SB1341-15-RQ-0909_SOW.pdf

SB1341-15-RQ-0909

Statement of Work

BACKGROUND

The National Institute of Standards and Technology (NIST), Materials Science and Engineering Division, is involved in the development of manufacturing techniques for high quality ultrathin magnetic films and sensors, with the aim to produce films with precisely tailored thicknesses, well defined interfaces and strong crystalline texture.

This work requires the heating of a substrate during physical vapor deposition of layers and/or during intermediate annealing/crystallization steps during a more complex growth process.

The enhancement of the Magnetic Engineering Research Facility (MERF) Multi-Chamber Physical Vapor Deposition (PVD) Tool will accomplish this critical infrastructural need through a hardware upgrade package that results in the implementation of a heated stage capable of achieving satisfactory substrate heating that is suitable for a highly complex ultrahigh vacuum (UHV) multi-Chamber system.

The MERF is a NIST designed and built unique materials growth and measurement facility, with a rich history of success in magnetic materials synthesis as well as UHV sputter system excellence. Led by the late William F. Egelhoff, Jr, a NIST Fellow in the Metallurgy Division, the MERF was a world leader in making layered thin-film giant magnetoresistance sensors – sensors which were then used as the read head on hard drives allowing for the storage of multiple gigabytes of data on a single disk.

Successes in the MERF facility can be tied back to the elaborate instrumentation of this magnetic thin-film deposition facility, possessing deposition, processing and in-situ characterization of magnetic thin films. Indeed, this facility pushed the threshold of standard PVD systems, leading companies to follow suit with their own commercial implementations of multi-target, multi-Chamber UHV PVD tools. NIST owns all data rights to this system including drawings, schematics and processes.

The MERF has a multiple-target deposition tool, with the capability of sputtering up to 11 different materials in an ultrahigh vacuum environment (Figure 1). This facility consists of two connected Chambers: a main Chamber - Chamber A, and a smaller serially connected Chamber, Chamber B. A linear transfer arm provides entry for 2’’ diameter substrates through a load lock into the main Chamber and is disposed on a flange oriented at 90 degrees to the line connecting main Chamber A and serially connected Chamber B.

A long series bellows (>48’’) for translation from main Chamber A to Chamber B originates at the center of Chamber A and accepts a threaded-rod sample carrier into a threading at its end. A right-angle bracket assembly at the end of the long series bellows (LSB) facilitates two angle rotation: discrete tilts of the polar angle with a stepper motor, and continuous rotation of the azimuthal angle with a dc motor controlled mitre gear (for thin film homogeneity).

Chamber A is a 24’’ diameter spherical volume, with a quantity of nine 7-1/2” sputtering guns, and two 2” sputtering guns, manufactured by AJA Int’l, North Scituate, MA, USA disposed in the upper hemisphere of the Chamber in a “sputter-down” configuration and pointing toward the Chamber center with two in-line film thickness monitors. In addition, there are two neutralized beam Ar+ ion guns in the top hemisphere.

In the lower half of the Chamber, there are up to 6 molecular beam epitaxy evaporators.

The largest flange on the Chamber is 8’’ and there are several unused flanges along the midline of the Chamber (Figure 2).

Chamber B is connected serially to Chamber A through a 3’’ diameter valve. Within Chamber B, NIST has two additional sputtering guns. Chamber B also houses analytical tools (X-ray Photoemission Spectroscopy, Auger Spectroscopy and low energy electron diffractometry) (Figure 4).

The upgrade package shall include a heater stage that shall provide control of a substrate’s temperatures up to at least 900 degrees Celsius. This stage (permanently mounted to one of several 8’’ flanges on the primary PVD Chamber) shall secure substrates in place and shall permit two angle rotation (continuous azimuthal and discrete tilt rotations) as well as limited linear translation (described in detail below) for accepting and transferring substrates between UHV chambers. In order for the heater stage to be compatible with the existing MERF PVD hardware, this upgrade package must also include specialized attachments to existing translation rods (both magnetic and bellows-based) to ensure reliable handling and transferring of samples between chambers, as well as entrance/exit of samples from UHV chambers.

