This Project Grant award, provided by the National Science Foundation's Engineering (NSF ENG) program (CFDA 47.041), supports fundamental research to develop a scalable manufacturing method for preparing phase-pure ferroelectric hafnium oxide and hafnium zirconium oxide materials. The $125,152 award to Virginia Polytechnic Institute & State University (Virginia Tech) aims to advance the understanding of how atomic layer deposition process parameters impact amorphous structure and its effect on the nucleation of the desired crystalline phases. The research intends to enable the production of these specialized electronic materials that can improve the energy efficiency of future computing technologies. In addition to the core research activities, the project involves educational outreach to students in economically disadvantaged areas to promote interest in science, technology, engineering, and mathematics. The award period runs from September 15, 2023 to January 31, 2026.
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