STATEMENT OF WORK.pdf

STATEMENT OF WORK FORMAT

PCN: _____________________

Background NASA Goddard Space Flight Center’s (GSFC) Detector Development Laboratory

(DDL) produces transition edge sensors on semiconductor wafers up to 6-inch diameter for technology demonstrations and flight hardware of detector focal planes and other components. The transition edge sensors typically consist of molybdenum and gold bilayer thin films, and an essential consumable required to build these sensors is a Gold Sputtering Target.

The Gold Sputtering Target must possess a geometry, which will make it compatible with a newly acquired piece of equipment in the DDL, the KDF sputtering deposition tool.

The KDF sputtering deposition tool is one of the key enabling technologies for device processing and allows high vacuum processing of wafers in all sizes up to 6” with a short pumping time. This will help to alleviate one of the processing “bottle-necks” in the DDL.

Objectives

The objective of this project is to procure a Gold Sputtering Target, which will consist of a KDF backing plate and a rectangular gold sputtering target.

Scope

The scope of this work includes production and delivery of a Gold Sputtering Target, which can be integrated with a KDF backing plate for 5” x 17” sputtering targets.

This includes the following:

a) Design of a gold sputtering target at the vendor location.

b) Approval of the gold sputtering target design by the GSFC technical representative.

c) Fabrication of a gold sputtering target at the vendor location.

d) Integration of the gold sputtering target, via indium bonding, with the KDF backing plate, supplied by NASA GSFC.

e) Crating and shipping the unit to GSFC.

Tasks or Requirements

The Supplier will provide a new 5” x 17” gold planar sputtering target integrated with a KDF-supplied backing plate for a planar 5” x 17” sputtering target. The Supplier will ensure that the Gold Sputtering Target is equipped with the following fixtures and meet the following requirements prior to Acceptance of System:

Gold Sputtering Target

A brand new unit is required; no used fixtures or items, listed below, are acceptable.

Exterior surface parts must be clean and free of grease or dust and compatible with operation in a Class 100 cleanroom environment. The KDF-supplied backing plate must be clean, and free of rust.

o The purity of the gold in the gold sputtering target must be equal to or exceed

99.999%.

o The maximum concentration of iron, nickel, and cobalt in the target must not exceed one (1) part per million.

o A compositional analysis of the target must be provided.

o The thickness of the gold sputtering target must be 0.100” +/- 0.005” thick.

o An ultra-high vacuum compatible, ultra-high purity (> 99.9% pure), copper backing plate must be indium bonded to the gold sputtering target.

o The total thickness of the sputtering target, the indium used for bonding the target to the copper backing plate, and the copper backing plate must be 0.250” +/- 0.005” thick as specified by a KDF-supplied drawing (“Planar 17x5 inspection dwg” – contact Joe Dickson, KDF, at 201-784-5005 x 640).

See:

o The length of the gold sputtering target must be 16.77” +/- 0.01,” as specified by a KDF-supplied drawing (“Planar 17x5 inspection dwg”).

o The width of the gold sputtering target must be 4.77” +/- 0.01,” as specified by a KDF-supplied drawing (“Planar 17x5 inspection dwg”).

o The gold sputtering target must be centered upon the KDF-supplied backing plate for a 5”x17” planar sputtering target.

Supplier will provide Crating and Shipping.

The Government Technical Representative reserves the right to ensure the sputtering target mounted to the KDF-supplied backing plate for a 5”x17” planar sputtering target can be properly ignited inside the KDF sputtering tool within one (1) month of receipt. Should the target fail to ignite, the Government reserves the right to return the target to the Supplier in exchange with a target, which can be ignited inside the KDF sputtering tool.

Selection Criteria

Supplier will have a verified track record of technical competence in providing Gold Sputtering Targets.

Supplier will provide references of users of similar Gold Sputtering Targets, which are compatible with KDF sputtering deposition systems.

Supplier will provide the Best Value to the government while meeting all of the technical specifications listed in this statement of work.

Deliverables or Delivery Schedule

1. Deliver complete specified (as described above) sputtering target assembly.

2. Government technical representative will demonstrate ignition of the sputtering target in the KDF sputtering deposition system. Acceptance of the sputtering target will be conditional upon successful demonstration of target ignition.

3. Equipment warranty on parts and labor for at least one year.

Delivery Schedule Within 14 weeks after receipt of order.

Government-Furnished Equipment and Government-Furnished Information

No Government-furnished equipment (GPE) and Government-furnished information (GFI) will be required.

Place of Performance

The Construction of the Gold Sputtering Target assembly, which includes the Gold Sputtering Target indium bonded to the KDF backing plate for 5” x 17” planar sputtering targets, shall be performed at the Supplier’s facilities.

The Installation and Acceptance shall be performed at NASA/GSFC, Greenbelt, Maryland.

Signature & Title Date Ari Brown June 28, 2023.

Electronics Engineer Detector Systems Branch – Code 553