Specifications for ESEM.pdf

SPECIFICATIONS FOR ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE

SOURCES SOUGHT NOTICE N00173‐20‐RFI‐TL08 PAGE 1 OF 2

The Naval Research Laboratory (NRL) has a requirement for a commercially available environmental field emission scanning electron microscope (ESEM) that allows high resolution electron microscopy under various chamber environments. The ESEM must have variable pressure capability with seamless transition from high vacuum and lower vacuum modes. In addition ESEM must have features that allow imaging in wet/humid, hot and/or reactive chamber environments. The ESEM chamber size must be large enough to fit Bruker PI-88 in-situ nanoindenter and other in-situ tensile/compressive test apparatuses. Also, the chamber must have enough number of ports in order to connect aforementioned in-situ test equipment as well as EDAX Super Octane EDX and EDAX Velocity EBSD detectors. The ESEM must have a 5-axes motorized stage with X, Y, Z, tilt, and rotational motion. The ranges of the motion should be enough to perform in-situ testing and EDX and EBSD analyses. In order to facilitate the multiple sample imaging, the ESEM must have photo-based sample navigation. The ESEM must have conventional secondary electron imaging (SE) and backscatter imaging (BSD) detectors that enables imaging in high and low vacuum as well as in wet/humid, hot and/or reactive chamber environment. Also, The ESEM must include Scanning Transmission Electron imaging detector (STEM). The ESEM must include high temperature testing capability to facilitate hot and/or reactive environment imaging. The software package must provide a scripting solution to accommodate custom ESEM imaging protocols.

At a minimum, the system SHALL include the following specifications:

1) Variable chamber pressure capability that allows, a) High vacuum mode at chamber pressure lower than 6x10-4 Pa, b) Low vacuum mode at chamber pressure between 10 to 200 Pa, c) Environmental mode at chamber pressure between 10 to 4000 Pa that allows water vapor imaging and reactive chamber environment imaging.

2) The chamber width must be greater than 300 mm. The maximum allowed sample height must be greater than 80 mm.

3) The chamber must have more than 10 utility ports. EDX and EBSD ports must be co-planar.

4) The ESEM must include necessary port adapters for Bruker PI-88 in-situ nanoindenter as well as EDAX Super Octane EDX and Velocity EBSD detectors.

5) The sample stage must have X and Y travel range greater than 100 mm. Z travel range must be greater than 60 mm

6) The sample stage must be able to tilt from -15 to +90 degrees and allow 360 degrees rotation.

7) The ESEM must have an in-chamber color optical camera for imaging sample and an IR- CCD camera to monitor the chamber.

SPECIFICATIONS FOR ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE

SOURCES SOUGHT NOTICE N00173‐20‐RFI‐TL08 PAGE 2 OF 2

8) The ESEM must have Everhart-Thornley type detector for high vacuum and gaseous SE detector for low vacuum and environmental mode.

9) The ESEM must include beam deceleration capability to allow lower beam landing voltage.

10) The ESEM must include directional ESEM Gaseous Analytical Detector to allow BSD imaging at low vacuum and environmental mode.

11) The ESEM must include detector for low kV SE and BSD imaging.

12) The ESEM must include cathodoluminescence (CL) detector.

13) The ESEM must include retractable BSD detector.

14) The ESEM must include retractable STEM detector.

15) The ESEM must include a heating stage with maximum temperature of 1400 degree Celsius.

The heating stage must allow maximum heating rate equal to or greater than 50 degrees per minute.

16) The control hardware must include one main control computer and one supporting computer to isolate the control computer from network.

17) The software that controls the ESEM must operate in windows 10 environment.

18) The software package must include a scripting solution that allows customized imaging.

19) The ESEM must include power conditioning UPS.