Thin Film Stress Measurement Tool

Added: Sep 10, 2015 1:25 pm This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued.

This solicitation, NB686020-15-03576, is issued as a request for quotation (RFQ).

This solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-84.

The associated North American Industrial Classification System (NAICS) code for this procurement is 334513, with a small business size standard of 500 employees. This is a total small business set-aside. It is being issued using the simplified acquisition procedures under the authority of FAR 13.5 Certain Commercial Items.

This combined synopsis/solicitation is for the following commercial item(s):

CLIN 0001: One (1) Thin Film Stress Measurement Tool

Description of requirements for the items to be acquired:

National Institute of Standards and Technology's (NIST) Boulder Microfabrication Facility (BMF) requires equipment that enables accurate stress measurements and surface mapping of various thin films on various substrates up to 150 mm in diameter. This instrument is primarily for measuring stress in thin dielectric films and thin metal films. By measuring changes in the pre- and post-process surfaces of the wafer, the stress of the film can be determined. The instrument shall consist of components to enable a non-contact method for the measurement and calculation of film stress.

Currently, the BMF has one other system for measuring film stress. The existing instrument measures the bow of a substrate by means of reflected light from a single point in the center of the wafer. It is currently used to measure film stress for wafers with a diameter of 3 inches. Adding the functionality to accurately measure film stress and map surfaces of wafers up to 150 mm in diameter will greatly improve our abilities to develop and characterize new processes quickly.

The Contractor shall provide all components for one (1) Thin Film Stress Measurement Tool that meets the following minimum technical requirements. The Contractor shall deliver the stress measurement instrument, as described below.

TECHNICAL SPECIFICATIONS:

• The instrument must be capable of measuring thin film stress on SEMI Standard 3", 100 mm, and 150 mm wafers.
• The instrument shall have a programmable stage with automatic rotation capabilities.
• The instrument must be capable of measuring thin film stress due to deposition or etching processes for thin films ranging in thickness between 200 nm - 2 µm on Si substrates.
• The instrument must be capable of accurately measuring thin film stress of transparent/dielectric films.
• The instrument must be capable of measuring the thin film stress to within 1 MPa.
• The instrument must include one or more reference samples for calibration purposes.
• The instrument must include a computer with analysis and control software. It is strongly preferred that the software run on Microsoft Windows 7, a recent version of Linux, or Mac OSX.
• The instrument must include software to calculate stress and display 2D/3D wafer stress uniformity and topography.
• The instrument should include the ability to analyze data with appropriate software on a computer other than the instrument's computer.
• The vendor must include 5 references from within the last 5 years for the same instrument.

DELIVERABLE SCHEDULE:
3 months after receipt of order (ARO).

BASIS OF AWARD:

Award shall be made to the lowest priced, technically acceptable quoter. This will be a firm fixed price purchase order to the responsible contractor submitting a quote that meets all of the requirements of this RFQ and who has the lowest price.

TECHNICAL CAPABILITY:
Evaluation of Technical Capability will be based on the information provided in the quotation. Documentation submitted in the quotation shall be evaluated to determine that the proposed equipment meets or exceeds the Governments minimum required specifications.
PRICE:
Price shall be evaluated for reasonableness.

The provision at FAR 52.212-1, Instructions to Offerors-Commercial, applies to this acquisition. Offerors shall meet the technical specifications and deliverable schedule.

FAR 52.212-2, Evaluation -- Commercial Items, applies to this acquisition. (Quotes shall be evaluated in accordance with the criteria shown above).

The quoter must have completed the provision at FAR 52.212-3, Offeror Representations and Certifications -- Commercial Items. Reps and certs must be uploaded to the System for Award Management at www.sam.gov.

FAR 52.212-4, Contract Terms and Conditions -- Commercial Items, applies to this acquisition.

