RFQ_SB134114RQ0497.pdf

CLASSIFICATION CODE: 66- Laboratory Equipment and Supplies

SUBJECT: Sheet Resistance Mapping System

SOLICITATION NUMBER: SB1341-14-RQ-0497

RESPONSE DATE: August 14, 2014

CONTACT POINTS: Paula Wilkison, Contract Specialist (301) 975-8448

Patrick Staines, Contracting Officer, (301) 975-6335

DESCRIPTION:

THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL

ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-

STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR

COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION

INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY

SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A SEPARATE

WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. THE SOLICITATION IS

BEING ISSUED USING SIMPLIFIED ACQUISITION PROCEDURES.

This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-74, effective July 1, 2014 (includes FAC 2005-75 effective 24 Jun 2014).

1352.215-72 INQUIRIES (APR 2010)

Offerors must submit all questions concerning this solicitation in writing to the Contracting

Officer. Questions should be received no later than ten calendar days after the issuance date of this solicitation. Any responses to questions will be made in writing, without identification of the questioner, and will be included in an amendment to the solicitation. Even if provided in other form, only the question responses included in the amendment to the solicitation will govern performance of the contract.

(end of provision)

The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees.

This acquisition is 100% set-aside for small business.

In accordance with the non-manufacturer rule, the contractor shall be a small business under the applicable size standard and shall provide either its own product or that of another domestic small business manufacturing or processing concern. See FAR 19.102(f) for additional information.

All offerors shall provide a quotation for the following line item:

Line Item 0001: One (1) Sheet Resistance Mapping System

Introduction

The contractor shall furnish the necessary personnel, material, equipment, and services to fabricate one sheet resistance mapping system.

Background

NIST has a requirement for a Sheet Resistance Mapping System to support nanofabrication in the Center for Nanoscale Science and Technology (CNST), NIST’s nanotechnology user facility.

The system will be sited in a class 100 clean room in the CNST NanoFab and used as a shared resource accessible to researchers from industry, academia, NIST, and other government agencies. Sheet resistance is one of the key characteristics of thin films used in the fabrication of nanoscale devices. The NIST CNST NanoFab currently operates a single point, manually operated, sheet resistance tool with a limited resistance range, and there is the need for an automated system capable of quickly mapping the resistance over a whole wafer and extend the range of achievable resistance values.

Line Item 0001: Quantity one (1) each, Sheet Resistance Mapping System, meeting or exceeding the following minimum specifications. All items must be new. Prototypes, demonstration models, used or refurbished instruments will not be considered for award.

MINIMUM SPECIFICATIONS

1. GENERAL DESCRIPTION

a. The mapping system shall be a bench-top unit.

b. The resistance measurement shall make use of the four-point probe technique.

c. The wafer handling shall be manual, one wafer at a time, without cassette loader.

d. The system shall be compatible with Class 100 (ISO 5) clean room environment.

2. SYSTEM CAPABILITIES

a. The system shall be capable of automatically measuring multiple points on a wafer having diameters ranging from 50 mm to 200 mm and presenting the measurement data in exportable table and graphic forms.

b. Resistance range: 1 milliohm to 0.8 teraohm (1x10 -3 ohm to 8x10 ohm) or wider.

c. The measurement shall strictly make use of the four-point probe technique over the whole resistance range.

d. Measurement time per site: ≤ 3 seconds for resistances up to 0.8 megohm (0.8 x 10 ohm).

e. Accuracy: ± 0.1 % or better.

f. Repeatability: ± 0.2 % or better.

g. Auto-ranging of input current for sample under test.

h. Edge exclusion ≤ 3 mm.

3. SOFTWARE:

a. The software shall run on Windows 7 operating system.

b. All data files shall be exportable to Microsoft Excel.

c. The system shall be simplified SECS-II compliant: RS-232 interface shall allow data transfer to host computer.

d. The mapping patterns available shall include:

i. Polar maps.

ii. Rectangular/Cartesian maps.

iii. Line scans.

iv. User-defined patterns shall be capable of a minimum of 5,000 points.

e. The plot displays available shall include:

i. 2D contour maps.

ii. 3D maps.

iii. Data maps.

iv. Histograms.

f. A calibration routine shall be available to calibrate probe heads using NIST-traceable standards. A push button operation is preferred.

4. ACCESSORIES

a. The vendor shall include 3 spare probe heads with 3 different tip radii. If more than three different models are available, the vendor shall include a list and NIST will select three.

b. The vendor shall include two NIST traceable resistance standards: one for the low resistance range, and one for the high range. If more than two resistance standards are available, the vendor shall include a list and NIST will select a minimum of two.

