Specifications (Items).pdf

Requirements / Specification Document

TITLE: Spectroscopy IMS - 2 (Probe Station)

Requesting Laboratory / Division / Group:

Communications Technology Laboratory Radio Frequency Technology Division Radio Frequency Electronics Group (672.01)

General Statement of Need:

The RF Electronics Group requires a microwave probe station with 4 programmable manipulators to be used for measurements related to Electric-acoustic spectroscopy of fluidic samples. The probe station will be used to make automated, simultaneous microwave and acoustic measurements of fluids contained within microfluidic structures.

These integrated microwave microfluidic structures are chip-based but extend in the out-of-plane direction by 10-15mm, requiring a large combined range of motion in this direction by the programmable stage and probe manipulators. The measurements require at least 2 programmable manipulators for microwave probes at frequencies up to 110 GHz and two programmable manipulators for microwave probes at frequencies up to 67GHz.

Items and Ancillary Services:

Item 1: Semiautomatic Probe station with 4 programmable manipulators Quantity: 1 EACH Specifications: 1.1 A chuck to accommodate 200mm diameter wafers with programmable motion control in xyz directions with greater than 200mm travel with control resolution to less than 0.5 micrometer in xy directions and 30 mm travel with 0.2 micrometer resolution in z-direction; chuck must have programmable theta (angular) control to at least +/- 6 degrees

1.2 Capability of temperature control in the range from

20C to 200C with 0.1 degree C temperature accuracy, and include as options temperature-controlled measurement capabilities below zero C

1.3 Minimum of 2 programmable microwave

manipulators that can accommodate 110GHz microwave probes and sampler heads, simultaneous with 2 additional programmable microwave manipulators that can accommodate standard 67 GHz probes, and must be able to achieve spatial resolution of less than 2 microns in xy directions and 1 micron in the z direction, with range of travel of at least 10mm in the xyz directions

1.4 Probe positioners must include theta adjustment to

enable planarization of probe tips (manual adjustment is satisfactory)

1.5 Programmable positioning for microscope with range

of travel of at least 50mm x 50mm in the xy directions and 140mm in the z-direction

1.6 Digital zoom microscope capable of video capture and

up to 40x zoom factor, with at least 45mm working distance at highest magnification

1.7 Anti-vibration table for probe station; 1.8. instrument

shelf for mounting vector network analyzer or other test instruments close to probes to minimize needed cable lengths for electrical and microwave measurements

Item 2: Option for measurements at chuck temperatures down to -10C

Specifications: 2.1 Option for measurements with chuck temperatures down to -10C without formation of condensation or frost on wafer or chuck surfaces

Item 3: Option for measurements at chuck temperatures down to -40C

Specifications: 3.1 Option for measurements with chuck temperatures down to -40C without formation of condensation or

Item 4: Option for measurements at chuck temperatures down to -40C

Specifications: 3.1 Option for measurements with chuck temperatures down to -60C without formation of condensation or

Service Requirements / Item Specifications:

Section Requirements/Specifications Planning Considerations ☒ N/A

☐ List any visits required to allow potential vendors to see site specific constraints.

[Explain Requirements.] ☐ US citizen required on-site (foreign nationals require pre-registration 30 days prior to visit.)

☐ Vendor Representative On-Site more than three (3) days.

☐ Other Considerations:

[List other considerations to ensure an accurate quote.] Shipping & Delivery ☐ N/A

Shipping Address:

☒ NIST-Boulder

ATTN: Angela Stelson 325 Broadway Boulder, CO 80305

☐ [Alternate Shipping Address] Shipping Criteria:

☒ Partial Delivery Acceptable

☐ [Enter Shipping and Delivery information by item.] ☐ Direct Delivery to Building Required [Explain Need for Requirement]

☐ Building has Loading Dock Containerization Preference: [Enter Container Type] Other Requirements:

[List Any Other Requirement] Delivery Date Criteria:

☐ Delivery of Goods, Installation, and Training shall be competed no later than: 3 MONTHS AFTER RELEASE OF ORDER (ARO) ☐ Delivery No Earlier Than: Click or tap to enter a date.

