SOW.pdf

Statement of Work Title: Confocal Raman Microscope Requesting Lab: National Institute of Standards & Technology Physical Measurements Laboratory (NIST PML)

BACKGROUND

The NIST Quantum Measurements Division (QMD) requires a confocal Raman microscope to advance the development of quantum resistance standards. In the past decades, quantum Hall devices made from graphene have been widely studied by national metrology institutes. Graphene quantum Hall resistance standard can be operated at higher temperature, in low magnetic field and with higher current, outperforming the GaAs predecessor. Since there are no reliable suppliers for economical graphene material that is suitable for quantum resistance standards, QMD has established a high temperature sublimation process to synthesize epitaxial graphene on silicon carbide, which is a superior material for quantum resistance standards. However, the yield of homogeneous monolayer epitaxial graphene is low, especially for area sizes larger than centimeter scale.

Raman spectroscopy provides precise and reliable measurement of the number of layers in graphene, which is essential to evaluate the graphene quality. This investment will enhance our ability to select qualified material for device fabrication. Moreover, it will provide crucial feedback to optimize the synthesis process for large-area homogenous graphene, which is indispensable to the development of graphene resistance standards of 100 Ω and above MΩ. Quantum resistance standards with a wide range of resistance values will shorten the calibration chain and reduce the operational cost of repeated testing and recalibration for industries relying on these standards.

Purpose: Enhance the capability for characterization of epitaxial graphene and advance the development of quantum Hall array resistance standard.

SCOPE

The Contractor shall deliver a quantity of one (1) confocal Raman microscope, inclusive of FOB Destination delivery terms, and a one (1) year warranty.

MINIMUM REQUIREMENTS

The Offeror shall submit a firm fixed-price quotation for a confocal Raman microscope that meets or exceed the minimum requirements identified below. Used or remanufactured equipment will be considered for award. Experimental, or prototype systems will not be accepted, evaluated, or considered for award offer. The use of “gray market” components not authorized for sale in the U.S. by the proposer is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001 Description: Confocal Raman Microscope Quantity: One (1)

A. Technical Specifications Raman Microscope

1. Fully automated system controlled by computer.

2. Excitation laser: 532 nm (100 milliwatt).

3. Laser power control with precision of 0.1 milliwatt.

4. Focused laser spot size (diameter) <= 0.5 micrometer.

5. Spectra range: 100 to 3500 cm-1.

6. Spectra resolution: <=1.6 cm-1 measured with 532 nm laser in the full range.

7. Minimum three (3) lenses (5x, 10x, 100x). 20x and 50x lenses are preferred.

8. Spatial resolution (X,Y) <= 0.5 µm

9. Motorized stage (X, Y, Z). X, Y travel distance >= 30 millimeter.

B. Technical Specifications Software

1. One (1) license for system control, one (1) additional license for processing.

2. Control of spectrometer, detectors, sample stages and other accessories.

3. Full data acquisition modes including video, spectrum and maps.

4. Data processing functions including baseline correction, smoothing/filtering.

5. Display functions for spectra, images and three dimensional (3D) volumes.

6. Data analysis functions including peak fitting, map characterization and classic least square (CLS) multivariate fitting.

7. Single and multi- variant methods of generating Raman images based on peak area, position, width, or their ratio.

8. Automatic mapping for multiple sites (see performance test).

C. Technical Specifications Computer

1. Operation System: Windows 11 pro.

2. Mouse, Keyboard, Monitors.

D. Installation and Training

1. Installation and operational training by an engineer at customer site.

DELIVERABLE

Deliverable Quantity Lead Time Confocal Raman Microscope

One (1) No Later Than (NLT) Twelve

(15) weeks After Receipt of Order (ARO)

Operational training by an engineer at customer site

4 hours Within (30) days after the installation.

DELIVERY TERMS

FOB Destination

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

The National Institute of Standards and Technology 100 Bureau Drive, C/O TBA

Building 218, room F001 Gaithersburg, MD 20899

SHIPPING INSTRUCTIONS

The Contractor shall deliver the Confocal Raman Microscope to Building 301 with final delivery to Building 218, room F001, at the National Institute of Standards and Technology, Gaithersburg, MD, using standard commercial shipping practices.

INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Verify the full range spectrum of epitaxial graphene on silicon carbide substrate, using a sample provided by NIST.

2. Verify the spectra resoluƟon as specified in the SOW.

3. Verify that the software can program to produce a series of map of graphene 2D peak

(G’ peak) for multiple locations in an automated manner. One example is below. The sample is 30 millimeters by 30 millimeters. The interested locations for Raman map are 6 millimeters apart from each other (see the diagram below).

4. Verify that the variation of graphene layer number can be measured by Raman maps of 2D peak with spatial resolution (X,Y) of 0.5 μm. An example of such measurement can be found in the Supplementary Information (Figure S7) of the publication “Confocal laser scanning microscopy for rapid optical characterization of graphene. Commun Phys 1, 83 (2018). https://doi.org/10.1038/s42005-018-0084-6”.

Figure S7 (d) Optical image of NIST epitaxial graphene sample. (e) 2D-Peak intensity Raman map of the same region as in (d). (f) Raman spectra for 1LG and 2LG from the spots marked by green and red circles in (e), respectively. (figures from Commun Phys 1, 83 (2018).)

Several more typical optical images of the NIST graphene sample are below, with labeled areas for monolayer graphene, no graphene or bilayer/multilayer graphene.

The sample substrate is silicon carbide.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST COR or OU Representative to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within sixty (60) days of the receipt of the equipment unless otherwise indicated above. An extended acceptance and inspection period is needed to allow for the visual inspection, installation, on-site training, and the completion of the performance tests which take approximately two (2) months to complete.

The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document. NIST will not accept a system that is deficient and does not meet the required technical specifications.

WARRANTY

The contractor shall warranty the entire system for a period of a minimum of one (1) years after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include unlimited telephone/e-mail support for questions regarding operation. All costs including parts, labor, travel, and other expenses necessary to repair the system will be borne solely by the contractor at no additional cost to the U.S. Government.

PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice. An invoice will not be accepted if submitted prior the Government’s acceptance of the generator.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.