Requirements Document.docx

STATEMENT OF WORK

Metrology of Nanoscopic Thermal Transport

PML, 686

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing. As part of this effort, NIST has a program to develop new methods to measure and understand spin and thermal transport at the nanoscale in active devices operating at high-frequencies. This requires active stabilization and synchronization of a pulsed EUV source with an rf source of at least 100 GHz. As a result, a sampling oscilloscope is needed to monitor and measure the synchronization of the two sources with at least a 100 GHz bandwidth without introducing any significant timing jitter. The instrument must also have a timing stability to prevent any drift over the course of many hours – the typical time for data acquisition.

II. SCOPE

The goal of this contract is to supply a sampling oscilloscope with a 100 GHz bandwidth for use in developing new ultra-fast metrology of thermal transport at the nanoscale. The contractor shall deliver the specified system inclusive of FOB Destination delivery, installation, and 3 year warranty.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: 100 GHz, 2-channel Sampling Oscilloscope with Precision Time Base Quantity (1): Keysight N1000A DCA-X Wide-Bandwidth Mainframe including low jitter time base (LOJ) and precision time base (PTB) with N1046A 2-port 100 GHz remote sampling head.

A. Technical Specifications

a. The sampling oscilloscope shall have 2 channels each with a bandwidth of at least 100 GHz.

b. The sampling rate of the system shall be at least 250 kSamples/s.

c. The vertical resolution shall be at least 16 bits.

d. Must have a precision timebase with jitter better than 100 fs and be able to synchronize to an external signal.

e. Must have the capability to measure delays up to 1 second.

f. Shall have at least 2 channels/ports for measured signal inputs

g. Coaxial signal connection shall be 1.0 mm with 50 Ohm impedance.

h. Trigger input connection shall be a 2.92 mm or 2.4 mm connector with 50 Ohm Impedance and be able to accept an input signal of at least 1 V, and with a trigger bandwidth of up to 32 GHz.

i. Shall have the ability to be operated without connection to an external computer that shall include a built-in color monitor screen as well as the ability to connect a keyboard and mouse via USB. Preference is given to inclusion of a touch screen.

j. Shall be able to connect to external computers via a GPIB interface, USB and LAN.

k. The supplied power to the system shall be 115 V at 60 Hz.

l. Shall include an extended 3-year return to Keysight warranty.

m. Shall include startup assistance.

n. Shall be new. Used or refurbished equipment will not be considered.

IV. DELIVERABLES

Standards of Acceptance: The NIST SME or COR shall review (list deliverable) and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 14 days of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (draft plans, drawings, etc.)

V. PLACE OF PERFORMANCE

a. All work shall be performed at the 325 Broadway, Boulder Colorado 80305.

VI. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 325 Broadway, MS686.12 Attn: Justin Shaw, B24-1202 Boulder CO 80305

VII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST COR to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 14 days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VIII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 3 years after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government.

IX. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after installation and acceptance by the TPOC of fully installed system, AND

1. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

1. After successful demonstration by the instrumentation that it performs IAW the technical requirements set forth in this document AND

1. After receiving an invoice submitted properly, IAW the purchase order terms and conditions.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

X. CONTRACTOR SUPPLIED MATERIALS

a. The contractor shall supply all parts, hardware, equipment, and labor required to perform the tasks listed.

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