SATPC0034971 Tab 10 SOW_Redacted.pdf

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Attached to
SEM Sputter Coater and Carbon Rod Federal contract opportunity
Solicitation number
80NSSC24869533Q
Issued by
National Aeronautics and Space Administration Shared Services Center

About this file

This document is a Statement of Work (SOW) for a Carbon Sputter Coater with Carbon Rod to be procured by NASA. The objective is to replace aging equipment and expand imaging capabilities in the NASA Applied Chemistry Lab and NASA Investigative Chemistry Laboratory, allowing for the examination of materials that are known to charge and prevent examination under current equipment.

The SOW specifies the required characteristics of the DENTON DESK-V Sputter Coater and Carbon Rod Evap Accessory, including capabilities for DC sputtering, sputter etching, programmable recipes, and vacuum pressure requirements. The unit is to be delivered to the NASA Kennedy Space Center, Building M7-0355, Room 1274C, with an anticipated on-site need date of 9/1/2024. The payment terms are 100% Net 30 days after delivery, and acceptable forms of payment are check, wire, or ACH. This procurement is related to Solicitation Number 80NSSC24869533Q for a SEM Sputter Coater and Carbon Rod.

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SATPC0034971 Tab 10 SOW_Redacted.pdf PDF
SATPC0034971 Tab 10 RFQ Open Market.pdf PDF

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Text version

Carbon Sputter Coater with Carbon Rod

STATEMENT OF WORK

1. Objective/Description

Request for equipment to replace aging capabilities and expand those of the NASA Applied Chemistry Lab and NASA Investigative Chemistry Laboratory. Allows for imaging of materials that are known to charge and prevent examination under current equipment capabilities. This capability does not currently exist at KSC. Increases ability to identify and investigate a broader range of samples by mitigating charging issues. Increases capabilities for Commercia Crew Program support and NASA Investigative Chemistry Laboratory. Supports multiple programs across the agency and KSC: CCP, EGS, STMD, MCO. Procuring the DENTON DESK-V Sputter Coater (DTN-DSK00V-0023) and Carbon Rod Evap Accy 120V STD DESK V (CAR001-0071) allows for warranty of the instrument and future expansion to gold and platinum sputter coater by procuring smaller add on accessories. Current gold sputter coater is old and no spare parts left so this will be a good backup for rapid accessory/capability add on in the future.

2. Characteristics, Scope, and Specs/Requirements

A)DENTON DESK-V Sputter Coater (DTN-DSK00V-0023) and Carbon Rod Evap Accy B)120V STD DESK V (CAR001-0071) for Carbon sputter coating

Standard operations required:

-DC sputtering -Sputter etch samples -Etch table with shutter allows user to pre-clean samples prior to deposition -PLC full-color touch-screen capable of storing up to 10 user-defined recipes -Color touch-screen to monitor and change process in real time -Mechanical pump to reach 50 mtorr process pressure -6" diameter glass process chamber

Minimum required specifications:

Baseplate.

-Two-stage, direct-drive Mechanical Pump located outside of the system cabinet to evacuate the cylinder.

-An automatic Vent Valve is attached to the mechanical pump. It will automatically open when the -Mechanical Pump is turned OFF to vent the chamber to atmosphere. It will automatically close when the Mechanical pump is turned on.

-An insulated Specimen Table with provisions for height adjustment.

-A manual Gas Control is provided to control pressure in the cylinder.

-Six main operations for the system: Vacuum, Etch Enable (if equipped), Rotation (if equipped), Sputter Enable, Timed Etch (if equipped) and Timed Sputter.

-A Programmable Logic Controller (PLC) controls the system. A Touch Screen is used to interface with the PLC. Operator interface is through a graphics program that is running on the Touch Screen.

Electrical Requirements:

120VAC; 10 Amps

CARBON ROD ACCESSORY AND CARBON YARN ACCESSORY: 120 VAC; 10 Amps (standard)

3. Place of Performance This unit will be delivered to NASA Kennedy Space Center, Building M7-0355, Room

1274C. This room is a dedicated room for use with the FE-SEM with gas commodities needed to service this instrument. The technical use authority for the instrument is

4. Period of Performance 9/1/2024 (anticipated on-site need date).

Estimated Delivery: Estimate Delivery TBD Payment Terms: 100% Net 30 days after Delivery Acceptable forms of Payment: Check, Wire or ACH

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