RFP 1333ND23RNB680014 SF1449 4-21-23.pdf

RFQ IFB RFP

WOMEN-OWNED SMALL BUSINESS

(WOSB) ELIGIBLE UNDER THE WOMEN-OWNED

SOLICITATION/CONTRACT/ORDER FOR COMMERCIAL ITEMS

OFFEROR TO COMPLETE BLOCKS 12, 17, 23, 24, & 30

1. REQUISITION NUMBER PAGE OF

2. CONTRACT NO. 3. AWARD/EFFECTIVE

DATE

4. ORDER NUMBER 5. SOLICITATION NUMBER 6. SOLICITATION ISSUE

DATE

7. FOR SOLICITATION

INFORMATION CALL:

a. NAME b. TELEPHONE NUMBER (No collect calls)

8. OFFER DUE DATE/

LOCAL TIME

9. ISSUED BY

13b. RATING

14. METHOD OF SOLICITATION

CODE

15. DELIVER TO 16. ADMINISTERED BY CODE

18a. PAYMENT WILL BE MADE BY CODEFACILITY

CODE

CODE

TELEPHONE NO.

17b. CHECK IF REMITTANCE IS DIFFERENT AND PUT SUCH ADDRESS IN

OFFER

18b. SUBMIT INVOICES TO ADDRESS SHOWN IN BLOCK 18a UNLESS BLOCK

BELOW IS CHECKED

SEE ADDENDUM

19.

ITEM NO.

20.

SCHEDULE OF SUPPLIES/SERVICES

21.

QUANTITY

22.

UNIT

23.

UNIT PRICE

24.

AMOUNT

(Use Reverse and/or Attach Additional Sheets as Necessary)

25. ACCOUNTING AND APPROPRIATION DATA 26. TOTAL AWARD AMOUNT (For Govt. Use Only)

28. CONTRACTOR IS REQUIRED TO SIGN THIS DOCUMENT AND RETURN

DELIVER ALL ITEMS SET FORTH OR OTHERWISE IDENTIFIED ABOVE AND ON ANY

ADDITIONAL SHEETS SUBJECT TO THE TERMS AND CONDITIONS SPECIFIED

29. AWARD OF CONTRACT: REF.

DATED . YOUR OFFER ON SOLICITATION

(BLOCK 5), INCLUDING ANY ADDITIONS OR CHANGES WHICH ARE

SET FORTH HEREIN, IS ACCEPTED AS TO ITEMS:

30a. SIGNATURE OF OFFEROR/CONTRACTOR

30b. NAME AND TITLE OF SIGNER (Type or print) 30c. DATE SIGNED

31a. UNITED STATES OF AMERICA (SIGNATURE OF CONTRACTING OFFICER)

31b. NAME OF CONTRACTING OFFICER (Type or print) 31c. DATE SIGNED

AUTHORIZED FOR LOCAL REPRODUCTION

PREVIOUS EDITION IS NOT USABLE

STANDARD FORM 1449 (REV. 2/2012)

Prescribed by GSA - FAR (48 CFR) 53.212

COPIES TO ISSUING OFFICE. CONTRACTOR AGREES TO FURNISH AND

OFFER

13a. THIS CONTRACT IS A

RATED ORDER UNDER

DPAS (15 CFR 700)

11. DELIVERY FOR FOB DESTINA-

TION UNLESS BLOCK IS

MARKED

SEE SCHEDULE

12. DISCOUNT TERMS

ARE ARE NOT ATTACHED

ARE ARE NOT ATTACHED

27a. SOLICITATION INCORPORATES BY REFERENCE FAR 52.212-1, 52.212-4. FAR 52.212-3 AND 52.212-5 ARE ATTACHED. ADDENDA

27b. CONTRACT/PURCHASE ORDER INCORPORATES BY REFERENCE FAR 52.212-4. FAR 52.212-5 IS ATTACHED. ADDENDA

17a CONTRACTOR/

OFFEROR.

CODE

8 (A)

SIZE STANDARD:

NAICS:

% FOR:SET ASIDE:UNRESTRICTED OR

SERVICE-DISABLED

VETERAN-OWNED

SMALL BUSINESS

HUBZONE SMALL

BUSINESS

SMALL BUSINESS

10. THIS ACQUISITION IS

EDWOSB

SMALL BUSINESS PROGRAM

APRIL 21, 2023

STANDARD FORM 1449 (REV. 2/2012) BACK

19.

ITEM NO.

20.

SCHEDULE OF SUPPLIES/SERVICES

21.

QUANTITY

22.

UNIT

23.

UNIT PRICE

24.

AMOUNT

32a. QUANTITY IN COLUMN 21 HAS BEEN

RECEIVED INSPECTED ACCEPTED, AND CONFORMS TO THE CONTRACT, EXCEPT AS NOTED:

41a. I CERTIFY THIS ACCOUNT IS CORRECT AND PROPER FOR PAYMENT

32b. SIGNATURE OF AUTHORIZED GOVERNMENT

REPRESENTATIVE

32c. DATE

41b. SIGNATURE AND TITLE OF CERTIFYING OFFICER 41c. DATE

42a. RECEIVED BY (Print)

42b. RECEIVED AT (Location)

42c. DATE REC'D (YY/MM/DD) 42d. TOTAL CONTAINERS

40. PAID BY

32d. PRINTED NAME AND TITLE OF AUTHORIZED GOVERNMENT

REPRESENTATIVE

32e. MAILING ADDRESS OF AUTHORIZED GOVERNMENT REPRESENTATIVE 32f. TELPHONE NUMBER OF AUTHORZED GOVERNMENT REPRESENTATIVE

32g. E-MAIL OF AUTHORIZED GOVERNMENT REPRESENTATIVE

33. SHIP NUMBER 34. VOUCHER NUMBER 35. AMOUNT VERIFIED

CORRECT FOR

PARTIAL FINAL

37. CHECK NUMBER

38. S/R ACCOUNT NO. 39. S/R VOUCHER NUMBER

36. PAYMENT

COMPLETE PARTIAL FINAL

SCHEDULE Continued

ITEM NO. SUPPLIES/SERVICES QUANTITY UNIT UNIT PRICE AMOUNT

0001 Analytical Scanning/Transmission Electron Microscope

(STEM) in accordance with (IAW) the Statement of Work (SOW) to include initial year warranty that begins upon STEM acceptance.

