The National Institute of Standards and Technology (NIST) in Boulder, CO intend to award a purchase order to Inabata America Corporation for the purchase of 320 6" reticle blanks for use in fabrication of devices in our cleanroom. These reticles consist of a 6" square transparent substrate coated with a Cr based opaque material and photoresist with the following specifications:
Material: Soda lime glass Size: Min 151.6 mm Max 152.4 mm (nominal 6") Thickness: 3.05 +/- 0.1 mm (nominal 0.12") Squareness: < 8 parts/thousand The following must be met in a circle of quality of 100 mm diameter Flatness: 15 um or better Cr nominal thickness: 95 nm -115 nm Cr thickness variation: < 10 nm Optical density: > 3 @ 365 nm Pinholes: 0 > 5um Photoresist: AZ1350 or equivalent - 500 nm thick Surface particles: 0 > 10um Conforming to SEMI Spec SEMI P1-0708 "SPECIFICATION FOR HARD SURFACE PHOTOMASK SUBSTRATES"
NIST has used reticles in the past not conforming to SEMI spec P1-0708 resulting in extensive damage to lab equipment. Ulcoat reticles are the only known product meeting all of the listed specifications to include SEMI spec P1-0708 and Inabata America Corporation is the only known supplier of this product.
IAW with FAR 5.201, This notice serves as the only notice that will be issued supporting the justification for other than full and open competition on the basis of only one known responsible source that can meet the requirement (FAR 6.302-1) and a solicitation will not be issued.
Place of Performance
NIST Boulder Boulder, Colorado 80305 United States