SCOPE OF WORK

The Contractor shall provide all labor, hardware, software, power supplies, monitoring tools and accessories necessary to design and manufacture a hardware upgrade package in accordance with the specifications identified herein.

SPECIFICATIONS

System Requirements:

The Contractor shall provide a heater module capable of delivering radiative heat to a

2’’ diameter substrate wafer (materials including Si, SiO2, MgO, TiO2, Gd3Ga5O12 and Al2O3), allowing it to reach temperatures exceeding 900 degrees Celsius. This stage must be located in Chamber A and have a mechanism to receive vessels (substrate holders) that hold substrate wafers; and secure this assembly in place to prevent slippage (Figure 3). Due to the constraints on Chamber A, the heater module must mount on one of the 8” flanges positioned around Chamber A (Figure 2). The heater module shall come equipped with all of the following:

o Heater module shall provide heating with additional tilt and rotation of a 2’’ diameter substrate on a slightly larger substrate holder. Rotation and tilt of the substrate holder must be facilitated by a compatible stepper motor/controller assembly provided with the stage.

Silicon Carbide-coated graphite heater element with an electrically isolated Molybdenum substrate cradle. Substrate cradle shall accept a substrate holder (also made of Molybdenum) that is slightly larger than the 2’’ substrate diameter. Heater element must be capable of heating a

0.5 mm thick (or thinner), 2’’ diameter Al2O3 or Gd3Ga5O12 or SiO2 or Si or MgO or TiO2 substrate to at least 900 degrees Celsius. NIST shall issue up to three samples of each of the above mentioned substrates for contractor test and verification upon request;

Stepper motor actuated tilt (primary rotation) of at least +/-180˚, with the substrate face nominally on the center line axis of stage. Requires magnetic homing sensor for positioning. Requires controller box to set tilt angle semi-automatically and ‘Home’ control. Also requires serial output for remote (computerized) automatic tilting;

DC motor actuated continuous azimuthal rotation of the substrate, of at least 20 rpm with a controller and a controller box allowing the user to start and stop rotation, as well as to set rotation speed;

Manually actuated travel of at least 100 mm (step resolution at least 0.05

mm) to retract away from center of Chamber A towards flange;

Manual alignment capability in addition to motor actuated tilt of axis position at least +/- 1 degree;

Service collar assembly must be fitted with extended bearing assembly with power feedthroughs and feedthroughs for biasing substrates and for electrical current measurement. Shall have feedthroughs for heater current and measurement of thermocouple for temperature control;

Single type K thermocouple for temperature control shall be rated to at least 1000 degrees Celsius;

8’’ outer diameter copper gasket system mounting flange for mounting heater stage assembly to Chamber A of the PVD tool.

Distance between substrate cradle and heater module shall be at least 5 mm but no more than 10 mm;

o Insertion length (distance from flange face to the center of the substrate) shall be 240 mm +/-10 mm;

o Stronger consideration will be given to upgrade packages that demonstrate the ability to apply an electrical bias to control substrate deposition capability and to generate a plasma for substrate sputter cleaning before deposition.

The contractor shall provide a magnetic wobble stick with a pincer-type grip mechanism mounted on a 8’’ OD copper mounting flange with a shared viewport window providing partial optical access into the main chamber. Must provide at least 250 mm of linear motion, at least +/- 15 degrees tilt, continuous shaft rotation and pincer grip operation to grip the lip of substrate holder;

The contractor shall provide a substrate holder made of Molybdenum for high temperature compatibility to suit a 2’’ substrate. The holder shall be a ring with the capability of clipping a 2’’ sample into place. Outer diameter of ring shall exceed 2’’ but not 2.5’’ with a lip such that it can be gripped by the wobble stick. The substrate holder shall be retained by clips when in place on the heater stage.