Period of Performance: 08/01/2023 to 07/31/2026

1.00 EA

0002 Safety Features and Documentation IAW the SOW

Period of Performance: 02/01/2025 to 08/01/2025

0003 Site Preparation IAW the SOW

Period of Performance: 08/01/2025 to 10/31/2025

0004 Training with On-site Application Engineers IAW the

SOW

Period of Performance: 02/06/2025 to 08/31/2025

0005 Documentation, Guides, Manuals IAW the SOW

Period of Performance: 08/06/2025 to 08/31/2025

0006 Service Contract (4 years) for STEM IAW SOW to begin after expiration of initial year warranty.

Period of Performance: 08/01/2025 to 07/31/2029

4.00 YR

OPT

0007 OPTION ITEM: Additional Beam Energy Alignment IAW the SOW

Period of Performance: 02/01/2025 to 08/01/2025

1.00 EA

OPT

0008 OPTION ITEM: Objective Aperture IAW the SOW

0009 OPTION ITEM: Segmented Sensors IAW the SOW

0010 OPTION ITEM: Euclid GHz Beam Pulser IAW the SOW

0011 OPTION ITEM: Lorentz Microscopy IAW the SOW

OPT

0012 OPTION ITEM: Precession Electron Diffraction Capability

IAW the SOW

Period of Performance: 02/01/2025 to 08/01/2025

1.00 EA

OPT

0013 OPTION ITEM: TEM Specimen Holder - Double-tilt Low

Background IAW the SOW

Period of Performance: 02/01/2025 to 08/01/2025

1.00 EA

OPT

0014 OPTION ITEM: TEM Specimen Holder - Double-tilt with

Faraday cup IAW the SOW

PAGE 3 OF 72 1333ND23RNB680014

0015 OPTION ITEM: Tomography TEM Specimen Holder IAW the SOW

Period of Performance: 02/01/2025 to 08/01/2025

1.00 EA

OPT

0016 OPTION ITEM: High-Tilt Tomography TEM Specimen

Holder IAW the SOW

Period of Performance: 02/01/2025 to 08/01/2025

1.00 EA

OPT

0017 OPTION ITEM: Double-tilt Rotate TEM Specimen Holder

IAW the SOW

Period of Performance: 02/01/2025 to 08/01/2025

1.00 EA

OPT

0018 OPTION ITEM: Single-tilt Cryo-transfer TEM Specimen

Holder IAW the SOW

Period of Performance: 02/01/2025 to 08/01/2025

1.00 EA

OPT

0019 OPTION ITEM: Single-tilt Cooling TEM Specimen Holder

IAW the SOW

Period of Performance: 02/01/2025 to 08/01/2025

1.00 EA

OPT

0020 OPTION ITEM: Double-tilt Cooling TEM Specimen

Holder IAW the SOW

Period of Performance: 02/01/2025 to 08/01/2025

1.00 EA

OPT

0021 OPTION ITEM: MEMS-based Double-tilt Heating TEM

Specimen Holder IAW the SOW

Period of Performance: 02/01/2025 to 08/01/2025

1.00 EA

OPT

0022 OPTION ITEM: Double-tilt Heating TEM Specimen

Holder IAW the SOW

Period of Performance: 02/01/2025 to 08/01/2025

1.00 EA

OPT

0023 OPTION ITEM: Single-tilt Biasing TEM Specimen Holder

IAW the SOW

Period of Performance: 02/01/2025 to 08/01/2025

1.00 EA

0024 OPTION ITEM: Blanking Plug IAW the SOW

OPT

0025 OPTION ITEM: High Speed Pre-filter Camera 2: High-speed Monolithic Active Pixel Camera IAW the SOW

Period of Performance: 02/01/2025 to 08/01/2025

1.00 EA

OPT

PAGE 4 OF 72 1333ND23RNB680014

OPTION ITEM: High Speed Pre-filter Camera 2: High-speed TimePix-based Hybrid Pixel Detector IAW the

SOW

Period of Performance: 02/01/2025 to 08/01/2025

1.00 EA

0027 OPTION ITEM: 4D-STEM System IAW the SOW

OPT

0028 OPTION ITEM: Tomography Capability - Software

Functionality IAW the SOW

Period of Performance: 02/01/2025 to 08/01/2025

1.00 EA

OPT

0029 OPTION ITEM: Electron Counting Camera for Electron

Energy Filter IAW the SOW

Period of Performance: 02/01/2025 to 08/01/2025

1.00 EA

0030 OPTION ITEM: Additional Training IAW the SOW

0031 OPTION ITEM: Trade-In of existing STEM IAW the SOW

Period of Performance: 08/01/2023 to 07/31/2025

PAGE 5 OF 72 1333ND23RNB680014

Table of Contents

STATEMENT OF WORK

SOLICITATION AND CONTRACT CLAUSES

52.204-13SYSTEM FOR AWARD MANAGEMENT MAINTENANCE (OCT 2018)

52.204-18COMMERCIAL AND GOVERNMENT ENTITY CODE MAINTENANCE (AUG 2020)

52.204-19 INCORPORATION BY REFERENCE OF REPRESENTATIONS AND CERTIFICATIONS (DEC 2014)

52.209-9 UPDATES OF PUBLICLY AVAILABLE INFORMATION REGARDING RESPONSIBILITY MATTERS (OCT 2018)

52.212-4CONTRACT TERMS AND CONDITIONS--COMMERCIAL PRODUCTS AND COMMERCIAL SERVICES (DEC 2022)

52.217-5 EVALUATION OF OPTIONS (JUL 1990)

52.232-39 UNENFORCEABILITY OF UNAUTHORIZED OBLIGATIONS (JUNE 2013)

52.247-35 F.O.B. DESTINATION, WITHIN CONSIGNEE`s PREMISES (APR 1984)

1352.201-70 CONTRACTING OFFICER?s AUTHORITY (APR 2010)

1352.201-72 CONTRACTING OFFICER`S REPRESENTATIVE (COR) (APR 2010)

1352.209-73 COMPLIANCE WITH THE LAWS (APR 2010)

1352.209-74 ORGANIZATIONAL CONFLICT OF INTEREST (APR 2010)

52.212-5CONTRACT TERMS AND CONDITIONS REQUIRED TO IMPLEMENT STATUTES OR EXECUTIVE ORDERS--COMMERCIAL

PRODUCTS AND COMMERCIAL SERVICES (MAR 2023)

52.217-7 OPTION FOR INCREASED QUANTITY--SEPARATELY PRICED LINE ITEM (MAR 1989)

