SB1341-15-RQ-0784_SOW.pdf

TITLE: SEM based in-situ indenter for mechanical testing

I. BACKGROUND INFORMATION

The Nanomechanical Properties group (Material Measurement Science Division) is tasked with the development of techniques to measure localized stresses and strains in materials on the nanoscale. We perform mechanical testing using Instrumented Indentation Testing (IIT) on microscale samples; however, extending these capabilities to the nanoscale requires a technique with higher spatial resolution and smaller samples. Electron Backscatter Diffraction (EBSD) is performed inside a Scanning Electron Microscope (SEM) and is capable of strain measurement with exceptional spatial resolution and strain accuracy. We are looking to couple these two techniques by acquiring an in-situ indenter that will allow IIT measurements to be made inside the

SEM.

NIST requires an IIT system that is designed to operate inside our already owned SEMs. This system will be capable of applying mechanical load to samples while being observed in the SEM environment in both imaging and EBSD modes.

II. SCOPE OF WORK

The Contractor shall provide one (1) Instrumented Indentation Testing (IIT) analytical instrument system capable of functioning inside of a JEOL 7100F SEM with a SM-71490 – type 2 stage. Additionally, the IIT must be capable of being installed inside of a FEI 600 series dual beam SEM/FIB with additional stage adapters and feedthrough hardware.

III. SPECIFICATIONS

The Contractor shall provide one (1) Instrumented Indentation Testing analytical instrument system that meets the following minimum technical requirements.

System Requirements:

1. Design

1.1. The instrumented indentation component must

1.1.1. Be able to be mounted to the stage of a JEOL branded model number 7100F (SM-

71490 – type 2) SEM in a way that allows the SEM stage to safely position the tip of the indenter when ready for indentation in the center of the field of view at the following positions.

1.1.1.1. 0° stage tilt with available SEM working distances including the range between 5 mm and 20 mm from the objective pole piece. There are no EBSD detector positioning requirements in this configuration.

1.1.1.2. 0 to 60° stage tilt towards the rear of the chamber (away from the load lock) with available SEM working distances including the range between 15 mm and 30 mm with the axis of indentation inclined up or down. In this configuration, the EBSD detector must be capable of being positioned no more than 30 mm from the sample when the sample is tilted to 60°. Stronger consideration shall be given to systems that can operate in a configuration closer to 70° stage tilt, SEM working distances of 15-20 mm, and EBSD detector distances of 15-20 mm.

1.1.1.3. 0 to 70° stage tilt towards the rear of the chamber (away from the load lock) with available SEM working distances between 10 mm and 20 mm from the objective pole piece with the axis of indentation parallel to the axis of stage tilt. In this configuration, the EBSD detector must be capable of being positioned no more than 25 mm from the sample when the sample is tilted to 70°.

1.1.1.4. In all tilted configurations, the system must not interfere with the insertion of the current EBSD detector and placement of the detector screen no more than 30 mm from the sample. See images in Section IX for exterior images of EBSD system.

1.1.1.5. In all configurations, nothing on the system may obstruct the line-of-sight view of the top surface of the sample from both the SEM column polepiece and the EBSD detector.

1.1.2. The system must be completely installable in the SEM by a single trained technician in less than 30 minutes. This time limit does not include time spent venting the chamber and opening the chamber door.

1.1.3. The system must be completely removable from the SEM by a single trained technician in less than 30 minutes. This includes all cabling and the feedthrough on the exterior of the chamber. This time limit does not include time spent venting the chamber and opening the chamber door.

1.1.4. Must provide positioning translation for the sample relative to the indenter;

however, the sample must be stationary during indentation.

1.1.5. Shall be connected via a currently available vacuum feedthrough port (one of two rectangular ports adjacent to the load lock on the front of the instrument). See images in Section IX for location of these ports. The feedthrough port is indicated in the left side view.

1.1.6. Shall Be capable of tip displacements of at least 150 µm

1.1.7. The tips must be interchangeable and conductive to prevent charging in the SEM.

1.2. The control electronics must be contained within a unit no larger than 4U of a standard 19” electronics rack (other similar sized form factors are acceptable).

1.3. All electrical connections to the system must pass through a single feedthrough port that is currently available on our JEOL 7100F SEM. See images in Section IX for location of available ports.

1.4. The system must be controlled by software installed on a PC running Windows 7 (laptop form factor) and connects to all hardware via USB connections. The vendor must supply both the software and instrument control laptop. The laptop must be newly manufactured 15” model with at least a dual core processor, 8 GB or RAM, at least 128 GB of storage.

2. Performance while Installed in JEOL 7100F SEM

2.1. The system must provide three perpendicular axes of sample positioning with at least 3 mm of travel with an accuracy of 25 nm or smaller.

2.2. The positioning accuracy of the tip displacement must be 1 nm or less.

2.3. The system shall have a load capacity of 100 mN or larger, with an accuracy of 1 µN or less. Stronger consideration shall be given to systems that have a load capacity in excess of 100 mN.

2.4. The lateral stiffness (directions perpendicular to the indentation direction) at the tip must be at least 50 kN/m.

2.5. The indentation system must not produce electromagnetic signals that interfere with imaging or electron backscattered diffraction signals.

