Two Photon Polymerization Laser Lithography (2PPLL) 3D Printer System

The Naval Research Laboratory (NRL) has a requirement for providing a Two Photon Polymerization Laser Lithography (2PPLL) 3D Printer that is optimized for printing optical components such as metalenses and 3D-metamaterials. The procured system must consist of the following components and shall meet or exceed the following minimum specifications:

1. The 2PPLL system shall be capable of producing 3D printed structures using the 2-photon polymerization process.
2. The 2PPLL shall use a 780 nm femtosecond pulsed laser to achieve 2-photon polymerization.
3. The 2PPLL shall be capable of printing 3D surfaces with roughnesses below 10 nm.
4. The 2PPLL shall be capable of printing on wavers up to 6” in diameter without using a resin bath
5. The 2PPLL shall include optical focusing elements that are index matched to resins
6. The 2PPLL shall be able to print at least 200 microns below the substrate surface
7. The 2PPLL shall include automated processes to find print surface interfaces and the process shall be compatible with a wide range of materials including glass, Si, SiC, InP, and GaSb.
8. The 2PPLL shall be able to print structures that are aligned to alignment marks on silicon substrates with < 600 nm accuracy.
9. The 2PPLL shall include the ability for the end-user to control laser power.
10. The 2PPLL system shall be able to 3D-print structures with a lateral resolution less than 200 nm.
11. The 2PPLL system shall have a sample positioning stage with translation that allows for a print volume of at least 50 x 50 x 20 mm^3 and must be able to position the sample with accuracy less than 500 nm
12. The 2PPLL system shall have optical components and hardware capable of switching between micro-scale and mm-scale printing with the following specs:
    1. The 2PPLL system shall include a micro-scale printing mode that has a calibrated print field with a diameter of at least 250 microns, a print-field to print-field position accuracy of less than 500 nm, and a print speed (using a high speed galvo mirror) within the write field of at least 100 mm/s
    2. The 2PPLL system shall include a mm-scale printing mode that has a calibrated print field diameter of at least 700 microns and a print-field to print-field position accuracy of less than 750 nm, and a print speed (using a high speed galvo mirror) within the write field of at least 300 mm/s
    3. The 2PPLL system shall have the ability to switch between these two print modes without having to remove optical components from the system
13. The 2PPLL system shall include at least one in-situ camera that shall provide a live view of printing
14. The 2PPLL system shall include at least one camera that shall provide a live view of the whole sample stage, sample, and optical element positioning
15. The 2PPLL system shall include an integrated display that provides all 2PLL control and monitoring functionality.
16. The 2PPLL system shall include a separate PC that shall be used for generating print files. This computer shall also be capable of controlling and viewing the printing process.
17. The 2PPLL system shall include at least ten perpetual licenses of software required for generating user-defined 3D structures to be printed. The software shall include all slicers required for printing, with the capability of controlling print characteristics including laser power, laser scan speed. The software shall be capable of importing and including stl models that are generated in external CAD software and shall provide 3D print previews.
18. The 2PPLL shall include a high-stability base that contains vibration damping
19. The 2PPLL shall be compatible with IP-DIP and IP-L photoresins.
20. The 2PPLL shall be compatible with class 100 cleanrooms
21. The 2PPLL shall include a 1-year service contract that ensures unlimited technical support in the event of device failure, software updates, and at least one maintenance visit.
22. Installation and Training:
    1. The price of the 2PPLL must include delivery, installation, and training at the U.S. Naval Research Laboratory in Washington, DC
23. Documentation and Warranty:
    1. A full set of all written documentation customarily provided to the public with a commercial item shall be provided. This shall include user manual(s) or equivalent as well as copies of any software, and any manuals for the software included with the system, if customarily provided. This documentation should be received by NRL with the system hardware unless other arrangements are agreed to by the authorized Government representative. In addition to the above documentation, which is customarily provided.
    2. The vendor shall offer the Government at least the same warranty terms, including offers of extended warranties, offered to the general public in customary commercial practice. These warranty terms must be included in the system price. The period of the warranty shall begin upon acceptance.