Substrate holder shall not be made of ferromagnetic materials;

The contractor shall provide a two-pronged fork with pins to accept a substrate holder ring capable of receiving a sample holder compatible with existing linear transfer assembly that takes samples from outside and passes through a load-lock into Chamber A (Figure 6);

The contractor shall provide a single axis stepper motor controller package 110Vac input, 60Hz, including motor cable and interlock plug and software for operation;

The contractor shall provide a Power Supply Unit (PSU) and temperature controller for a DC power supply to drive the heater and to integrate with type K thermocouple including PSU Power Cable, rack mounting case, with integrated temperature control and 110 Vac 60Hz input and software for operation;

The contractor shall provide a receiver assembly with a fork and Mo spring clips to grip the substrate holder for the long series bellows manipulator with a customized right-angle bracket and mitre gear (Figure 5) to accept new sample holders (2) and maintain existing capability for azimuthal rotation and tilt already noted in previous paragraphs. Assembly must be aligned with midline of valves to transfer assembly (2) through 3’’ valves between Chambers A and B. Critical dimension of receiver assembly through 3’’ valve (Figure 4) will have to account for vertical drift (sag) in long series bellows under extension (Figure 7);

New gaskets/assembly shall be able to maintain UHV at least or lower than 5x10-8 Torr in Chamber A, and at least or lower than 5 x 10-8 Torr in Chamber B;

Temperature set point range shall be at least 20oC to 1000oC;

Temperature set point stability shall be at least 10oC for 1 hour;

At 800oC or lower, the base vacuum in Chamber A shall be able to reach at least 4x10-7

Torr with all deposition material sources OFF;

Power requirements shall be 115V/1 phase/60 Hz; standard US electrical socket;

The contractor shall provide software to control temperature, actuate angular tilts of heater stage, or, at a minimum, IEEE-488.2 GPIB or Serial communications commands set for aforementioned hardware control;

The system must include an operations and maintenance manual covering proper operation, routine maintenance, and troubleshooting for the instrument and controlling software; the manual must be supplied in duplicate (two copies) in hard copy;

The system must also come with at least two hard copies of an assembly manual covering proper removal of the parts from their respective shipping containers and assembly.

GENERAL INFORMATION

-The Contractor shall be prohibited from using information about the MERF and/or the required system, gained over the life of the contract, for any purpose other than providing the required system.

-NIST holds all data and intellectual property rights to the existing system. Any measurements or photographs taken, or any drawings or schematics provided by NIST to the contractor shall remain the sole intellectual property of NIST.

-NIST shall retain unlimited data rights to all designs, schematics, data, and documentation developed under this contract in accordance with the Rights in Data clause incorporated herein.

-All designs shall be provided in AutoCAD or SolidWorks for drawings and Microsoft Word for text documents.

-By providing final approval of all designs, NIST does not assume liability or responsibility that the design will be successful. The Contractor shall retain all liability and responsibility for the success of the design.

-Proprietary Data This work involves data in the form of the MERF system design that NIST holds all intellectual property and data rights. Additionally, this work requires NIST to receive unlimited data rights to the system being provided by the contractor. The clause, FAR 52.227-17, Rights in Data—Special Works shall be included in the purchase order.

-Safety The Contractor employee shall be responsible for knowing and complying with NIST installation safety prevention regulations (http://www-i.nist.gov/mml/safety/policies/index.htm.) Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

-Patent Rights The Government will retains a Government use license to all inventions arising from this work.

-Security NIST is a restricted campus. An identification badge is required for access for entry into buildings and also is shown to the armed Security Police when entering the campus.

-Contractor Registration The contractor shall provide the name and citizenship information of the on-site technician(s) to the NIST TPOC prior to arrival. The TPOC will submit the name(s) and citizenship information to the NIST Office of Security in order for a given Contractor employee to enter the NIST campus to perform on-site preventive maintenance or repairs of the instruments.