52.252-2 CLAUSES INCORPORATED BY REFERENCE (FEB 1998)

1352.233-70 AGENCY PROTESTS (APR 2010)

1352.233-71 GAO AND COURT OF FEDERAL CLAIMS PROTESTS (APR 2010)

1352.246-70 PLACE OF ACCEPTANCE (APR 2010)

NIST LOCAL-53CONTRACT PERFORMANCE DURING CHANGES IN NIST OPERATING STATUS

NIST LOCAL-54ELECTRONIC BILLING INSTRUCTIONS

NIST LOCAL-56INVOICING PROCESSING PLATFORM-ALTERNATE I (DEC 2022)

SOLICITATION PROVISIONS

52.203-18 PROHIBITION ON CONTRACTING WITH ENTITIES THAT REQUIRE CERTAIN INTERNAL CONFIDENTIALITY

AGREEMENTS OR STATEMENTS--REPRESENTATION (JAN 2017)

52.204-7 SYSTEM FOR AWARD MANAGEMENT (OCT 2018)

52.204-16COMMERCIAL AND GOVERNMENT ENTITY CODE REPORTING (AUG 2020)

52.204-20PREDECESSOR OF OFFEROR (AUG 2020)

52.204-24REPRESENTATION REGARDING CERTAIN TELECOMMUNICATIONS AND VIDEO SURVEILLANCE SERVICES OR EQUIPMENT

(NOV 2021)

52.212-1INSTRUCTIONS TO OFFERORS--COMMERCIAL PRODUCTS AND COMMERCIAL SERVICES (MAR 2023)

52.212-2EVALUATION--COMMERCIAL PRODUCTS AND COMMERCIAL SERVICES (NOV 2021)

52.212-3OFFEROR REPRESENTATIONS AND CERTIFICATIONS--COMMERCIAL PRODUCTS AND COMMERCIAL SERVICES (DEC

2022)

52.225-25PROHIBITION ON CONTRACTING WITH ENTITIES ENGAGING IN CERTAIN ACTIVITIES OR TRANSACTIONS RELATING

TO IRAN--REPRESENTATION AND CERTIFICATIONS (JUN 2020)

52.204-17OWNERSHIP OR CONTROL OF OFFEROR (AUG 2020)

52.204-26COVERED TELECOMMUNICATIONS EQUIPMENT OR SERVICES--REPRESENTATION (OCT 2020)

52.209-2 PROHIBITION ON CONTRACTING WITH INVERTED DOMESTIC CORPORATIONS-REPRESENTATION (NOV 2015)... 62

52.209-5CERTIFICATION REGARDING RESPONSIBILITY MATTERS (AUG 2020)

52.209-7 INFORMATION REGARDING RESPONSIBILITY MATTERS (OCT 2018)

52.209-11 REPRESENTATION BY CORPORATIONS REGARDING DELINQUENT TAX LIABILITY OR A FELONY CONVICTION UNDER

ANY FEDERAL LAW (FEB 2016)

52.225-6TRADE AGREEMENTS CERTIFICATE (FEB 2021)

52.225-18 PLACE OF MANUFACTURE (AUG 2018)

52.252-1 SOLICITATION PROVISIONS INCORPORATED BY REFERENCE (FEB 1998)

ADDENDUM to 52.212-1 INSTRUCTION TO OFFERORS

ADDENDUM to FAR 52.212-2 EVALUATION CRITERIA

PAGE 6 OF 72 1333ND23RNB680014

CLAUSES

STATEMENT OF WORK

PAGE 7 OF 72 1333ND23RNB680014

STATEMENT OF WORK/REQUIREMENTS DOCUMENT

Title: Analytical Scanning/Transmission Electron Microscope Requesting Lab: CHIPS R&D Program

I. BACKGROUND INFORMATION

In support of the CHIPS Act, the National Institute of Standards and Technology (NIST) is acquiring nano fabrication and nano characterization equipment that will address the major metrology research and development grand challenges for the reliable production of next-generation microelectronic devices.

The NIST Center for Nanoscale Science and Technology NanoFab User Facility intends to procure an analytical scanning/transmission electron microscope (S/TEM).

Purpose/Objective: The NIST NanoFab User Facility intends to procure an analytical scanning/transmission electron microscope to replace their current microscope, which is over 12 years old. The microscope will be sited and used as a shared resource in the CNST NanoFab user facility, which is accessible to researchers from industry, academia, NIST, and other government agencies. The CNST NanoFab User Facility enables science and industry by providing essential measurement methods, instrumentation, and standards to support all phases of nanotechnology development from discovery to production. The analytical S/TEM is an essential tool in the NanoFab, and there is an increasing demand for a S/TEM with updated capabilities.

The NIST CNST NanoFab User Facility is updating electron microscopy instrumentation as part of the CHIPS and Science Act of 2022. As part of this work, NIST is seeking to purchase an aberration-corrected analytical scanning/transmission electron microscope (S/TEM). The microscope shall be designed to provide an optimum combination of capabilities for high spatial resolution imaging, spectroscopy, and microanalysis. The core capabilities required for this microscope are atomic-resolution STEM imaging and atomic-resolution EDX and EELS mapping. In addition to the STEM mode capabilities, high-resolution phase contrast TEM imaging and energy-filtered imaging are also required.

Multiple diffraction modes of analysis shall also be provided. These include selected-area and convergent beam diffraction for TEM mode analysis, as well as microbeam and nanobeam diffraction for spatially resolved analysis in STEM mode. Since the microscope will be in a shared use facility, reliability and ease of use are very important.

In addition, several areas of our research would benefit from stroboscopic time-resolved capabilities made possible by the addition of a tunable, gigahertz frequency beam modulator. The addition of this hardware is currently under test, but its inclusion would be highly beneficial if it can be achieved without significant degradation of the core capabilities listed above.

PAGE 8 OF 72 1333ND23RNB680014

Optionally, there are several other capabilities that we would like to include if they are available and within budget. These optional items include additional and/or upgraded cameras, electron tomography, 4D-STEM, and precession electron diffraction.

Data and Operation Expectations

In the statements below, the word “instrument” may refer to the primary microscope, a camera, a detector, a spectrometer, or a specimen holder. The specific instance of the instrument where these data expectations are applicable are stated with those sections within the Statement of Work.