2.6. The system must be capable of capturing a video feed from the SEM and displaying and recording this video feed simultaneously with the load-displacement plot. It must include all necessary hardware and software for this purpose. The video capture must have a resolution of at least 640×480 and a frame rate of at least 2 frames per second.

2.7. The system must be capable of performing tests in both load-controlled and displacement-controlled modes.

3. Included accessory items (one each)

3.1. Berkovich tip (tip radius of no more than 50 nm)

3.2. Cube corner tip (tip radius of no more than 50 nm)

3.3. Conospherical tip (tip radius between 1 um and 10 um)

4. The following documentation shall be given to the Technical Point of Contact (TPOC) upon delivery of the system.

4.1. A calibration report showing the performance of the force and displacement transducers of the IIT system in either electronic PDF format or one bound hard copy.

4.2. A manual describing the function and maintenance of the IIT system in either electronic

PDF format, or one bound hard copy.

Installation and Acceptance:

The system including all equipment, software and laptop, shall be installed by the Contractor.

Installation, at a minimum, shall include uncrating/unpackaging of all equipment, setup and hook-up of the system, demonstration of all specifications, and removal of trash.

The installation of the system shall ensure the safety and continued operation of the existing SEM equipment.

Upon completion of installation, the Contractor shall demonstrate that the tool meets all of the above performance criteria and shall demonstrate the installation and removal of the IIT onto the SEM within the required 30 minutes.

Installation and acceptance testing shall be performed by the contractor and shall be completed not later than 10 days after delivery of the system.

Training:

The Contractor shall provide training for at least three (3) NIST personnel. Training shall include installation in (and removal from) the SEM, calibration procedures, normal operation, specifics of software (including video capture), basic troubleshooting, and routine maintenance.

Training shall be provided during normal business hours, between 8:30am and 5:00pm Eastern Time, Monday through Friday, except Federal Holidays, and be coordinated with the NIST Technical Point of Contact (TPOC) to ensure maximum availability of NIST personnel.

Training must be completed not later than 10 days after completion of installation and acceptance testing.

Warranty:

The Contractor shall provide a one (1) year warranty for the system. All hardware and software shall be covered. The warranty shall cover all parts, labor and travel. The warranty shall commence upon final acceptance by the Government.

During the warranty period, the Contractor shall provide email and telephone support on of Monday through Friday from the hours of at least 10:00 am to 4:00 pm Eastern Time.

Additionally, the contractor shall provide on-site service, and replacement of any defective equipment or software. The Contractor must respond to NIST personnel requesting service by phone not later than one (1) business day after receiving a request for service or technical support. If on-site maintenance is required, the Contractor must provide their best effort to be on-site at NIST within five (5) business days of the initial request for service.

Maintenance Services (OPTION LINE ITEMS):

The Contractor shall perform maintenance services and repairs for the system at the expiration of the warranty period for up to three (3) one-year option periods. During each maintenance period all hardware and software shall be covered as well as all parts, labor, and travel. Additionally, the Contractor shall provide email and telephone support Monday through Friday from the hours of at least 10:00 am to 4:00 pm Eastern Time. Additionally, the contractor shall provide on-site service, and replacement of any defective equipment or software. The Contractor must respond to NIST personnel requesting service by phone not later than one (1) business day after receiving a request for service or technical support. If on-site maintenance is required, the Contractor must provide their best effort to be on-site at NIST within five (5) business days of the initial request for service.

IV. PLACE OF PERFORMANCE

Delivery, installation and acceptance, training, warranty services, and maintenance services shall be accomplished at NIST, Gaithersburg, Maryland. Normal duty hours are Monday through Friday, 8:30 a.m. to 5:00 p.m. with the exception of Federal holidays.

V. GOVERNMENT FURNISHED PROPERTY

NIST will make available the JEOL 7100F (SM-71490 – type 2) SEM to the Contractor for integration of the IIT.

VI. DELIVERABLES

Description Quantity Due Date Analytical instrument One (1) 100 days after award of this requirement.

Installation of the analytical instrument Once 10 days after delivery of the equipment.

Demonstration of minimum acceptable performance requirements.

Once 10 days after installation.

Operations and maintenance manual for the analytical instrument in either electronic PDF format or one bound hard copy

One (1) 10 days after installation.

Description Quantity Due Date provided to the TPOC.

Training of NIST personnel at NIST, Gaithersburg, MD

Once 10 days after installation.

VII. DELIVERY INFORMATION

The contractor shall deliver the system FOB Destination to the following address:

National Institute of Standards and Technology Building 301 Shipping and Receiving 100 Bureau Drive Gaithersburg, MD 20899

Delivery, installation and acceptance testing, and training shall be completed not later than 100 days after receipt of order.

VIII. GENERAL INFORMATION

Safety: The Contractor employee shall be responsible for knowing and complying with NIST installation safety prevention regulations (http://www-i.nist.gov/mml/safety/policies/index.htm.)

Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Patent Rights: The Government retains a Government use license to all inventions arising from this work.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and also is shown to the armed Security Police when entering the campus.

IX. EQUIPMENT IMAGES:

Front view of microscope with stage door ajar.

Left side view of microscope with “HERE” indicator for feedthrough location. The EBSD camera and EDXS detectors are visible on the left of the image.

Quartering left and back view of microscope with EBSD and EDXS detectors visible.