NOTICE OF INTENT TO SOLE SOURCE for Automated Development and Chrome Etch System

The United States Department of Commerce (DOC), National Institute of Standards and Technology (NIST), Acquisition Management Division (AMD) intends to negotiate, on a sole source basis, with SUSS MicroTec, Inc. of 2520 Palisades Drive, Corona, CA 92882 for an automated development and chrome etch system. The statutory authority for this acquisition is 41 USC 3304(a)(1), as implemented under the authority of 41 U.S.C. 1901.

*****Sole source determination is based on the need to acquire an automated development and chrome etch system that can meet all unique minimum technical specifications.

Based on the Government’s market research only SUSS MicroTec, Inc. can provide an automated development and chrome etch system that meets all the required minimum technical specifications to include:

1. Photomask and wafer holder chucks that are easily exchanged by the end user, without the use of screwdrivers or any other tools. The substrate holder chucks shall be removed by pulling‑up vertically, and for substrate holder chuck installation, the substrate holder chucks shall be mated with the spinner shaft and pushed‑down vertically.
2. Chemical source hardware shall be designed for easy and rapid replacement of source chemicals. Therefore, the system shall accommodate standard 1 gallon chemical (TMAH‑based developer and ceric ammonium nitrate‑based chrome etch) bottles for source chemistry.
3. Footprint dimensions with overall depth not to exceed 45 inches, overall width not to exceed 40 inches, and overall height not to exceed 60 inches.

The NIST intends to procure this system for the CNST NanoFab cleanroom facility. It will be used as a shared resource that is accessible to researchers from industry, academia, NIST, and other government agencies. This new system will be used to simplify and standardize resist development and chrome etch processes, help to minimize chemical usage, improve process repeatability, and improve safety for the facility users. The lithographic repeatability will ensure device performance, quality and reliability, and thereby allow NIST researchers to reliably deliver state-of-the-art, standard reference structures, NIST on a chip platforms, and quantum measurement standards that underpin the semiconductor industry.

SUSS MicroTec, Inc. is the sole manufacturer and distributor of the commercial equipment that meets the required combined minimum specifications.

*****The North American Industry Classification System (NAICS) code for this acquisition is 334413 - Semiconductor and Related Device Manufacturing, with a small business size standard of 1,250 employees.

*****A determination by the Government not to compete the proposed acquisition based upon responses to this notice is solely within the discretion of the Government.  Information received will be considered solely for the purpose of determining whether to conduct a competitive procurement.

*****No solicitation package will be issued.  This notice of intent is not a request for quotations; however, all responsible sources interested may identify their interest and capability to respond to this requirement. Interested parties that believe they can satisfy the requirements listed above must identify their capability in writing before the response date of this notice. Only responses received by 11:00 a.m. Eastern Standard Time (EST) on March 3, 2023 will be considered by the government.  Responses shall be submitted via email to nina.lin@nist.gov and/or forest.crumpler@nist.gov.