P00006 BOSTON MICROMACHINES CORPORATION PROPOSES HIGH-PRECISION DEFORMABLE MIRROR (DM) SYSTEMS WITH ONE HUNDRED ACTUATORS ACROSS THE ACTIVE APERTURE, CORRESPONDING TO ALMOST EIGHT THOUSAND ACTUATORS IN THE DEVICE S CIRCULAR APERTURE, USING AN INNOVATIVE NEW APPROACH FOR PACKAGING AND INTEGRATION. THE PROPOSED WORK FOCUSES ON A TECHNOLOGY GAP THAT NASA HAS IDENTIFIED AS CRITICAL FOR SPACE-BASED EXOPLANET IMAGING: PRODUCTION TECHNIQUES FOR SMALL-STROKE, HIGH-RELIABILITY, HIGH-PRECISION DEFORMABLE MIRROR SYSTEMS. THE MAIN OBJECTIVE IN THIS PHASE II PROJECT IS TO SUBSTANTIALLY INCREASE THE STATE-OF-THE-ART FOR THE NUMBER OF ACTUATORS IN A COMPACT MEMS DM SYSTEM USING MICROELECTROMECHANICAL SYSTEMS (MEMS) PRODUCTION PROCESSES AND EMPLOYING A MULTIPLE-LAYER APPROACH TO INTEGRATING ROUTING LINE LAYERS IN THE DEVICE. MEMS DMS WILL BE BONDED TO CUSTOM MANUFACTURED PRINTED CIRCUIT BOARDS USING CONDUCTIVE EPOXY BONDS AND FLIP-CHIP ALIGNMENT BASED ON A NEW STENCIL PRINTING PROCESS DEMONSTRATED IN THE PHASE I PROJECT. THE PROPOSED WORK INCLUDES TESTING AND EVALUATION OF SURFACE TOPOGRAPHY OF DMS BEFORE AND AFTER BONDING AND ASSESSMENT OF ACTUATOR YIELD AND RELIABILITY. Other Administrative Action $0 6/2/21 P00005 BOSTON MICROMACHINES CORPORATION PROPOSES HIGH-PRECISION DEFORMABLE MIRROR (DM) SYSTEMS WITH ONE HUNDRED ACTUATORS ACROSS THE ACTIVE APERTURE, CORRESPONDING TO ALMOST EIGHT THOUSAND ACTUATORS IN THE DEVICE S CIRCULAR APERTURE, USING AN INNOVATIVE NEW APPROACH FOR PACKAGING AND INTEGRATION. THE PROPOSED WORK FOCUSES ON A TECHNOLOGY GAP THAT NASA HAS IDENTIFIED AS CRITICAL FOR SPACE-BASED EXOPLANET IMAGING: PRODUCTION TECHNIQUES FOR SMALL-STROKE, HIGH-RELIABILITY, HIGH-PRECISION DEFORMABLE MIRROR SYSTEMS. THE MAIN OBJECTIVE IN THIS PHASE II PROJECT IS TO SUBSTANTIALLY INCREASE THE STATE-OF-THE-ART FOR THE NUMBER OF ACTUATORS IN A COMPACT MEMS DM SYSTEM USING MICROELECTROMECHANICAL SYSTEMS (MEMS) PRODUCTION PROCESSES AND EMPLOYING A MULTIPLE-LAYER APPROACH TO INTEGRATING ROUTING LINE LAYERS IN THE DEVICE. MEMS DMS WILL BE BONDED TO CUSTOM MANUFACTURED PRINTED CIRCUIT BOARDS USING CONDUCTIVE EPOXY BONDS AND FLIP-CHIP ALIGNMENT BASED ON A NEW STENCIL PRINTING PROCESS DEMONSTRATED IN THE PHASE I PROJECT. THE PROPOSED WORK INCLUDES TESTING AND EVALUATION OF SURFACE TOPOGRAPHY OF DMS BEFORE AND AFTER BONDING AND ASSESSMENT OF ACTUATOR YIELD AND RELIABILITY. Other Administrative Action $0 4/30/21 P00004 BOSTON MICROMACHINES CORPORATION PROPOSES HIGH-PRECISION DEFORMABLE MIRROR (DM) SYSTEMS WITH ONE HUNDRED ACTUATORS ACROSS THE ACTIVE APERTURE, CORRESPONDING TO ALMOST EIGHT THOUSAND ACTUATORS IN THE DEVICE S CIRCULAR APERTURE, USING AN INNOVATIVE NEW APPROACH FOR PACKAGING AND INTEGRATION. THE PROPOSED WORK FOCUSES ON A TECHNOLOGY GAP THAT NASA HAS IDENTIFIED AS CRITICAL FOR SPACE-BASED EXOPLANET IMAGING: PRODUCTION TECHNIQUES FOR SMALL-STROKE, HIGH-RELIABILITY, HIGH-PRECISION DEFORMABLE MIRROR SYSTEMS. THE MAIN OBJECTIVE IN THIS PHASE II PROJECT IS TO SUBSTANTIALLY INCREASE THE STATE-OF-THE-ART