FAR 52.212-5, Contract Terms and Conditions Required To Implement Statutes Or Executive Orders -- Commercial Items applies to this acquisition. Additional FAR 52.212-5 clauses cited in the clause applicable to this acquisition are:

52.204-10, Reporting Executive compensation and First-Tier Subcontract Awards
52.209-6, Protecting the Government' Interest When Subcontracting with Contractors Debarred, Suspended, or Proposed for Debarment
52.219-6, Notice of Total Small Business Aside
52.219-8, Utilizing of Small Business Concerns
52.219-13, Notice of Set-Aside of Orders
52.219-28, Post Award Small Business Program Re-representation
52.222-3, Convict Labor
52.222-19, Child Labor - Cooperation With Authorities And Remedies
52.222-21, Prohibition of Segregated Facilities
52.222-26, Equal Opportunity
52.222-36, Affirmative Action for Workers with Disabilities
52.222-50, Combating Trafficking in Persons
52.223-18, Contractor Policy to Ban Text Messaging While Driving
52.225-1, Buy American-Supplies
52.225-13, Restrictions on Certain Foreign Purchases
52.232-33, Payment by Electronic Funds Transfer

FAR 52.252-1, Solicitation Provisions Incorporated by Reference (Feb 1998)
This solicitation incorporates one or more solicitation provisions by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. The offeror is cautioned that the listed provisions may include blocks that must be completed by the offeror and submitted with its quotation or offer. In lieu of submitting the full text of those provisions, the offeror may identify the provision by paragraph identifier and provide the appropriate information with its quotation or offer. Also, the full text of a solicitation provision may be accessed electronically at this/these address(es): at http://acquisition.gov/comp/far/index.html and http://www.osec.doc.gov/oam/acquistion_management/policy/default.htm

FAR 52.225-18 - Place of Manufacture
FAR 52.232-13, Notice of Progress Payments
FAR 52.232-16, Progress Payments

CAR 1352.213-70, Evaluation Utilizing Simplified Acquisition Procedures
CAR 1352.215-70, Proposal Preparation
CAR 1352.233-70, Agency Protests
CAR 1352.233-71, GAO and Court of Federal Claims Protests

FAR 52.252-2, Clauses Incorporated by Reference (Feb 1998)
This contract incorporates one or more clauses by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. Also, the full text of a clause may be accessed electronically at this/these address(es): http://acquisition.gov/comp/far/index.html and http://www.osec.doc.gov/oam/acquistion_management/policy/default.htm

FAR 52.232-40, Providing Accelerated Payments to Small Business Subcontractors.
FAR 52.247-34, FOB Destination

CAR 1352.201-70, Contracting Officer's Authority
CAR 1352.209-73, Compliance with the Laws
CAR 1352.209-74, Organizational Conflict of Interest

CAR 1352.246-70, Place of Acceptance
(a) The Contracting Officer or the duly authorized representative will accept supplies and services to be provided under this contract.
(b) The place of acceptance will be:
NIST
325 Broadway
Shipping and Receiving
Boulder, CO 80305

NIST LOCAL-04 BILLING INSTRUCTIONS
(a) NIST prefers electronic Invoice/Voucher submissions and they should be emailed to INVOICE@NIST.GOV.
(b) Each Invoice or Voucher submitted shall include the following: (1) Contract Number. (2) Contractor Name and Address. (3) Date of Invoice. (4) Invoice Number. (5) Amount of Invoice and Cumulative Amount Invoiced to-date. (6) Contract Line Item Number (CLIN). (7) Description, Quantity, Unit of Measure, Unit Price, and Extended Price of Supplies/Services Delivered. (8) Prompt Payment Discount Terms, if Offered. (9) Any other information or documentation required by the contract.
(c) In the event electronic submissions are not used, The Contractor shall submit an original invoice or voucher in accordance with the payment provisions of this contract to:
NIST: Accounts Payable Office
100 Bureau Drive, Mail Stop 1621
Gaithersburg, MD 20899-1621

The Contractor shall submit a Quote, to be received no later than 4 p.m. Mountain Time, Tuesday, September 15, 2015, and must include the following: Company name, address, phone numbers, DUNS number, itemized quote including all minimum specifications. Quotes shall be delivered via email to angela.hitt@nist.gov.

Please direct any questions regarding this solicitation to Angela Hitt at angela.hitt@nist.gov no later than 11:00 a.m. Mountain Time, Friday, September 11, 2015.