Statement of Work.docx

STATEMENT OF WORK

Pulsed Laser Source

I. BACKGROUND INFORMATION

The Material Measurement Laboratory at the National Institute of Standards and Technology (NIST) is involved in the characterization of metals, semiconductors, and insulators in support of the CHIPS Act. Materials characterization allows industrial scientists to make direct correlations between material processing, (nano)structure, and resulting properties. At NIST, the CHIPS atom probe tomography project will study a wide range of materials with an emphasis on nanostructures containing wide bandgap materials relevant to the semiconductor manufacturing industry. In laser-pulsed atom probe tomography a laser pulse is used to trigger field ion evaporation from a nanoscale specimen tip. Over the past decade or so, commercial atom probe instrumentation has evolved towards using shorter wavelengths, which has significantly improved the quality/utility of atom probe data. As part of the CHIPS atom probe tomography project, we will explore using wavelengths of light shorter than what is available on commercial atom probe tomographs. The data from such experiments will allow NIST to determine the optimum wavelength for atom probe tomography characterization of semiconductor industry relevant specimens. These data will inform the next generation of commercial atom probe instruments and improve the analysis capabilities of atom probe tomography in support of the goals of the CHIPS Act.

II. SCOPE

The Contractor shall deliver and install one (1) ultrafast Yb-based laser system with wavelength conversion modules with features as defined in the “Minimum Requirements” section inclusive of FOB Destination shipping. Any necessary control and support computers will also be included, as well as all necessary hardware/software for the operation of the instrument. In-person training will be provided for up to four (4) NIST personnel and the system will be covered under warranty for at least one (1) year to include all parts, software, labor, and travel.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001: Yb-based ultrafast laser with deep ultraviolet wavelength conversion module Description: A high power, high pulse energy, femtosecond Yb-based laser with a wavelength conversion module capable of generating DUV (200 nm < λ < 210 nm) pulses from the output of the Yb-based laser.

Quantity: one (1) A. Technical Specifications for the Yb-based ultrafast laser

a. Center wavelength of 1020 nm < λ < 1050 nm

b. Pulse width <400 fs for all operation conditions Preference may be given to pulse widths <200 fs

c. User selectable repetition rate between 25 kHz and 200 kHz

d. Pulse energy >120 μJ at 100 kHz

i. Preference may be given to systems with higher pulse energies available (when operating at repetition rates in the range of 25 kHz to 200 kHz)

e. Beam pointing stability <20 μrad over >8 hours when operated in a room with humidity and temperature stability of +/- 0.5 C and +/- 10 % RH respectively

f. Power stability <1 % RMS over 100 hours

g. Pulse-to-pulse stability <2 % RMS

i. Preference may be given to systems with <1 % RMS pulse-to-pulse stability

h. M2 beam quality measurement <1.3

i. A physical footprint on an optical table that is less than a 1 m by 1 m square

j. Daily warmup time of <1 hour

k. Pre and/or post pulse contrast ratio better than 100:1

i. Preference may be given to a pre and/or post contrast ratio better than 250:1

l. Includes any necessary control rack, chillers, pumps, air purifiers, control computers, software, etc needed for routine operation

m. Either two (2) physical (paper) copies or one (1) electronic copy of a user manual describing the operation and working principles of the ultrafast laser

B. Technical Specifications for the deep ultraviolet wavelength conversion module

a. Center wavelength of 200 nm < λ < 210 nm achievable

i. Preference may be given to modules that output multiple wavelengths (inclusive of 200 nm < λ < 210 nm) either simultaneously or via user selection

b. Pulse width <10 ps

c. Operates at a 100 kHz repetition rate

d. Pulse energy >100 nJ at 100 kHz

i. Preference may be given to systems with pulse energies >1 μJ

e. A physical footprint on an optical table that is less than a 1 m by 1 m square

i. Preference may be given to smaller footprints with a shorter overall optical path length between the output port of the Yb-based laser and the output port of the DUV wavelength conversion module

f. The spectral purity must be at least 100:1 (as measured by power in 200 nm < λ < 210 nm spectral band versus the power outside of that spectral band)

g. Any optics in the wavelength conversion module that are degraded by UV light must be replaceable in the field (i.e., at NIST Boulder)

h. Either two (2) physical (paper) copies or one (1) electronic copy of a user manual describing the operation and working principles of the ultrafast laser