1. All data and metadata produced by the instrument are required to be saved in a format that is readable using non-proprietary (“open”) software (e.g., HDF5, TIFF, etc.). If this is not feasible, detailed specifications of proprietary formats shall be provided without restriction such that file readers may be implemented by NIST and shared publicly. Data may simultaneously be saved in a “closed” native instrument format if required for instrument operation, but the software shall allow automatic export into an open format as previously described.

2. The instrument contractor shall provide application program interface(s) (API) for the control and query of instrument functionalities consistent with expert- and custodian-level access. Note, experts and custodians typically control and query the instrument, whether in-person or remotely, through a combination of hand-panels, displays, graphical user interfaces (GUIs), and disc/network read/write/execute operations. API shall grant all input and output operations described above.

3. The instrument shall be fully remote operable (using both with hardware hand-panels, and software) from Boulder, CO/ Gaithersburg, MD. The exception to remote operation is where specimen and cryogen shall be exchanged or administered or advanced in situ and in-operando specimen holders where the performance cannot be guaranteed without a live operator.

4. (Optional – for the purpose futureproofing) Instrument company shall provide a documented analysis which determines if instrument specific software and hardware interface devices are functional using virtual machine technology. The virtual machine environment and infrastructure shall be compatible with a commonly available commercial product (e.g., VMWare). This analysis shall be performed on all human interface devices specific to the instrument. The results of the analysis shall be presented to the technical point of contact (TPOC). This analysis shall include testing of the hardware and software functionality on a virtual machine. If it is determined that the instrument software and instrument specific human interfaces are compatible and function within a virtual machine environment a separate line item for purchasing this functionality shall be provided. The instrument company shall provide a quote for support of this functionality for a minimum of 5 year after instrument is operational.

PAGE 9 OF 72 1333ND23RNB680014

Definition of Acronyms

4D-STEM – four-dimensional scanning transmission electron microscopy

ABF – annular bright field

API – application programming interface

BF – bright-field

BSE – backscattered electron

CBED – convergent-beam electron diffraction

DF – dark-field

DPC – differential phase contrast

DT – double-tilt

EDX – energy dispersive x-ray analysis

EELS – electron energy loss spectroscopy

EFTEM – energy-filtered transmission electron microscopy

FPS – frames per second

FWHM – full-width half-maximum

GUI – graphical user interface

HAADF – high-angle annular dark field

HREM – high-resolution electron microscopy

HT – high tension

IL – intermediate lens

NBD – nanobeam diffraction

OL – objective lens

PAGE 10 OF 72 1333ND23RNB680014

SE – secondary electron

SAED – selected area electron diffraction

SSD – Solid State Drive

ST – single-tilt

STEM – scanning transmission electron microscope (microscopy)

S/TEM – scanning/transmission electron microscope

TEM – transmission electron microscope (microscopy)

UPS – uninterruptable power supply

ZLP – zero-loss peak

II. SCOPE

The Contractor shall deliver a quantity of one (1) analytical scanning/transmission electron microscope (S/TEM), inclusive of FOB Destination delivery, installation, warranty and training, and option line items, if exercised at award.

III. MINIMUM REQUIREMENTS

The S/TEM system and all third-party components shall meet or exceed the minimum requirements identified below. Preference will be given to systems that exceed the minimum requirements. The microscope system and all third-party components of the microscope shall be new, commercially available products. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components not authorized for sale in the U.S. is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001: Analytical Scanning/Transmission Electron Microscope (S/TEM) Descr iption:

Quantity: 1

A. Technical Specifications

1. Electron Gun

1.1. Source

1.1.1.The gun shall have a cold field emission source (CFEG source).

PAGE 11 OF 72 1333ND23RNB680014

1.1.2.Flashing the source

1.1.2.1. The CFEG flash routine shall be controlled by automation software.

1.1.2.2. The emission current of the CFEG shall exhibit very high stability. The current decrease over a period of 2 hours shall be less than 10 %. Stronger consideration will be given to CFEGs that show a 10 % decrease over longer periods of time.

1.1.2.3. Flashing the source shall result in no measurable loss of resolution.

1.1.2.4. The source exchange time shall not exceed 2 weeks, including TEM and STEM alignment at all operating voltages specified in the original installation. Shorter source exchange times are preferred.

1.1.3.The contractor shall provide calculated or measured source brightness value.

1.2. Beam Current

1.2.1.The gun shall be sufficiently bright to maximize current in a very small STEM probe.

1.2.2.At an operating voltage of 300 kV, the spatial resolution of a probe containing 100 pA of current shall be ≤ 60 pm or better.

1.2.3.At an operating voltage of 300 kV, the spatial resolution of a probe containing 1 nA of current shall be ≤ 80 pm or better.

1.2.4.The probe current for specification 1.2.2 and 1.2.3 shall be verified using a Faraday cup.

1.3. Gun Energy Spread

1.3.1.The energy spread shall be sufficiently small to permit electron energy loss spectroscopy with an energy resolution of less than 0.4 eV full-width half-maximum (FWHM) at all voltages up to the maximum operating voltage. Smaller values of the energy spread are preferred.

1.4. Accelerating Voltage

1.4.1.The accelerating voltage shall be variable at least between 60 kV and 300 kV.

1.4.2.The microscope shall be aligned at the following accelerating voltages during installation and after all source changes: 80 kV, 200 kV, and 300 kV.

1.4.3.Within 10 minutes after changing the accelerating voltage, the microscope shall be fully functional, including meeting the spatial resolution and energy resolution specifications for that given voltage.

PAGE 12 OF 72 1333ND23RNB680014

1.4.4.The operation of the high voltage shall be under computer control, providing automatic control of the startup and operation of the source, including flashing, ramping of the primary voltage, HT conditioning, and the setting of appropriate extraction voltages.

2. Electron Optics

2.1. Illumination system

2.1.1.The microscope illumination system shall be of the three-condenser lens variety to allow the microscope to collect diffraction patterns in nanobeam (convergent probe) as well as microbeam (parallel probe) modes. Both modes shall allow for scanning of the beam in order to collect spatially resolved diffraction data.

2.1.2.The illumination system shall allow for control of the probe convergence angle.

2.1.2.1. For microbeam mode, the convergence angle shall range from a minimum of 0.02 mrad to at least 2 mrad at the sample plane.

2.1.2.2. In nanobeam mode, the convergence angle shall range from a minimum of 1 mrad to at least the maximum angle of aberration free imaging afforded by the probe corrector.