Installation

The system shall be installed by the Contractor and meet contract specifications no later than two weeks after delivery. Installation, at a minimum, shall include uncrating/unpacking of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST Building 215, Room B103, 100 Bureau Drive, Gaithersburg, Maryland.

Training

The contractor shall conduct a minimum of one day of on-site training at NIST, Gaithersburg, Maryland, which shall cover, at a minimum, basic operation and maintenance of the tool.

Express Warranty

The Contractor shall provide a minimum warranty of one year for parts and labor starting on the date of acceptance at the customer site.

Delivery

FOB Destination, within Consignee’s Premises delivery terms are required, and delivery and installation shall take place within three (3) months of receipt of order. The Contractor shall first deliver line item 0001 to NIST, Building 301, Shipping and Receiving, Gaithersburg, MD

20899-1640 prior to ultimate delivery and installation at Building 215.

FOB Destination: The Contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery pont specified in the purchase order; and pay all charges to the specified point of delivery.

Acceptance

This instrument will require an acceptance period of 30 days.

PROVISIONS AND CLAUSES:

The following provisions and clauses apply to this acquisition and are hereby incorporated by reference. All FAR and CAR provisions and clauses may be viewed in full text at http://farsite.hill.af.mil/

Provisions

52.204-7, System for Award Management

52.212-1, Instructions to Offerors-Commercial Items

52.212-3 Offeror Representations and Certifications-Commercial Items

52.225-18, Place of Manufacture;

Offerors shall complete annual representations and certifications on-line at www.sam.gov in accordance with FAR 52.212-3 Offerors Representations and Certifications- Commercial Items.

If paragraph (j) of the provision is applicable, a written submission is required.

http://farsite.hill.af.mil/

Representation by Corporations Regarding an Unpaid Delinquent Tax Liability or a Felony

Conviction Under Any Federal Law (Class Deviation) (March 2012)

(1) In accordance with Sections 543 and 544 of Public Law 112-55 Commerce, Justice, Science, and Related Agencies Appropriations Act 2012, Title V (General Provisions) none of the funds made available by that Act may be used to enter into a contract with any corporation that-

(a) Was convicted of a felony criminal violation under any Federal law within the preceding 24 months, unless the agency has considered suspension or debarment of the corporation and made a determination that this further action is not necessary to protect the interests of the

Government.

(b) Has any unpaid Federal tax liability that has been assessed, for which all judicial and administrative remedies have been exhausted or have lapsed, and that is not being paid in a timely manner pursuant to an agreement with the authority responsible for collecting the tax liability, unless the agency has considered suspension or debarment of the corporation and made a determination that this further action is not necessary to protect the interests of the

Government.

(2) The Offeror represents that, as of the date of this offer -

(a) It is [ ] is not [ ] a corporation that was convicted of a felony criminal violation under a

Federal law within the preceding 24 months.

(b) It is [ ] is not [ ] a corporation that has any unpaid Federal tax liability that has been assessed, for which all judicial and administrative remedies have been exhausted or have lapsed, and that is not being paid in a timely manner pursuant to an agreements with the authority responsible for collecting the tax liability.

(End of provision)

Clauses

52.204-13, System for Award Management Maintenance

52.212-4, Contract Terms and Conditions—Commercial Items

52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive

Orders—Commercial Items—Commercial Items including subparagraphs:

52.204-10, Reporting Executive Compensation;

52.209-6, Protecting the Government’s Interest When Subcontracting with

Contractors Debarred, Suspended, or Proposed for Debarment;

52.219-6, Notice of Total Small Business Set-Aside;

52.219-28, Post Award Small Business Program Re-representation;

52.222-3, Convict Labor;

52.222-19, Child Labor – Cooperation With Authorities And Remedies;

52.222-21, Prohibition of Segregated Facilities;

52.222-26, Equal Opportunity;

52.22-36, Affirmative Action for Workers with Disabilities;

52.223-18, Contractor Policy to Ban Text Messaging While Driving;

52.225-1, Buy American Act – Supplies;

52.225-13, Restrictions on Certain Foreign Purchases;

52.225-25, Prohibition on Contracting with Entities Engaging in Sanctioned

Activities Relating to Iran;

52.232-33, Payment by Electronic Funds Transfer

52.247-35, FOB Destination, Within Consignee’s Premises

1352.201-70, Contracting Officer’s Authority

1352.201-72. Contracting Officer’s Representative (COR)

1352.209-73, Compliance With the Laws

1352.209-74, Organizational Conflict of Interest

1352.246-70, Place of Acceptance (APR 2010)

(a) The Contracting Officer or the duly authorized representative will accept supplies and services to be provided under this contract.

