SOW Revised.docx

STATEMENT OF WORK

CHIPS R&D: XAFS and Diffraction, Silicon Drift Detector

MML/643

BACKGROUND INFORMATION

This project involves an existing NIST Synchrotron beamline at the National Synchrotron Light Source II (NSLS-II) and an existing CRADA with IBM. It’s purpose is to improve the X-ray Absorption Spectroscopy (XAS) measurement capabilities for state of the art semiconductor samples working directly with IBM researchers stationed at NIST’s Beamline for Materials Measurement (BMM) and other researchers studying materials for information technology. The proposed detector enhancement will substantially increase sample throughput and measurement sensitivity, driving the ability to probe semiconductor device interfaces, a broader set of element/matrix combinations, and nanoscale structures in device stacks. These enhanced capabilities will become broadly available to the US Semiconductor Industry by allocation of beam time at the BMM via NIST’s Partner User Agreement with NSLS-II (DOE). This broad and rapid accessibility of the new x-ray beamline metrology will directly enhance innovation and competitiveness in the US Semiconductor Industry.

SCOPE

The goal of this contract is to deliver a new, seven-element silicon drift detector (SDD) for measurement of X-ray Fluorescence (XRF) spectroscopy and fluorescence X-ray Absorption Spectroscopy (XAS) at NIST’s Beamline for Materials Measurement.

MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Hitachi Vortex ME-7 STD SDD Seven-element silicon drift detector or equal which shall meet or exceed the following requirements:

A. Technical Specifications

a. seven detector elements

b. 0.5 mm thick silicon detector elements

c. 50 mm2 detector area per element

d. integrated power supply with cables

e. integrated vacuum system

f. energy resolution < 150 eV at 5900 eV with peaking time of 0.5 μs and output count rate < 250,000 counts per second on each detector element

g. pre-amplifiers for each detector element with signals compatible for use with an existing Xspress3 detector readout system

h. BNC signal interfaces

i. 12.5 micron thick beryllium window or any alternate window material with comparable Xray transmission properties

j. U.S. line voltage compatibility

PLACE OF PERFORMANCE

a. All work shall be performed at NIST’s Beamline for Materials Measurement (BMM) at the National Synchrotron Light Source II, Brookhaven National Laboratory, Upton NY 11973

b. The government will provide access to BMM and/or beamline computer systems to the contractor for the entire period of performance of this contract.

c. The day-to-day supervision and direct control over the work performed by the on-site contractor personnel shall be the sole responsibility of the contractor.

PERIOD OF PERFORMANCE/LEAD TIME

The period of performance will take approximately 40 weeks ARO.

DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent such as INCOTERMS Delivered Duties Paid) and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order (NIST Dock); and pay all charges (including any duties/customs fees) to the specified point of delivery. The contractor shall deliver all Line Items to:

NIST / Beamline 6BM Building 740 Brookhaven National Laboratory Upton NY 11973 Attn: Bruce Ravel

INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Synchrotron radiation (specifically the X-ray beam at BMM) or a sealed source will be used to perform calibration and to test performance

2. Calibration of the existing Xspress3 detector readout system for the new detector will be performed

3. Energy resolution metric will be evaluated for each detector elements

4. Integration into beamline control and data acquisition system

5. Successful measurement of XRF and XAS spectra using the new detector

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST COR to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 90 days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

WARRANTY

The contractor shall warrant the entire system for a period of a minimum of one year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government.

PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

100% after receipt, completion of inspection testing and final acceptance by the COR

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

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