2.1.3.The illumination system shall allow for precession of the electron probe where the beam is tilted off axis and rotated azimuthally resulting in hollow cone illumination. The operator shall be able to define the beam tilt and rate of azimuthal rotation in the microscope control software. The beam tilt shall enable tilting of the beam from 0 degrees to at least 2.0 degree.

2.1.4.Condenser Stigmator Details and Performance Required: An electronic stigmator shall be supplied for the condenser lens system. This stigmators shall have provision for electrostatic alignment with the optical axis to minimize image shift during astigmatism correction.

2.2. Condenser Aper tures

2.2.1.Apertures shall be included for all three condenser lenses.

2.2.2.All condenser apertures shall be motorized and controllable through the microscope software.

2.2.3.Aperture position recall shall be included.

2.2.4.First condenser lens: at least three apertures shall be provided with the smallest being less than or equal to 70 µm in diameter.

PAGE 13 OF 72 1333ND23RNB680014

2.2.5.Second condenser lens: at least 5 apertures shall be provided. The smallest shall be 10 µm or less in diameter. The largest shall be 150 µm or greater in diameter.

2.2.6.Third condenser lens: at least 5 apertures shall be provided. The smallest shall be 10 µm or less in diameter. The largest shall be 150 µm or greater in diameter.

2.3. STEM Capabilities

2.3.1.STEM beam drift during regular microscope operation, after changing electron optical parameters (e.g., spot size, convergence angle, etc.), and after switching microscope modes (e.g., from TEM to STEM modes) shall be 0.5 nm/min or less. Stronger consideration will be given to smaller values.

2.3.2.STEM spatial resolution:

2.3.2.1. With a probe containing at least 100 pA of current, the STEM spatial resolution at 300 keV shall be guaranteed at 50 pm or better.

2.3.2.2. With a probe containing at least 100 pA of current, the STEM spatial resolution at 200 keV shall be guaranteed at 60 pm or better.

2.3.2.3. With a probe containing at least 100 pA of current, the STEM spatial resolution at 80 keV shall be guaranteed at 96 pm or better.

2.3.3.The STEM scan system shall provide for custom-sized image acquisition that are square or rectangular in shape.

2.3.4.The STEM scan system shall allow for collection of images that are 4k x 4k pixels in size or larger.

2.3.5.The STEM scan system shall allow for collection of images that are 64 x 64 pixels in size or smaller.

2.3.6.The STEM scan system shall be capable of collecting images with a per pixel dwell time of 50 nanoseconds or lower.

2.3.7.The STEM scan system shall have an externally accessible pixel or line clock signal that can be used for synchronizing data readout of third-party detectors.

2.4. Aberration Corrector

2.4.1.The microscope shall include an aberration corrector on the probe-forming side (STEM mode) that is capable of fully correcting all aberrations up to the sixth-order astigmatism (A5).

PAGE 14 OF 72 1333ND23RNB680014

2.4.2.The Contractor shall describe in detail the aberration corrector system to be incorporated into the microscope. This shall include the type of corrector proposed, manufacturer of the aberration corrector, and the general electron-optical design of the corrector (provide references from the literature, if available).

2.4.3.Alignment of the corrector shall be available in fully automated and semi-automated modes at all specified HT. Automated alignment shall result in the correction of all aberrations from first to fourth order.

2.5. Scan Tilt Correction

2.5.1.The microscope shall include a capability to correct for scan-induced tilt of the illumination such that the image of the back focal plane does not shift during scanning.

2.5.2.A method for precisely tuning this tilt correction shall be provided.

2.5.3.The correction shall be able to be activated/deactivated via the microscope control software.

2.6. Objective Lens/Projection System

2.6.1.The information limit for imaging in TEM mode will be 100 pm or better.

2.6.2.The spherical aberration coefficient (Cs) and chromatic aberration coefficient (Cc) of the uncorrected objective lens shall both be at most 1.2 mm.

2.6.3.OL pole piece gap shall be wide enough to allow the use of commercially available liquid-cell holders.

2.6.4.OL and IL Stigmator Details and Performance Required: Electronic stigmators shall be supplied for both the OL and IL. These stigmators shall have provision for electrostatic alignment with the optical axis to minimize image shift during astigmatism correction.

2.6.5.Objective apertures: at least 6 apertures of different sizes shall be provided. The smallest shall be 10 µm in diameter or smaller. Objective apertures in the back focal plane of the OL for optimized TEM bright- and dark-field application work.

2.6.6.Selected-area Diffraction apertures: at least 3 apertures of different sizes shall be provided.

2.6.7.The rotation imparted by switching between imaging and diffraction modes shall be corrected so that the rotation between image and diffraction pattern shall be less than ±2° over all ranges of magnification and camera lengths.

2.6.8.Rotation correction: the microscope shall provide for rotation correction at all magnifications such that the orientation of the image does not vary over the entire magnification range.

PAGE 15 OF 72 1333ND23RNB680014

2.6.9.TEM mode magnification: the available magnifications shall at least span the range of 50X to

1.5MX.

2.6.10.Magnification calibration will be performed for both TEM and STEM modes using the provided software and can be translated equivalently to all cameras.

2.6.11.Shutter requirements: the microscope shall be equipped with a pre-specimen and a post-specimen shutter.

3. Goniometer and Specimen Stage

3.1. The microscope shall have a side-entry, computerized stage using Piezo technology to control x, y, z, alpha, and beta movements.

3.2. Translation and tilt ranges

3.2.1.Translation shall be at least ±1 mm from the center of the specimen in both X and Y directions and at least ± 0.2 mm in Z direction.

3.2.2.The system shall accommodate ±30 deg tilt around two orthogonal axes over the central region of the sample with a factory double-tilt holder. Biaxial tilts beyond ± 30 deg will be given additional consideration.

3.2.3.The system shall accommodate ±30 deg tilt around the axes of tilt for the factory single-tilt holder.

3.3. Stage drift

3.3.1.The stage shall not drift more than 0.5 nm/min, 30 minutes after specimen exchange.

3.3.2.The stage shall not drift more than 0.1 nm/min, 1 minutes after macroscopic stage movement (i.e., large movements at low-mag mode).

3.3.3.Drift shall not be detectable 1 minute after fine stage movements (e.g., above 100 kX).

3.3.4.Stronger consideration will be given to stages with lower drift rates.

3.4. Stage position indication and position reproducibility

3.4.1.The stage position shall be indicated with a precision of 0.1 μm and 0.1 degree.