(b) The place of acceptance will be: NIST, 100 Bureau Drive, Building 215, Gaithersburg, Maryland, 20899

INSTRUCTIONS:

System for Award Management Registration

In accordance with FAR 52.204-7, the awardee must be registered in the System for Award

Management (www.sam.gov) prior to award. Refusal to register shall forfeit award.

Due Date for Quotations

Offerors shall submit their quotations so that NIST receives them not later than 3:00 p.m.

Eastern Time on August 14, 2014. FAX quotations shall not be accepted. E-mail quotations shall be accepted at paula.wilkison@nist.gov. Please reference the RFQ number in the subject line of email communications. Offerors’ quotations shall not be deemed received by the Government until the quotation is entered in the e-mail inbox set forth above.

Quotations shall be sent to the National Institute of Standards and Technology, Acquisition

Management Division, Attn: Paula Wilkison, 100 Bureau Drive, Mail Stop 1640, Gaithersburg, MD 20899-1640. All offerors should ensure the RFQ number is visible on the outermost packaging.

Because of heightened security, FED-EX, UPS, or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery shall be made on the actual http://www.sam.gov/ due date through Gate A, and a 48 hour (excluding weekends and holidays) prior notice shall be provided to Paula Wilkison, Contract Specialist on 301-975-8448.

Addendum to FAR 52.212-1, Quotation Preparation Instructions

1) Technical Quotation: The offeror shall submit an original and one copy of the technical quotation. If the quotation is submitted electronically, additional copies are not required. The technical quotation shall address the following:

Technical Capability: The offeror shall submit a technical description or product literature for the equipment it is proposing, which clearly identifies the manufacturer, make and model. The offeror must demonstrate that its proposed equipment meets or exceeds each minimum requirement described in the statement of work by providing a citation to the relevant section of its technical description or product literature.

If applicable, evidence that the Offeror is authorized by the original equipment manufacturer to provide the item(s) in the quotation should be included.

Offeror shall provide a system acceptance testing plan with the quotation which shall include at a minimum, demonstrating the specifications on the supplied standards and NIST supplied thin film and bulk samples.

2) Past Performance: The offeror shall provide past performance information regarding relevant contracts over the past five (5) years with Federal, state, or local governments, or commercial customers. If the offeror intends to subcontract with another firm(s) for part of this requirement, that firm’s past performance information shall also be provided. If the offeror has no relevant past performance, it may include a statement to that effect in its quotation. The government reserves the right to consider data obtained from sources other than those described by the offeror in its quotation. It is recommended that approximately 3-5 contracts be referenced.

The description of each contract/order described in this section shall not exceed one half page in length. For each contract/order, the offeror shall provide the following information:

1. Contract number;

2. Description and relevance to solicitation requirements including dollar value;

3. Period of Performance – indicate by month and year the state and completion (or “ongoing”) dates for the contract;

4. Reference Contact – If a non-Government contract, identify the name and address of the client with current telephone number and email address of a point of contact of the client responsible for the contract;

5. Contracting Office – If a Government contract (Federal or state), identify the Procuring Contracting Officer (PCO), administrative

Contracting Officer (ACO), and Contracting Officer’s

Representative (COR), and their names, current telephone numbers and email addresses.

6. Problems Encountered – include information regarding information regarding any problems encountered on the contracts described above and corrective actions taken to resolve those problems.

3) Price Quotation: The offeror shall submit an original and one copy of the completed price schedule. If the quotation is submitted electronically, additional copies are not required. The pricing quotation shall be separate from any other portion of the quotation. The offeror shall propose a firm-fixed-price, FOB Destination, for each CLIN. Price quotations shall remain valid for a period of 90 days from the date quotations are due.

Acceptance of Terms and Conditions (Addendum to FAR 52.212-1 (b) (11)): This is an open-market solicitation for equipment as defined herein. The Government intends to award a

Purchase Order as a result of this solicitation that will include the clauses set forth herein. The quotation should include one of the following statements:

“The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition.”

OR

“The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following:

Offeror shall list exception(s) and rationale for the exception(s)

Note: This procurement is not being conducted under the GSA Federal Supply Schedule (FSS) program or another Government-Wide Area Contract (GWAC). If an offeror submits a quotation based upon an FSS or GWAC contract, the Government will accept the quoted price.

