Statement_of_Work.pdf

STATEMENT OF WORK

1. Objective/Requirements NASA-GSFC owns and operates two Suss Microtec tools mask aligners, MA6BA6-000796 and MA8-000480. These are high precision tools used in measurement and fabrication of silicon wafers that are processed in the Code 553 Detector Development Lab. These systems require maintenance by qualified field service engineers on a regular basis.

NASA Shared Services Center has a requirement for providing annual preventative maintenance on this equipment.

2. Characteristics, Scope, and Specs

The vendor shall provide an engineer, to perform work and service, who has successfully been certified and trained by the original equipment manufacturer to work and perform service on these tools. NASA reserves the right to request documented proof that the provided service engineer is certified to work on the listed equipment.

The scope of this contract shall include the following

• Two YEAR PM SERVICE CONTRACT FOR: MA6BA6-000796, MA8-000480 TOOLS o To include 2 service calls per tool o Preventative Maintenance Contract to clean, lubricate and adjust all machine assemblies on a regular basis.

o This contract includes labor and travel for the specified number of calls. Parts are not included.

o Service is only to be performed by a Suss trained and certified engineer on the listed tools.

o NASA reserves the right to request documented proof that service engineer is certified to work on listed equipment.

• TWO YEAR SERVICE CONTRACT OF 72 HR RESPONSE FOR: MA6BA6-000796, MA8-000480 TOOLS.

o 72-Hour Response Service Call Contract:

o This Service Call Contract is designed to provide the customer a priority response for onsite service once joint determination is made that onsite service assistance is required.

o Service is only to be performed by a Suss trained and certified engineer on the listed tools.

o NASA reserves the right to request documented proof that service engineer is certified to work on listed equipment

• Contract shall include spare parts, travel and labor. Included spare parts are below.

• FOCUS MOTOR COMPL.

• LAMP HALOGEN

• LAMP 6V/15W

• GASKET 2 / 4,8/W-1

• RING 51.9 / 24.1 X 6

• VERBINDUNGSROHR 30 X 27

• LINSENADAPTER

• LAMP ADAPTER

• PRESSURE-AIR HOSE 5X0.85

• PNEUMATIC CYLINDER/PD-8/ST-12.5/SA

• LAMP TASTER MA/BA6 MOT. TISCH

• LAMP USH-1000KS

3. Place of Performance Detector Development Lab, Building 30, Goddard Space Flight Center

4. Period of Performance Contract to begin on 10/1/21 Delivery of spare parts shall occur within 3 months of award.

One service visit shall occur within one year from start of period of performance.

A second service visit shall occur within year 2 of the award.