-Media Inquiries The Contractor’s employees shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the TPOC, COR, and/or CO. There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST Director

TASKS

Kick-Off Meeting Not later than 15-30 days after award, the contractor shall participate in a kick-off meeting. The meeting shall be conducted on-site at the NIST Gaithersburg campus, and will be scheduled and hosted by the Contracting Officer’s Representative (COR) from NIST, and the Technical Point of Contact (TPOC). The NIST COR, TPOC, and other designated NIST personnel will be in attendance. The contractor shall determine the personnel that are appropriate to be in attendance at the meeting, however, must have appropriate personnel in attendance to have a technical and logistical discussion about design, required components, manufacturing and installation instructions.

During the kick-off meeting, the NIST COR will provide the contractor with a demonstration of the current system performance, and provide the contractor the opportunity to take final measurements prior to the design package due dates.

In addition, the contractor and NIST shall discuss solutions for a long-series bellows translation arm. NIST requires a custom mitre gear assembly that can actuate tilts and rotation and can fit through a narrow 3’’ valve. Translation arm sag must be considered in any estimation for the critical dimensions of the mitre gear assembly with the sample and sample holder attached to make passage through the 3’’ valve between Chambers A and B unobstructed. The contractor shall measure current transfer forks on the translation arms to ensure compliance of their transfer forks with the system.

Required Designs Draft Design The Contractor shall produce a draft design for submission to NIST at the kickoff meeting. The design must be a schematic of the system that expands upon the technical sketch submitted with the quotation.

The draft design must include cross-sections and elevation views of the system showing the location of the various flange mounted hardware (including the wobblestick with viewport and the heater module) and their nominal dimensions; as well as the sample transfer hardware (including the sample holder, heater module cradle, transfer fork and mitre-gear assembly to mount to the end of the long series bellows translator) and must be sufficient for NIST to determine that the system will be appropriate for the purpose it is intended with respect to all aspects of form, fit, and function.

The draft design shall be provided in electronic and hard copy prior to the kick-off meeting.

50% Complete Design The Contractor shall provide a 50% complete design package to the COR. The 50% complete design package shall build upon the draft design and shall consist of all of the following, at a minimum:

(1) Assembly design showing Chamber “A” with heater module attaching to 8’’ flange and indicating insertion length of module from flange to Chamber center with all dimensions labeled with estimated tolerances. Estimate any sag in the heater module arm and state orientation of surface normal of heater module with respect to Chamber “A” ceiling;

(2)Assembly design showing Chamber “A” with wobblestick and viewport attaching to a single 8’’ flange, showing inside Chamber “A” and outside Chamber “A” view perspectives.

The 50% complete design shall be provided not later than two months after the kick-off meeting. The Government will provide comments and acceptance/refusal of the design package within 10 business days. All comments and changes shall be incorporated into the 100% complete design package.

100% Complete Design The contractor shall provide a 100% design package consisting of all of the following, at a minimum:

1. Assembly design showing any changes to the design provided in the 50% complete design, as well as the assembly. The design must show the fork attaching to the translation arm in load-lock Chamber; translation of the fork holding the sample holder toward center of Chamber “A”; assembly of sample + sample holder; and assembly of sample holder and heater cradle;

2. Assembly of a fork + Molybdenum spring clips to transfer the substrate holder into Chamber “B” through 3’’ valve while considering estimated sag of long series bellows transfer arm; mitre gear assembly compatible with long series bellows transfer arm and capable of delivering continuous azimuthal rotation and tilts to substrate holder; and

3. Indicate all materials used (e.g. Molybdenum, graphite,) in each component and the mass of each component.

The 100% complete design shall be provided to the COR not later than 30 days after comments on the 50% complete design have been sent by the Government and received by the Contractor.