However, the terms and conditions stated herein will be included in any resultant Purchase

Order, not the terms and conditions of the offeror’s FSS or GWAC contract, and the statement required above shall be included in the quotation.

QUOTATION EVALUATION:

Evaluation Factors

Award shall be made to the offeror whose quotation offers the best value to the Government price and other factors considered. The Government will evaluate quotations based on the following evaluation criteria: 1) Technical Capability 2) Past Performance, and 3) Price. All non-price factors, when combined, are more important than price.

1) Technical Capability: All items must be new. Prototypes, demonstration models, used or refurbished equipment will not be considered for award. Evaluation of technical capability shall be based on the information provided in the quotation. NIST will evaluate whether the offeror has demonstrated that its proposed equipment meets or exceeds all minimum requirements. Quotations that do not demonstrate the proposed equipment meets all requirements will not be considered further for award. If an offeror does not indicate whether its proposed equipment meets a certain minimum requirement, NIST will determine that it does not. NIST will give preference to offerors who demonstrate that their proposed equipment exceeds NIST’s requirements.

NIST will give stronger preference to Offerors whose quoted equipment exceeds the specific requirements listed below:

1. Measurement time; as stated in specification 2d;

2. Resistance range; as stated in specification 2b;

3. Edge exclusion; as stated in specification 2h;

4. Push button operation of calibration routine; as stated in specification 3f.

2) Past Performance: The Government will evaluate the Offeror's past performance information and, if appropriate, its proposed subcontractors' past performance to determine its relevance to the current requirement and the extent to which it demonstrates that the offeror has successfully completed relevant contracts in the past five years. In assessing the offeror's past performance information, NIST will evaluate, as appropriate, successful performance of contract requirements, quality and timeliness of delivery of goods and services, cost management, communications between contracting parties, proactive management and customer satisfaction..

Evaluation of this factor will be based on information contained in the technical portion of the quotation and information provided by references. The Government will evaluate past performance information by contacting appropriate references, including NIST references, if applicable. The Government may also consider other available information in evaluating the

Offeror’s past performance. The Government will assign a neutral rating if the offeror has no relevant past performance information.

3) Price: The Government will evaluate price for reasonableness.

1352.233-70 AGENCY PROTESTS (APR 2010)

(a) An agency protest may be filed with either (1) the Contracting Officer, or (2) at a level above the Contracting Officer, with the agency Protest Decision Authority. See 64 Fed. Reg. 16,651

(April 6, 1999).

(b) Agency protests filed with the Contracting Officer shall be sent to the following address:

NIST/ACQUISITION MANAGEMENT DIVISION

ATTN: PATRICK STAINES, CONTRACTING OFFICER

100 Bureau Drive, MS 1640

Gaithersburg, MD 20899

(c) Agency protests filed with the Protest Decision Authority shall be sent to the following address: NIST/ACQUISITION MANAGEMENT DIVISION

ATTN: HEAD OF THE CONTRACTING OFFICE (HCO)

100 Bureau Drive, MS 1640

Gaithersburg, MD 20899

(d) A complete copy of all agency protest, including all attachments, shall be served upon the

Contract Law Division of the Office of the General Counsel within one day of filing a protest with either the Contracting Officer or the Protest Decision Authority.

(e) Service upon the Contract law Division shall be made as follows:

U.S. Department of Commerce

Office of the General Counsel

Chief, Contract Law Division

Room 5893

Herbert C. Hoover Building

14th Street and Constitution Avenue, N.W.

Washington, D.C. 20230

FAX: (202) 482-5858

1352.233-71 GAO AND COURT OF FEDERAL CLAIMS PROTESTS (APR 2010)

(a) A protest may be filed with either the Government Accountability Office (GAO) or the Court of Federal Claims unless an agency protest has been filed.

(b) A complete copy of all GAO or Court of Federal Claims protests, including all attachments, shall be served upon (i) the Contracting Officer, and (ii) the Contract Law Division of the Office of the General Counsel, within one day of filing a protest with either GAO or the Court of

Federal Claims.

(c) Service upon the Contract Law Division shall be made as follows:

U.S. Department of Commerce

Office of the General Counsel

Chief, Contract Law Division

Room 5893

Herbert C. Hoover Building

14th Street and Constitution Avenue, N.W.

Washington, D.C. 20230

FAX: (202) 482-5858

(End of clause)