
| contains a vacuum robot for moving wafers in and out of the PVD chamber. If I |
| understand correctly, the configuration that you are requesting does not have |
| a vacuum wafer transfer system for moving wafers in and out of the chamber. |
| My understanding is that a single load lock is connected to the PVD chamber, |
| and the wafer is transferred directly into and out of the PVD chamber via this |
| load lock. Is that correct? Yes |
| 5.Typically, such systems must be installed by the vendor. They also must have |
| a full process qualification completed to verify that they are operating |
| within the required specification limits. I do not see that called out in |
| your solicitation. That process takes significant time and man-hours and is |
| an essential element to ensure the success of PVD processes. Do you want the |
| hardware installation and process setup added in as a separate line item |
| within the quote? Yes. Installation and training should be part of the quote. |
| 6.How about training and applications support? In house training at the time |
| of installation. Apps support is expected to be minimal. Training your team |
| on how to properly operate and maintain this system is also an essential |
| element to ensuring proper performance of the system. In addition, setting up |
| recipes on the system and tuning in your processes will take the assistance of |
| the vendor's applications engineers. How many hours of this do you require? |
| 1-2 days training. |
| 7. Will your organization be performing the Preventive Maintenance on this |
| system? routine PM yes. after the warrantee period, we plan to investigate a |
| service contract. Typically, the more invasive PM tasks are performed by the |
| vendor |