FOR THE NUMBER OF ACTUATORS IN A COMPACT MEMS DM SYSTEM USING MICROELECTROMECHANICAL SYSTEMS (MEMS) PRODUCTION PROCESSES AND EMPLOYING A MULTIPLE-LAYER APPROACH TO INTEGRATING ROUTING LINE LAYERS IN THE DEVICE. MEMS DMS WILL BE BONDED TO CUSTOM MANUFACTURED PRINTED CIRCUIT BOARDS USING CONDUCTIVE EPOXY BONDS AND FLIP-CHIP ALIGNMENT BASED ON A NEW STENCIL PRINTING PROCESS DEMONSTRATED IN THE PHASE I PROJECT. THE PROPOSED WORK INCLUDES TESTING AND EVALUATION OF SURFACE TOPOGRAPHY OF DMS BEFORE AND AFTER BONDING AND ASSESSMENT OF ACTUATOR YIELD AND RELIABILITY. Other Administrative Action $0 12/1/20 P00003 BOSTON MICROMACHINES CORPORATION PROPOSES HIGH-PRECISION DEFORMABLE MIRROR (DM) SYSTEMS WITH ONE HUNDRED ACTUATORS ACROSS THE ACTIVE APERTURE, CORRESPONDING TO ALMOST EIGHT THOUSAND ACTUATORS IN THE DEVICE S CIRCULAR APERTURE, USING AN INNOVATIVE NEW APPROACH FOR PACKAGING AND INTEGRATION. THE PROPOSED WORK FOCUSES ON A TECHNOLOGY GAP THAT NASA HAS IDENTIFIED AS CRITICAL FOR SPACE-BASED EXOPLANET IMAGING: PRODUCTION TECHNIQUES FOR SMALL-STROKE, HIGH-RELIABILITY, HIGH-PRECISION DEFORMABLE MIRROR SYSTEMS. THE MAIN OBJECTIVE IN THIS PHASE II PROJECT IS TO SUBSTANTIALLY INCREASE THE STATE-OF-THE-ART FOR THE NUMBER OF ACTUATORS IN A COMPACT MEMS DM SYSTEM USING MICROELECTROMECHANICAL SYSTEMS (MEMS) PRODUCTION PROCESSES AND EMPLOYING A MULTIPLE-LAYER APPROACH TO INTEGRATING ROUTING LINE LAYERS IN THE DEVICE. MEMS DMS WILL BE BONDED TO CUSTOM MANUFACTURED PRINTED CIRCUIT BOARDS USING CONDUCTIVE EPOXY BONDS AND FLIP-CHIP ALIGNMENT BASED ON A NEW STENCIL PRINTING PROCESS DEMONSTRATED IN THE PHASE I PROJECT. THE PROPOSED WORK INCLUDES TESTING AND EVALUATION OF SURFACE TOPOGRAPHY OF DMS BEFORE AND AFTER BONDING AND ASSESSMENT OF ACTUATOR YIELD AND RELIABILITY. Other Administrative Action $0 5/15/20 P00002 BOSTON MICROMACHINES CORPORATION PROPOSES HIGH-PRECISION DEFORMABLE MIRROR (DM) SYSTEMS WITH ONE HUNDRED ACTUATORS ACROSS THE ACTIVE APERTURE, CORRESPONDING TO ALMOST EIGHT THOUSAND ACTUATORS IN THE DEVICE S CIRCULAR APERTURE, USING AN INNOVATIVE NEW APPROACH FOR PACKAGING AND INTEGRATION. THE PROPOSED WORK FOCUSES ON A TECHNOLOGY GAP THAT NASA HAS IDENTIFIED AS CRITICAL FOR SPACE-BASED EXOPLANET IMAGING: PRODUCTION TECHNIQUES FOR SMALL-STROKE, HIGH-RELIABILITY, HIGH-PRECISION DEFORMABLE MIRROR SYSTEMS. THE MAIN OBJECTIVE IN THIS PHASE II PROJECT IS TO SUBSTANTIALLY INCREASE THE STATE-OF-THE-ART FOR THE NUMBER OF ACTUATORS IN A COMPACT MEMS DM SYSTEM USING MICROELECTROMECHANICAL SYSTEMS (MEMS) PRODUCTION PROCESSES AND EMPLOYING A MULTIPLE-LAYER APPROACH TO INTEGRATING ROUTING LINE LAYERS IN THE DEVICE. MEMS DMS WILL BE BONDED TO CUSTOM MANUFACTURED PRINTED CIRCUIT BOARDS USING CONDUCTIVE EPOXY BONDS AND FLIP-CHIP ALIGNMENT BASED ON A NEW STENCIL PRINTING PROCESS DEMONSTRATED IN THE PHASE I PROJECT. THE PROPOSED WORK INCLUDES TESTING AND EVALUATION OF SURFACE TOPOGRAPHY OF DMS BEFORE AND AFTER BONDING AND ASSESSMENT OF ACTUATOR YIELD AND RELIABILITY. Other Administrative Action $0 3/19/20