The Government will provide comments and acceptance/refusal of the design package within 10 business days. The contractor shall revise the 100% design package and resubmit until acceptance of the package is provided by the COR. All revisions shall be completed at no additional cost to the Government.

Manufacture of Stage Upon approval by the Government of all designs, the contractor shall proceed to manufacture the temperature-controlled heater stage with two angle rotation and linear translation.

All equipment shall be manufactured in accordance with the design. Any potential changes to the design, identified by the contractor or the Government after approval of the 100% design package, must be submitted to the COR, in writing or phone, as appropriate, within 24-48 hours after the changes are identified.

Changes shall not be incorporated into the design without the prior written approval of the COR. A final version of the revised design in AutoCAD or SolidWorks format must be forwarded to the COR. Factory Testing at the Contractor’s Site

Factory Testing at the Contractor’s Site NIST requires that the Contractor perform factory testing before the stage is shipped. The Government intends to have not more than two NIST personnel at the contractor’s site to observe while the contractor performs factory testing. The contractor shall provide the COR and TPOC at least two weeks advance notice of the date that factory testing will be conducted. All travel for the COR and

TPOC will be conducted at Government expense.

The TPOC will take detailed photographs of all parts prior to the parts being installed on the test Chamber, assembled onto the test Chamber, disassembled from the test Chamber, being crated prior to packing and the boxes containing the parts prior to shipping.

The contractor shall provide the COR and TPOC a report on the performance of the heating Chamber using a contractor-owned test ultrahigh vacuum (UHV) Chamber. The factory test must report on all of the following:

1) the ability of the heater stage to heat supplied 2’’ diameter (0.197’’ thick) wafers (Si, MgO, Al2O3, TiO2, Gd3Ga5O12) to at least 900 degrees C as measured by a type K thermocouple attached to the top of the wafer;

2) the ability to actuate continuous azimuthal rotation of the heater module using the supplied handheld motor controller;

3) the ability to actuate tilts of the heater module using the stepper motor controller software and the functioning of the homing capability to tilt the heater module back to its default configuration in which the top of a substrate wafer is pointing upward to the ceiling;

4) the ability of gasket-based mounting flange of heater module to be mounted to 8’’ panel without vacuum leakage as demonstrated by obtaining lower than 10-7 Torr base pressure before heating.

Installation Instructions and Government Installation The Government intends to install the equipment on-site at NIST Gaithersburg.

The contractor shall provide two copies of written instructions in hard copy format, for installation of all components. Use of these instructions and observation of the factory testing, will help to ensure that the COR and TPOC, are well equipped to install the stage.

If the contractor chooses to be on-site while the Government installs the stage, the TPOC will make a reasonable effort to schedule installation when the contractor is able to be on-site at NIST. All labor and travel associated with this visit shall be performed at the contractor’s expense.

Option Line Item for Installation The Government reserves the right to have the contractor provide installation of the system onto the MERF. Installation by the contractor is included as an option line item.

Line item 0003 for contractor provided installation is an option line item. Quoters must provide a firm-fixed price for this line item. The quoted price for the option line item shall remain valid for a period of six months from the date of award.

The Government may exercise the option line item, at its discretion, at the time of award or anytime in accordance with the timeline identified above. The option line item will be exercised by the issuance of a modification (Standard Form 30).

LINE ITEM 0003 – INSTALLATION: The Contractor shall install the system at the NIST campus in Gaithersburg, MD. Installation shall include uncrating/unpacking of all equipment, set-up and hook-up of all equipment, start-up of the equipment, demonstration of all required specifications, and removal of all trash. If this option is exercised, installation shall be completed not later than 30 days after delivery of the equipment to

NIST.

Acceptance Testing at the NIST Site NIST will perform extended acceptance testing after delivery and installation.

Upon receipt of all parts at the NIST site, the COR and TPOC shall again take pictures of all parts after unpacking of items to confirm, that, notwithstanding latent defects, structural damage is not apparent with respect to the delivered items.