3.4.2.The absolute stage position shall be reproducible within 1 μm after specimen re-insertion with a factory holder.

3.5. The microscope shall have a piezo stage with computerized axes:

PAGE 16 OF 72 1333ND23RNB680014

3.5.1. Allows for accurate recall of stored positions.

3.5.2. Precision of step size of 20 pm in x- and y-directions.

3.5.3.The range of the piezo stage shall be at least 1.0 micrometer in both the x- and y-directions.

3.5.4.The Contractor shall describe in detail the capabilities of the piezo stage motion and range.

4. Specimen Holders: The Contractor shall provide the following TEM specimen holders:

4.1. Single-tilt low background holder compatible with EDX measurements.

4.2. Double-tilt (DT) low background holder, optimized for maximum signal from the EDX detector configuration.

4.3. Specimen rod holders/stands shall be provided with each holder.

4.4. Controllers shall be included with the holders as required by the holder operation.

4.5. Where applicable, logs of all run-time metadata that is already being monitored by the Contractor, when called upon through the GUI or the API (Data and Operation Expectation Statement 2), shall be produced automatically, or for the duration and periodicity specified by the users in accordance with Data and Operation Expectation Statement 1.

4.6. Holders with remote operation capability will be given priority (Data Statement 3).

4.7. Where applicable, metadata containing device operating parameters (e.g., input current to controller) shall be provided for each image acquired.

5. Pre- Electron Energy Loss Filter Cameras

5.1. No prototypes, demonstration models, used or refurbished instruments will be considered for any of the camera systems.

5.2. For all pre-filter cameras, including optional cameras:

5.2.1.Where applicable, logs of all run-time metadata (e.g., sensor temperature) that is already being monitored by the Contractor, when called upon through the GUI or the API (Data and Operation Expectation Statement 2), shall be produced automatically, or for the duration and periodicity specified by the users in accordance with Data and Operation Expectation Statement 1.

5.2.2.Where applicable, metadata containing device operating parameters, imaging and column conditions at the time of acquisition shall be provided for each image acquired.

5.2.3.Camera(s) with remote operation capability will be given priority (Data Statement 3).

PAGE 17 OF 72 1333ND23RNB680014

5.3. Large field-of-view camera system – Camera 1

5.3.1.The camera shall have a CMOS sensor.

5.3.2.The camera shall be compatible with the full operating voltage range of the TEM, at least from 60 kV to 300kV.

5.3.3.The camera shall be capable of imaging the very intense beam at the maximum probe current used during alignments and locating the specimen without damage to the camera sensor (virtually indestructible camera - fit for a multiuser environment).

5.3.4.The camera shall allow for the acquisition of selected-area electron diffraction patterns.

5.3.5.The camera shall be compatible with automated alignment of the probe corrector.

5.3.6.The camera shall be mounted on axis at the bottom of the microscope column, above the post-column electron energy filter.

5.3.7.The retraction mechanism shall ensure no loss of electrons entering the post-column electron energy filter described in item 8.

5.3.8.The camera shall be interlocked to avoid the possibility of collision with any other camera mounted opposite this camera.

5.3.9.The pixel array size shall be at least 4096 x 4096.

5.3.10. The pixels size shall be 14 µm or larger.

5.3.11. The camera shall have high sensitivity for electron counting in both imaging and diffraction modes.

5.3.12. The DQE at half the Nyquist frequency in full 4k x 4k imaging mode shall be greater than 9%.

5.3.13. The dynamic range small be at least 16 bits and shall scale with exposure time.

5.3.14. The full frame readout rate shall be at least 25 frames per second

5.3.15. The reduced frame readout rate shall be at least 300 fps at 512 x 512 resolution.

5.3.16. The camera shall have the ability to acquire both single images and movies.

5.3.17. The camera shall have a buffering capability to record at least 10 seconds of data prior to the onset of data acquisition, especially in movie mode, so that the onset of fast occurring reactions can be recorded.

5.3.18. The camera system shall have a rolling shutter design to give a duty cycle of 100% for movie acquisition.

5.3.19. Data storage capability shall be at least 10TB with storage expansion capability, to enable acquisition of long duration movies at full 4k x 4k readout.

5.3.20. Acquisition software and hardware should be included with the camera.

5.3.21. The software for this camera system shall have the following specifications:

5.3.21.1. Acquisition mode can be specified in the software to select for the single image or movie mode.

5.3.21.2. Live drift correction in all image modes, including at full 4k x 4k resolution.

5.3.21.3. The software controlling this camera shall produce live FFTs of the image.

5.3.21.4. Ability to hardware bin the image at least 2x, 4x, and 8x, in addition to the full 1x binning.

PAGE 18 OF 72 1333ND23RNB680014

5.3.21.5. Feature tracking during acquisition of in situ data sets to correct for drift or other movement of the feature.

5.3.21.6. Ability to digitally rotate the image live during acquisitions.

5.3.21.7. The post-processing capabilities shall include.

5.3.21.7.1. Ability to align and average frames.

5.3.21.7.2. Ability to crop a segment in time out of the data set or movie.

5.3.21.7.3. Ability to generate a new data set from the original data set in the original data file format for file size reduction.

5.3.21.7.4. Ability to add scale markers and time stamps to all frames of a movie.

6. STEM Detectors

6.1. The STEM detector shall be retractable. Please describe the retraction mechanism.

6.2. The STEM detector shall provide sensors for STEM imaging at the specified operating voltages, at least 60 kV to 300 kV.

6.3. The STEM imaging mode shall include but is not limited to the high-angle annular dark field

(HAADF), dark field (DF), bright field (BF), annular bright field (ABF), and differential phase contrast

(DPC).

6.4. The detector location and post-specimen lens configurations shall allow for the collection of HAADF images where the inner angle of collection is at least 100 mrads.

6.5. The STEM detector shall have full software support to offer a real-time STEM image of each imaging mode and the respective configuration to set up the segments in a graphical user interface (GUI).

6.6. The STEM detector geometry shall be optimized to perform HAADF imaging whilst maximizing the collection efficiency for electron energy loss spectroscopy (EELS) data.

6.7. STEM detector system shall allow simultaneous acquisition/readout from all STEM detectors.

6.8. Software package for analysis of DPC images from segmented detectors.

6.9. Where applicable, logs of all run-time metadata that is already being monitored by the Contractor, when called upon through the GUI or the API (Data and Operation Expectation Statement 2), shall be produced automatically, or for the duration and periodicity specified by the users in accordance with Data and Operation Expectation Statement 1.

