Plasma-Assisted Atomic Layer Deposition Reactor
Awarded Limited / Sole Source Justification Posted
- Solicitation number
- N00173-19-R-LN12
- Agency
- Office of Naval Research Secretary of the Navy, Department of Defense
- Set-aside
- No set-aside
Opportunity facts
- Contract number
- N00173-20-P-2001 Federal contract award
- NAICS code
- 333242 Semiconductor Machinery Manufacturing
- PSC
- 5962 Microcircuits, Electronic
- Place of performance
- Washington DC, District of Columbia 20375, United States
Notice details come from SAM.gov. Updated .
Notice text
The Naval Research Laboratory (NRL) issued a sole source Purchase Order (N00173-20-P-2001) to Veeco Process Equipment Inc., to provide a Plasma-Assisted ALD Reactor as described in the Specifications.
Awarded contract N00173-20-P-2001 to unknown vendor for unknown amount on 2019-11-13.
Attachments
| File | Type | Posted |
|---|---|---|
| J&A_Redacted.pdf |
Notice history
| Notice | Type | Posted |
|---|---|---|
| Plasma-Assisted Atomic Layer Deposition Reactor | Limited / Sole Source Justification | |
| Plasma-Assisted Atomic Layer Deposition Reactor | Pre-Solicitation |
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