If the option line item is not exercised, the COR and TPOC will install the heater module and accessories onto NIST’s UHV Chamber, in accordance with the installation instructions provided by the contractor.

If the option line item is exercised, the contractor shall install the heater module and accessories onto NIST’s UHV Chamber.

Upon completion of installation by NIST or the contractor, NIST will conduct the following tests. It is noted that the following list of performance tests include the MERF’s current functionality as enhanced by the contractor’s system.

1) the ability of the heater stage to heat 2’’ diameter (0.197’’ thick) wafers (Si, MgO, Al2O3, TiO2, Gd3Ga5O12) to at least 900 degrees C as measured by a type K thermocouple attached to the top of the wafer

2) the ability to actuate continuous azimuthal rotation of the heater module using the supplied handheld motor controller

3) the ability to actuate tilts of the heater module using the stepper motor controller software and the functioning of the homing capability to tilt the heater module back to its default configuration in which the top of a substrate wafer is pointing upward to the ceiling

4) the ability of gasket-based mounting flange of heater module to be mounted to 8’’ panel without vacuum leakage as demonstrated by obtaining lower than 10-7 Torr base pressure before heating

5) the ability of substrate holder ring to accept 2’’ diameter, 0.197’’ thickness wafers (Si, MgO, Al2O3, TiO2, Gd3Ga5O12) without dropping wafers upon inversion of holder ring

6) the ability of two-pronged forks with pins to accept substrate holder ring

7) the ability of wobblestick pincer grip to grip the lip of substrate holder ring and to rotate substrate holder ring approximately +/- 15 degrees without dropping it

8) the ability of wobblestick to transfer substrate holder ring from two-pronged forks with pins to cradle of heater module

9) the ability of heater module cradle to grip substrate holder ring and not drop substrate holder ring upon 180 degree tilt

10) the ability of wobble stick to retrieve substrate holder ring from heater module cradle

11) the ability of wobble stick to transfer substrate holder ring to receiver assembly with fork and Mo spring clips attached to the long series bellows (LSB) manipulator with a customized right-angle bracket and mitre gear

12) the ability to translate substrate holder ring on receiver assembly with fork and Mo spring clips attached to the LSB manipulator from the main Chamber (A) to the analytical Chamber (B) through a 3’’ diameter valve without obstruction after engineering mitigation of sag in LSB manipulator arm

13) the ability to actuate continuous azimuthal rotation of substrate holder ring on LSB receiver assembly using customized right-angle bracket and mitre gear either in main Chamber (A) or analytical Chamber (B)

14) the ability to actuate discrete tilts of substrate holder ring on LSB receiver assembly using customized right-angle bracket and mitre gear either in main Chamber

(A) or analytical Chamber (B)

15) the ability to reach base vacuum conditions of 5x10-8 Torr +/- 2 x10-8 Torr in Chamber A, and 5 x 10-8 Torr +/- 2x10-8 Torr in Chamber B with heater turned OFF after pumping down for at least 48 hours

16) the ability to reach vacuum conditions at least 4x10-7 Torr or lower with all deposition material sources OFF and temperature setpoint below 800 degrees Celsius.

17) temperature set point control from 20 degrees C to 1000 degrees C

18) Temperature set point stability of at least 10oC for 1 hour for temperatures below or equal to 400 degrees Celsius

19) Temperature set point stability of at least 50oC for 1 hour for temperatures above 400 degrees Celsius but below 1000 degrees Celsius

If NIST discovers any weaknesses in the performance of the equipment during any of the acceptance tests, the contractor must repair the equipment. The contractor shall determine whether repairs shall be made on-site at NIST or at the contractor’s site.

Return shipping of all parts and/or components shall be at the contractor’s sole responsibility and expense.

Testing will occur over a two month period after delivery.

Warranty The Contractor shall provide, at a minimum, a one year warranty for the equipment. The warranty shall cover all parts, labor and travel. The warranty shall commence upon successful completion of delivery and acceptance testing. Note that the Government reserves two months after delivery for installation and acceptance testing.