6.10. Where applicable, metadata containing device operating parameters, imaging and column conditions at the time of acquisition shall be provided for each image acquired.

6.11. Detectors(s) with remote operation capability will be given priority (Data Statement 3).

7. Energy Dispersive X-ray Spectroscopy

7.1. Performance

7.1.1. The EDX detector hardware shall comprise retractable, windowless silicon drift detector or detectors.

PAGE 19 OF 72 1333ND23RNB680014

7.1.2. The instrument shall show an energy resolution of 130 eV or better as measured by the full-width half-maximum of the Mn Ka X-ray line.

7.1.3. The combined solid angle of collection for the X-ray detector(s) shall be greater than 2.0 steradians. The solid angle of collection shall be achieved without shadowing by the specimen holder in the case of at least one of the standard holders provided. High solid angles of collection are a very high priority and stronger consideration will be given to larger values of collection angle.

7.1.4. Drift correction routines for line scans and image mapping shall be included. For image mapping, at least one of two following modes of drift correction shall be available.

7.1.4.1. Drift correction method 1: EDX maps will be acquired in a single pass of the beam.

Drift will be measured at regular intervals during the data acquisition by comparison of reference images collected from an area of the specimen that is different from the acquisition area.

7.1.4.2. Drift correction method 2: EDX maps will be acquired in multiple passes of the beam.

Drift shall be continuously measured after each frame and corrected by analyzing the image signal directly from the area of analysis.

7.1.5.The EDX system shall be capable of collecting atomically-resolved elemental maps with a spatial resolution of 1 nm or better. Priority will be given to higher EDX spatial resolution.

7.2. Channels Required

7.2.1. The spectrometer shall provide at least 2048 energy channels.

7.2.2. The energy per channel of the collected spectra shall be controlled by the user, and values of 5 eV/channel, 10 eV/channel, and 20 eV/channel shall be available.

7.3. Hardware-Software Integration

7.3.1. The analytical hardware and software shall be integrated with the operating software of the microscope.

7.3.2. The data collection software shall enable spectral acquisition in three ways.

7.3.2.1. Spot mode: spectra are collected from discrete, user-defined points

7.3.2.2. Line profile: spectra are collected serially along a user-defined line

7.3.2.3. Elemental mapping: spectra are collected serially from within a two-dimensional box by scanning the beam in an image raster pattern.

PAGE 20 OF 72 1333ND23RNB680014

7.3.3. Drift collection shall be provided for all three modes of EDX acquisition (i.e., spot, line profile, and elemental mapping modes)

7.4. Data and Operation Expectations

7.4.1. Where applicable, logs of all run-time metadata that is already being monitored by the Contractor, when called upon through the GUI or the API (Data and Operation Expectation Statement 2), shall be produced automatically, or for the duration and periodicity specified by the users in accordance with Data and Operation Expectation Statement 1.

7.4.2. (Where applicable) Metadata containing device operating parameters, imaging and column conditions at the time of acquisition shall be provided for each image acquired.

7.4.3. Device(s) with remote operation capability will be given priority (Data Statement 3).

8. Electron Energy Filter

8.1. The operating voltage for this electron energy filter shall be at least from 60 kV to 300 kV.

8.2. The electron energy filter shall be a post-column model that can run in both spectroscopy and imaging modes.

8.3. Spectroscopy (EELS)

8.3.1. Energy resolution at the lowest operating voltage depends on the lowest operating voltage allowed. The energy resolution shall be 0.27 eV or better at 60 kV as measured by the FWHM of the zero-loss peak. Smaller values for energy resolution will receive stronger consideration.

8.3.2. Spot and line profile capability shall use a minimum of 1024 channels with variable energy dispersions up to 3 eV/channel for an energy range of 3,000 eV.

8.3.3. Dynamic range shall be at least 16-bit per channel.

8.3.4. Readout speed shall be 3,000 spectra per second or better at 95 % duty cycle.

8.3.5. The ability to simultaneously acquire EELS and EDX spectra at high speed is required.

8.3.6. The spectrometer shall allow for acquisition of spectral data from two energy ranges in a single scan. This shall be accomplished using a fast electrostatic shutter.

8.4. Imaging (EFTEM)

PAGE 21 OF 72 1333ND23RNB680014

8.4.1. EFTEM field of view shall be 36 μm in diagonal or better, and energy-filtered diffraction full azimuth shall be 150 mrad or better.

8.4.2. Non-isochromaticity maximum at 300 kV shall be 2.75 eV pixel-to-pixel or better. The non-isochromaticity maximum at the lowest operating voltage depends on the lowest operating voltage allowed. If the lowest voltage allowed is 60 kV, the non-isochromaticity maximum should be 1.5 eV pixel-to-pixel or better.

8.4.3. Image distortion at the lowest operating voltage depends on the lowest operating voltage allowed. The image distortion shall be 0.75 or better at 60 kV.

8.4.4. Imaging camera shall use a CMOS sensor with a pixel size of 15 μm or smaller and a minimum of 2048 in both dimensions.

8.4.5. Image acquisition speed at the full frame shall be 75 frames per second or better.

8.5. Autonomous energy filter alignment shall be included in the control software.

8.6. The electron energy filter system shall provide the in-situ capability for acquisition and analysis.

8.6.1. The in-situ capability shall enable continuous data streaming for in-situ TEM imaging, EELS, EFTEM.

8.6.2. The in-situ capability shall include high-speed spectrum imaging.

8.6.3. The hardware shall include SSD storage capacity of 36 TB or greater.

8.7. The electron energy filter system shall permit the incorporation of a direct detection camera capable of providing the electron counting mode for TEM imaging, EELS, and EFTEM.

8.8. Data and Operation Expectations (applies to the EELS spectrometer in imaging and spectroscopy modes, and all attached -spectrometer cameras)

8.8.1. Where applicable, logs of all run-time metadata that is already being monitored by the Contractor, when called upon through the GUI or the API (Data and Operation Expectation Statement 2), shall be produced automatically, or for the duration and periodicity specified by the users in accordance with Data and Operation Expectation Statement 1.

8.8.2. Metadata containing device operating parameters, imaging and column conditions at the time of acquisition shall be provided for each image acquired.

