SATPC0035511 Tab 04 4 SOW_Redacted.pdf
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- Attached to
- Bruker DektakX Entry System Federal contract opportunity
- Solicitation number
- 80NSSC24874328Q
About this file
This document is a Statement of Work (SOW) for the NASA Glenn Research Center's (GRC) purchase of a Bruker DektakXT Entry System. The system will be used to calibrate and measure various film thicknesses of the benchtop Physical Vapor Deposition (PVD) 2023. The SOW details the system's characteristics, including a manual X/Y stage, a 4-inch sample platform, a low inertia sensor, a color camera, and a 4-angstrom step height repeatability. The system will be delivered with a 1-year warranty and include a desktop computer, monitor, and 2D stress measurement capability. The performance location is at the NASA GRC in Cleveland, Ohio, with a period of performance of 8-10 weeks after award.
The related federal contract opportunity is a sole-source procurement by the NASA Shared Services Center for the Bruker DektakXT Entry System. The procurement will be conducted under FAR Part 12 and FAR Part 13, with a NAICS code of 334516. Interested parties may submit their capabilities and qualifications by 7/3/2024 for the government's consideration of a competitive procurement.
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STATEMENT OF WORK
1. Objective/Requirements The NASA Glenn Research Center (GRC) requires the purchase of Bruker DektakXT Entry System to use to calibrate and measure various film thickness of the benchtop Physical Vapor Deposition (PVD) 2023.
2. Characteristics, Scope, and Specs
Quantity OEM Part # Product Description
1 DXTE
Bruker DektakXT Entry System
SYSTEM
The DektakXT provides unmatched performance and versatility with the industry's best repeatability (4 angstroms), unprecedented efficiency and ease of use, and incomparable value. Building upon over four decades of stylus profiler innovation, the DektakXT with its single-arch design is the step up to ultimate performance that best matches your application requirements. Powered by dual parallel processors and operating with Vision64# Operation and Analysis Software this latest Dektak product will quickly become the preferred instrument in any facility.
The DXT-E entry level system provides the fundamental capabilities needed to collect accurate step height and surface roughness measurements in a compact package.
The system includes:
- Manual X/Y stage with 4inches of travel, no rotation available
- 4inch standard sample platform
- LIS 3, low inertia sensor with 1 to 15mg of force
- 3.1Mpixel color camera with selectable magnification
- Starter stylus (choose 2um or 12.5um)
- Optically flat scan block with 55mm scan length
- 4angstrom step height repeatability, 1 sigma on 1um step All DektakXT units come with a 1-year factory warranty
DXT BASE
DXT-BASE - DEKTAKXT BASE UNIT
POWER
DXT-110V - 100/115 VAC OPERATION
Configure Power for 100/115 VAC operation Ready for operation in the United States and countries operating on 100/115 volts with standard 3-prong US outlets.
ENVIRONMENTAL ENCLOSURE
DXT-ENC - DXT ENVIRONMENTAL ENCLOSURE
COMPUTER
DXT-DESKTOP - DESKTOP COMPUTER OPERATION
64bit Desktop Computer Bruker provided Dell OptiPlex, Win10 Pro operating system, 3.2GHz processor, 4GB (1x4G) 1600MHz DDR3L Memory, 500GB hard disk drive with Vision64# Operation and Analysis Software.
*In an effort to keep up with progressing technology computer specifications are subject to change. Bruker tests all computer configurations extensively before offering to our customers.
MONITOR
DXT-CUST-MONITOR - CUSTOMER SUPPLIED COMPUTER MON
Customer Supplied Computer Monitor Customer agrees to supply a VGA compatible monitor. Supplied monitor MUST support 1920x1080 @ 60HZ resolution, include a DVI-D port, and be DisplayPort compatible
XY STAGE
DXT-MANUAL - MANUAL XY 100 X 100MM STAGE
DXT-E SAMPLE PLATTER OPTIONS
DXT-4IN BASE - 4-IN SQ BASE PLATFORM W/NO VAC
4-Inch Square Base Platform with no vacuum capability This stable platform provides 4 square inches of area to affix samples for measurement. Price is included in base system price.
DXT-E-ADAPT-KIT - ADAPTER
STARTER STYLUS
DXT-STYL-2UM-B - STYLUS, LIS 3, 2UM RAD-TYPE B
STYLUS, LIS 3, 2um RADIUS- Type B This starter stylus with 2um radii stylus tip comes free of charge with the DektakXT for immediate operation after installation. It does not include an SEM image of the tip.
APPLICATION PACKAGES
DXT-2D STRESS - 2D STRESS MEASUREMT CAPABILITY
2D Stress Measurement Capability The Vision64 2D Stress Measurement capability calculates tensil and compressive stress simultaneously. Utilizing a 5th order polynomial fit and user selectable elasticity constant the 2D stress capability achieves accurate results. It can be used in combination with Stitching capability to measure larger areas on flat wafers on the DXT-Advanced systems. Systems ordered with a wafer vacuum chuck includes chromed ball-bearings and pen magnet.
ISOLATION
DXT-CUST-TABLE - CUST PROVIDED ISOLATION PLATF
Customer Provided Isolation Platform Customer must provide an isolation platform in order to meet the DektakXT specifications (including 4angstrom repeatability).
Refer to the DektakXT Facility Specifications for guidelines and environment requirements.
1 301-113-450NM Bruker Step Height Gage
3. Place of Performance Building 100; Room 116
NASA Glenn Research Center (GRC) 21000 Brookpark Road Cleveland, OH 44135
4. Period of Performance 8 – 10 Weeks ARO
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