OPTION 1: Line Item 0002: Visible and near ultraviolet wavelength conversion module Description: A wavelength conversion module capable of generating ca. 520 nm and ca. 340 nm pulses using the output of the Yb-based laser. To operate this module, the output of the Yb-based laser would be diverted from the DUV wavelength conversion module to this wavelength conversion module.

Quantity: one (1) Option Execution: NIST can execute this option within one (1) year of acceptance of line item 0001.

A. Technical Specifications

a. Center wavelength of 500 nm < λ < 540 nm achievable

OR

Center wavelength of 340 nm < λ < 360 nm achievable

i. Preference may be given to modules that output multiple wavelengths (inclusive of 500 nm < λ < 540 nm and 340 nm < λ < 360 nm) either simultaneously or via user selection

b. Pulse width <10 ps

c. Operates at a 100 kHz repetition rate

d. Pulse energy for each wavelength >100 nJ at 100 kHz

i. Preference may be given to systems with pulse energies >1 μJ

e. A physical footprint on an optical table that is less than a 0.5 m2

i. Preference may be given to smaller footprints with a shorter overall optical path length between the output port of the Yb-based laser and the output port(s) of the wavelength conversion module

f. The spectral purity must be at least 100:1 (as measured by the power in the desired spectral band versus the power outside of the desired spectral band)

g. Power stability of <10 % RMS over 8 hours and <20 % RMS over 100 hours

h. Either two (2) physical (paper) copies or one (1) electronic copy of a user manual describing the operation and working principles of the ultrafast laser.

OPTION 2: Line Item 0003: Deep ultraviolet optics Description: A full set of replacement optics necessary to refurbish the deep ultraviolet wavelength conversion module included in Line Item 0001 to the minimum technical specifications listed for Line Item 0001.

Quantity: one (1) Option Execution: NIST can execute this option within one (1) year of acceptance of line item 0001.

A. Technical Specifications

a. All optics (including windows, nonlinear crystals, lenses, mirrors, etc) necessary to return the wavelength conversion module included in Line Item 0001 to the minimum technical specifications listed for Line Item 0001. Any proprietary tools or accessories needed to refurbish the wavelength conversion module must be included.

OPTION 3: Line Item 0004: Deep ultraviolet optics Description: A full set of replacement optics necessary to refurbish the deep ultraviolet wavelength conversion module included in Line Item 0001 to the minimum technical specifications listed for Line Item 0001.

Quantity: one (1) Option Execution: NIST can execute this option within one (1) year of acceptance of line item 0001.

B. Technical Specifications

a. All optics (including windows, nonlinear crystals, lenses, mirrors, etc) necessary to return the wavelength conversion module included in Line Item 0001 to the minimum technical specifications listed for Line Item 0001. Any proprietary tools or accessories needed to refurbish the wavelength conversion module must be included.

OPTION 4: Line Item 0005: Extended Warranty and Service Contract Description: One (1) additional year of extended warranty and service.

Quantity: one (1) Option Execution: NIST can execute this option within two (2) years after CLIN 0001 acceptance.

A. Technical Specifications

a. Quantity one (1) Year – Extended Warranty and Service Contract (1st year after warranty included in base instrument Line Item 0001). This service associated with this contract shall meet or exceed the initial one (1) year Warranty and Service included with the base instrument. To be clear, executing this option would result in NIST having a total of at least two (2) years of warranty and service.

IV. Site Preparation The Contractor shall describe any HVAC, electrical, water, or space requirements necessary for installation of the system. For example, state the number/type/voltage/amperage of any electrical outlets, the need (and specifications) for any process chilled water, the allowable HVAC operating conditions for the system, etc.