PERIOD OF PERFORMANCE

Design, manufacturing, factory testing, installation and acceptance testing shall be completed not later than seven months from the date of award.

PLACE OF PERFORMANCE

Design and manufacturing shall be completed at the Contractor’s facility.

DELIVERABLES

Description Quantity Due Date 50% Design Review One (1) One (1) month ARO.

100% Design Review One (1) Two (2) months ARO.

MERF Heater Hardware Upgrades One (1) Four (4) months after

100% design acceptance.

Operation and Maintenance Manual in hard copy format.

Two (2) Due upon system delivery

MERF Heater Hardware Upgrades drawings, schematics and technical documentation electronically in AutoCad, SolidWorks, and MS Word formats.

One (1) Due upon system delivery.

Description Quantity Due Date Assembly and installation manual in hard copy format.

Two (2) Due upon system delivery.

PERFORMANCE REQUIREMENT SUMMARY

The Contractor shall demonstrate that all performance standards in this statement of work have been met. Also, for any software included with deliverable:

Desired Output Performance Standard Monitoring Method

Provide a design that is at least 50% complete

The design must account for the limitations and minimum specification s described herein.

Acceptance by TPOC

Provide a design that is 100% complete

The design must account for the limitations and minimum specification s described herein.

Acceptance by TPOC

MERF Heater Hardware Upgrades

Meet performance requirements

Installation and acceptance testing by the Government will occur within two months after delivery. Acceptance by

TPOC.

LIST OF FIGURES

Figure 1:

Overview of MERF PVD Tool showing Chamber A (a 24'' volume with 9 sputter down guns and radial viewports along the midline) and Chamber B (analytical Chamber supporting 2 1.5''

Chamber A

Chamber B

Motor Controller Box

Wobblestick+ viewport on 8’’ flange

Heater module

3’’ valve sputter guns, two serial viewports, XPS, LEED and Auger tools). Chambers A and B are connected via a 3’’ valve and samples are transferred within UHV with a Long Series Bellows (LSB) translator. LSB translator (42” +/- 6’’ translation) supports continuous azimuthal rotation and discrete tilts semi-automatically controlled by Black Box in figure horizontal center, lower third.

Figure 2:

Chamber A showing 8'' flange port (left) where heater module should mount. Also shows linear transfer arm (from right) for transferring samples from load-lock (see vertical view port on lower right quadrant) into Chamber A

8’’ flange for heater module

Linear transfer arm

Load-lock

Figure 3:

Cartoon of requested assembly of ports modified on Chamber A

Figure 4:

Chamber B showing two viewports and 3'' valve (which can be closed off) for transfer of samples into Chamber A using long series bellows translator.

Viewports

Chamber B Valve between A & B

Figure 5:

View inside the Chamber from perspective of viewport showing long series bellows (LSB) translation arm with 2’’ Si wafer substrate mounted on top of old puck received by L-bracket and mitre gear assembly permitting 180 degree semi-automated tilts and continuous azimuthal rotation. Linear translation assembly has retracted into load-lock. LSB port will be moved 180 degrees to enter from opposite side of Chamber and heater module will occupy current port occupied by LSB.

To load-lock

Old LSB port To Chamber B

Mitre gear with puck supporting 2’’ Si subtrate

Figure 6:

View into load-lock Chamber showing old transfer fork. New transfer fork must support 2'' wafer, be compatible with transfer via Wobblestick manipulator onto heater module or long series bellows; and pass through 3'' valve without obstruction.

Figure 7:

Whole tube assembly at the end of a new long-series bellows translator. Requires a new L bracket and larger gear to accept new 2’’ sample holder from Wobblestick and retract through 3’’ valve into analytical Chamber. Must compensate for any sag on the 42’’ +/- 6’’ inch translation arm to pass through 3’’ valve without obstruction.