☐ Other: [List other shipping, delivery or special requirements.] [List Other Shipping, Delivery or Special Requirements.] Electronic Media ☐ N/A

[Enter Electronic Media Requirements by Item.]

☒ Software ☒ Electronic Manuals ☐ License Key ☐ Other:

[List Any Other Electronic Media Requirements] ☐ Email address for Software Delivery:

[Enter Address] Installation ☐ N/A

[Enter Installation Requirements by Item]

☒ Vendor Technician on Site ☐ Rigging ☒ Uncrating / Unpackaging ☒ Removal of Packaging Material ☒ Equipment Set Up ☐ Start-Up Services ☐ Turnkey Installation ☐ Other:

[Enter Details]

NOTE:

When installation is required, TPOC shall be the coordination point.

Facility / Utility Considerations ☐ N/A

[List Site Specific Utility Considerations by Item] ☐ OFPM Work Order Numbers

[List Work Order Numbers]

☐ Power Available Voltage: [Enter voltage] (V) Maximum Current: [Enter max current draw] (A) Phase: [Choose Phase] Frequency: [Typically 60Hz] (Hz) NEMA Plug Type: [Enter Plug Type] (i.e.: NEMA L5-20P) Environment: [Choose Environment] Other Power Considerations:

[List Any Other Power Considerations.] ☒ Utility Connections:

Compressed domestic air, 6.0 Bar (87PSI), 6mm press to fit quick connect or Swagelok connection ☐ Other Considerations:

[List Other Considerations to Ensure an Accurate Quote.] Warranty ☐ N/A

Base Manufacturer Warranty is acceptable

[If you require an Extended Manufacturer Warranty, describe the warranty requirements per item.]

What is included?

☐ Labor ☐ Parts ☐ Travel ☐ Cost and Liability for Returns ☐ Other [Enter Other Requirements] ☐ Warranty Length: [i.e. 3 - Years]

Training ☐ N/A

☒ On-Site

Is Travel Required: [Choose Answer]

☐ Off-Site Location: [Enter Location(s)] ☒ Number of Trainees: 4 Scope of Training ☒ Operations ☒ Maintenance ☒ Troubleshooting ☒ Safety ☐ Other [Enter Other Scope Requirements]

☐ Training materials to be provided:

[Describe Requirements] ☐ Other [Enter Other Training Requirements] NOTE: When training is required, TPOC shall be coordinator.

Inspection and Acceptance ☐ N/A

[Inspection Requirements Per Item (Who, When, What, Where)] ☐ On-Site

[Inspection Requirements Per Item] ☒ Government Acceptance Expected to Not to Exceed 7 Business Days ☐ Government Acceptance Expected to Exceed 7 Business Days

☐ Inspection and Acceptance Plan:

[Explanation] ☐ Other:

[Enter Other Requirements] Maintenance ☒ N/A

[Describe Maintenance Requirements Per Item] Service Plan Length: [i.e. 3 - Years]

What is Included?

☐ Labor ☐ Spare Parts ☐ Consumables ☐ Travel

☐ Cost and Liability for Returns ☐ Software Updates ☐ Manuals l

☐ Other [Enter Other Requirements] ☐ Requirements:

[Enter Requirements] (i.e.: On-Site Within 72 hours, etc.)

☐ 1 Option Period ☐ 2 Option Periods ☐ 3 Option Periods ☐ 4 Option Periods (Maximum) Government Furnished Material / Equipment ☒ N/A

[List Any Government Furnished Material / Equipment Per Item]

☐ Samples for Testing

☐ Government Equipment which will leave Government Site (TPOC must coordinate with Division Property Custodian)

Description: [Enter Description] Serial Number: [Enter Serial Number] NIST Property Number: [Enter NIST Property Number] ☐ Other:

[Enter Other Details] Travel ☒ N/A

[Describe any Travel Requirements Per Item] ☐ Explain:

[Enter Justification / Requirement] ☐ Other:

[Enter Other Requirements] NOTE TO VENDOR: To the maximum extent possible, include travel requirement estimates as part of pertinent sections above (Installation, Maintenance, Repair, etc.). Otherwise, Travel will be a separate line item, reimbursable per the Federal Travel Regulation.