V. DELIVERABLES

VI. PLACE OF PERFORMANCE

a. All work shall be performed at NIST, 325 Broadway, Boulder, Colorado.

b. The government will provide access to Building 81 to the contractor for the entire period of performance of this contract.

c. The day-to-day supervision and direct control over the work performed by the on-site contractor personnel shall be the sole responsibility of the contractor.

VII. PERIOD OF PERFORMANCE/LEAD TIME

The period of performance for Line Item 0001 and, if executed, Line Item 0002 will take approximately 38 weeks ARO.

VIII. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 325 Broadway Building 81 Boulder, CO 80305

IX. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than six weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of operation, and removal of trash. Onsite installation and demonstration shall be done at NIST, (Boulder, CO- Building 81.) Any building facilities hookups (electrical, water, etc.) necessary for installation will be communicated to NIST at the time of contract award and will be prepared by NIST personnel before installation.

X. TRAINING

The contractor shall conduct training session for up to four (4) users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 9:00 am – 5:00 pm Mountain Time immediately after acceptance testing and must be completed no later than two (2) weeks after site acceptance.

XI. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Possible Performance Tests:

1. For the Yb-based laser in Line Item 0001 Note: Measurements will be made at 100 kHz after 1 hour warmup period unless otherwise specified

a. Verify center wavelength 1020 nm < λ < 1050 nm

b. Verify pulse duration meets manufacturer’s specification

c. Verify repetition rate selectable between 25 kHz and 200 kHz

d. Verify pulse energy meets manufacturer’s specification at manufacturer’s specified repetition rates

e. Verify beam pointing stability <20 μrad over 4 hours when operated in a room with humidity and temperature stability of +/- 0.5 C and +/- 10 % RH respectively

f. Verify output power stability of <1 % RMS over 4 hours

g. Verify pulse energy stability <2 % RMS over 1 minute

h. Verify M2 beam quality measurement <1.3

i. Verify pre and post pulse contrast ration meets manufacturer’s specification

2. For the wavelength conversion module in Line Item 0001 (200 nm < λ < 210 nm) Note: Measurements will be made at 100 kHz immediately after manufacturer specified warmup period

a. Verify center wavelength 200 nm < λ < 210 nm

b. Verify 100 kHz operation

c. Verify pulse energy meets manufacturer’s specification

d. Verify spectral purity better than 100:1 (as measured by power in 200 nm < λ < 210 nm spectral band versus the power outside of that spectral band)

3. For the wavelength conversion module (Line Item 0002) Note: Measurements will be made at 100 kHz immediately after manufacturer specified warmup period

a. Verify center wavelengths meet manufacturer specifications

b. Verify spectral purity better than 100:1 (as measured by the power in the desired spectral band versus the power outside of the desired spectral band)

c. Verify power stability <10 % RMS over 4 hours

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST COR to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within five (5) working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

XII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of one (1) year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. The warranty shall include software updates necessary for proper tool operation to the original manufacturer specifications. The warranty shall cover the entire system (excluding the consumable items: chiller water, optics degraded by the deep ultraviolet light) and include on-site, videoconference, telephone, and e-mail support. All costs including parts, labor, travel, and other expenses necessary to repair the system to original manufacturer specifications (including all Contractor supplied hardware) shall be borne solely by the contractor at no additional cost to the U.S. Government. Warranty start date is the date of site acceptance.

XIII. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XIV. TRAVEL

a. The contractor shall be responsible for all travel expenses.

XV. CONTRACTOR SUPPLIED MATERIALS AND PERSONNEL

a. The contractor shall supply all parts, hardware, equipment, and labor required to perform the tasks listed.

i. Provide personnel that have been trained in the service and installation of Yb-based lasers and wavelength conversion modules.

ii. Provide personnel that pass required government background checks to be issued badges for work on site.

XVI. MISCELLANEOUS INFORMATION

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Regular Business Hours. Regular business hours are Monday through Friday, 9:00 am to 5:00 pm Mountain Time, excluding Federal holidays and NIST closures.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office. The contractor shall provide personnel that pass required government background checks to be issued badges for work on site at least 3 weeks prior to site visit.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

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