8.8.3. Device(s) with remote operation capability will be given priority (Data Statement 3).

PAGE 22 OF 72 1333ND23RNB680014

9. Computer Hardware

9.1. The Contractor shall provide all required computers and servers for control and operation of the microscope, including all cameras, STEM detectors, the EDX detector, and the electron energy filter system.

9.2. All necessary monitors shall be provided by the Contractor.

9.3. The Contractor shall provide a summary of typical and minimum/maximum bandwidth of all data producing devices, including third-party devices.

9.4. The Contractor shall provide a network computer to connect the microscope PC to the network.

9.4.1.The network computer shall have at least 2 ethernet cards.

9.4.2.At least one of the network cards shall support fiber network connection of at least 10 Gbit/s.

10. Microscope Control Software

10.1. The Contractor shall describe the microscope functionality available at each User level (basic, expert, supervisor).

10.2. The computer interface to the microscope shall include provisions to control the following:

10.2.1. Computer control of all microscope functions, stage positions and tilts, user-required functions, spot and scan functions, aperture positions, image acquisition, and spectra acquisition.

10.2.2. Computer control of all microscope settings: lens currents, aperture positions, deflector currents, etc., including free-lens control.

10.2.3. The microscope software shall include the ability to recall settings for different users, different modes of operation, and different voltages.

10.2.4. Software/control optimized for a user facility environment where there will be many users possessing various levels of skill. The control software shall permit different users to login independently. Different levels of system access shall be assignable to different people (e.g., user, superuser, maintenance and facility management). The settings for any given user shall not affect those of any other.

10.2.5. Focus step size and defocus values shall be available for display to the microscope operator.

PAGE 23 OF 72 1333ND23RNB680014

10.2.6. The ability to measure the beam current during microscope operation is required at all operating voltages. The Contractor shall specify how the beam current is measured.

10.2.7. The ability for the software to simultaneously acquire EELS and EDX spectra is required.

10.2.8. Compliance with Data and Operation Expectations Statement 2 is required.

10.2.9. Data and Operation Expectation Statement 2 (API required) applies to serve those users wishing to operate the microscopes through the API using Python (for example). This functionality shall be location independent (i.e., operating in the same room as the microscope shall be indistinguishable (apart from the time lag) from operating from an office in Gaithersburg MD or Boulder CO).

10.2.10. Where applicable, logs of all run-time metadata (e.g., vacuum readings) that is already being monitored by the Contractor, when called upon through the GUI or the API (Data and Operation Expectation Statement 2), shall be produced automatically, or for the duration and periodicity specified by the users in accordance with Data and Operation Expectation Statement 1.

10.2.11. Metadata containing device operating parameters, including imaging and column conditions, lenses, and deflector setting, at the time of acquisition shall be provided for each image acquired.

10.3. Live, In Person Operation shall include the following provisions:

10.3.1. GUI and hand-panel operation of all native microscope modes, including free lens control.

10.3.2. Display of focus step size and defocus value.

10.4. Remote and Autonomous (Computer) Operation

10.4.1. Remote operation of the base microscope is required (Data and Operation Expectation Statement 3).

10.4.2. At time of contract award, the Contractor shall provide written documentation of the network and hardware performance required for remote operation of the microscope.

10.4.3. One additional set of hand panels shall be provided for our use from a remote site. Hand panels shall comply with at least the USB 2.0 standard.

10.4.4. Full description of network configuration requirements for remote operation shall be provided in advance of delivery.

PAGE 24 OF 72 1333ND23RNB680014

10.4.5. While image compression is acceptable, Contractor providing full-resolution streaming capability is preferred.

10.4.6. Two NIST-wide site licenses for remote operation of all native microscope modes, including free lens control. The software solution may be some combination of the data analysis software and the local microscope operation software. If so, please specify how these licenses may be interchangeable. Please provide a quote for each additional network license.

10.5. User Interface and Ease of Use Considerations

10.5.1. Switching between TEM and selected area electron diffraction (SAED) modes, once appropriate initial alignments have been performed, shall require no more than a single step, and stable operation after switching modes shall be achieved after no more than one minute.

10.5.2. Switching between TEM and STEM modes, once appropriate initial alignments have been performed, shall require no more than a single step and stable operation after switching modes shall be achieved after no more than one minute.

10.5.3. Auto alignment procedures for TEM, STEM, probe correction, and the EELS spectrometer shall be provided.

10.5.4. The degree of integration of the microscope control with subcomponents such as EDX, EELS, cameras, the beam pulser, and specimen holders shall be described in the offer.

10.6. For futureproofing purposes, please evaluate the microscope software platform in accordance with Data and Operation Expectations Statement 4. Contractor is not responsible for equipment provided by third-party vendors.

11. Data Analysis Software

11.1. The Contractor shall provide one local copy of data analysis software on the working microscope. This pertains to all software nominally provided by the primary microscope Contractor and all third-party vendors (e.g., spectrometers, cameras, specimen holders) where applicable.

11.2. The Contractor shall provide 2 off-line copies of all software for processing and analyzing the data acquired from the microscope, including (but not limited to) TEM and STEM images, diffraction data, EELS and EDS spectra and spectrum images, EFTEM maps, 4D-STEM data, and tomography reconstruction and visualization. These licenses will be for local, not networked, computers for the NanoFab staff.

PAGE 25 OF 72 1333ND23RNB680014

11.3. At least 6 NIST sitewide network licenses of data analysis software to enable routine analysis. The software solution may be some combination of the data analysis software and the local microscope operation software. If so, please specify how these licenses may be interchangeable. Please provide quote for each additional network license. This pertains to all software nominally provided by the primary microscope contractor and all third-party vendors (e.g., spectrometers, cameras, specimen holders) where applicable.

11.4. Both the local and the sitewide licenses for the principal microscope software shall be updated to the most recent versions for as long as the maintenance contract for the primary microscope is in place.

All copies shall also comply with Data and Operation Expectation Statement 1. Please indicate whether there is a volume discount, and if so, the applicable brackets (e.g., 1-5 copies, 6-10 copies).

11.5. The following features shall be provided with the data analysis software:

11.5.1. Compliance with Data and Operation Expectations Statement 1 is required.

11.5.2. Quantitative data analysis software and common algorithms, including EELS, EFTEM, EDX, and diffraction analyses.

11.5.3. Common and user definable image processing routines.

12. Vacuum System

12.1. The instrument shall have a dry (“oil-free”) differential vacuum system capable of maintaining operating system pressures throughout the instrument.

12.2. A cold trap shall be incorporated to minimize specimen…