Requirements Document.docx

NIST Requirements Document An in-vacuum camera system

I. Background

The requirement is for a camera system that can image light in the soft-x-ray, extreme- and violet-ultraviolet (SXR, EUV, VUV) that can be moved within an ultra-high vacuum (UHV) chamber. The project being pursued will allow the measurement of nanoscale semiconductor patterns by shining SXR, EUV and VUV light onto such samples and measuring with this camera system the reflected, diffracted, and scattered light to determine the dimensions of these patterned features. Such projects have been carried out at longer wavelengths at NIST but this requirement is necessary to reduce the wavelength of light used to provide better information about nanoscale dimensions especially as semiconductor dimensions continue to decrease. As SXR, EUV and VUV light are absorbed by air, this camera system must be operated in a vacuum. The camera sensor will allow the detection of SXR, EUV and VUV light at several different angles relative to a rotating sample and a fixed incident beam.

Scope

An in-vacuum camera system: Quantity (1) This camera is required to collect light at wavelengths in the soft-x-ray, extreme and vacuum ultraviolet (1 nm through 150 nm) so that we can meet our mission of determining nanoscale dimensions of patterned wafers from reflected, scattered, and diffracted light, in support of the US Semiconductor Industry.

II. Minimum Requirements The system shall meet or exceed the minimum requirements identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

The Contractor shall provide the following (1) Camera system that meet the following minimum specifications:

Specification S1): “Camera system” is comprised of a camera head “i.e., Camera,” its electrical and coolant connections required for Camera operation within in an ultra-high vacuum (UHV) chamber, its UHV-compatible feedthroughs for those cooling and electrical connections, its required power sources and electrical connections to transmit camera images to a NIST-owned computer, and any proprietary software required to access these images including LabVIEW drivers.

Specification S2): Camera shall be capable of operating in a NIST-provided UHV chamber, with “UHV pressure” defined here as a maximum allowed pressure of P = 1 x 109 Torr.

Specification S3): The sensor of the Camera will be a charged-coupled device (CCD).

Specification S4): The CCD sensor of the Camera will have a minimum of 2048 pixels x 2048 pixels.

Specification S5): Captured images will show no more than 1000 pixels in the 2048 pixel by 2048 pixel array that deviate more than 6 standard deviations from the mean intensity (e.g., “white pixels,” “black pixels”, etc.)

Specification S6): The typical dark current of the Camera System must be no greater than 0.02 electrons per pixel per second. Dark Current is rate of generation of thermal electrons at a given CCD temperature.

Specification S7): The quantum efficiency of the CCD Sensor of the Camera is known to be dependent upon the energy of the photon and minimum values per wavelength (energy) are tabulated below denoted as specifications S7.1, S7.2, etc. Quantum efficiency (QE) is the measure of the effectiveness of an imaging device to convert incident photons into electrons (QE = 1 is conversion of one photon to one electron).

III. Delivery Delivery shall be FOB Destination (or equivalent terms, such as INCOTERMS Delivered Duties Paid) are required and shall occur not later than (NLT) 4 months ARO.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

The National Institute of Standards and Technology 100 Bureau Drive, Building 220 Gaithersburg, MD 20899-1640 IV. Inspection and Acceptance In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance test consists of successful operation of the camera system as placed in a NIST-owned vacuum system with image collection recorded using on a NIST-provided computer after installation by NIST Staff and Associates per supplier directions (Specifications S1-S4). NIST is responsible for the providing the water-cooling system (water chiller or house-chilled water). Specification S5 may be tested using visible light. Specification S6 is to be tested in the absence of light sources within the chamber. Specification S7 is to be tested at each energy if the synchrotron is available during the inspection period.

The Government will test, inspect, and accept the equipment onsite within 7 days business days of the receipt of the camera system. A visual inspection of the camera system will be performed by the NIST TPOC to identify surface defects or any form of indication that the camera system was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the camera system due to defects and/or nonconformance.

V. Warranty The contractor shall warrant the entire system for a period of a minimum of one year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4

VI. Payment Schedule The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after installation and acceptance by the TPOC of fully installed system.

2. The Government anticipates inspection will occur upon:

a. After the testing procedures set forth in this document have been completed