Requirements Document.docx

NIST Requirements Document Hexapod Alignment System for EUV Radiometer Comparator System

NB685000241747

I. Background The Optical Radiation Group is procuring (separate from this procurement) a mechanically cooled cryogenic radiometer comparator system to realize the scale of detector responsivity in the extreme ultraviolet. The large, heavy comparator system must be precisely aligned to the optical beam at SURF III, NIST’s synchrotron radiation facility where the measurement will be performed. Proper alignment in the horizontal and vertical directions is critical for accurate results. Alignment in the pitch and yaw angles is also important.

The optical beam from SURF III is fixed in space and cannot be steered. Therefore, the comparator system must be manipulated on four axes (two linear and two angular) to achieve the required alignment. Proper alignment and complete capture of the optical beam are confirmed by scanning the comparator about the four axes over a suitable range of motion.

The alignment system procured here must be capable of supporting the 250-kg comparator and moving it as required. To achieve this with a traditional pair of linear motion stages and a gimbal requires significant cantilevering of the load and presents substantial engineering challenges. The use of a hexapod alignment system resolves the cantilevered load issue and provides sufficient range of motion on all four axes.

II. Scope

We seek one (1) hexapod positioning system to perform alignment positioning and scanning of the EUV cryogenic radiometer comparator system to support the realization of the scale of detector responsivity in the extreme ultraviolet.

III. Minimum Requirements The system shall meet or exceed the minimum requirements identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

The Contractor shall provide the following one (1) hexapod alignment system for EUV radiometer comparator system inclusive of delivery, training and installation that meet the following minimum specifications:

1. Maximum load (see attached drawing for load size and dimensions) of 250 kg or more;

2. Linear translation of at least ±13 mm in vertical and one horizontal direction;

3. Linear motion repeatability of 1 µm or less;

4. Linear motion backlash of 5 µm or less;

5. Angular rotation of at least ±3° in pitch and yaw;

6. Angular repeatability of 0.005° or less;

7. Angular backlash of 0.025° or less;

8. Controller for hexapod with computer interface, TCP/IP preferred, but RS-232, RS-485, GPIB, and USB are acceptable;

9. Software to control hexapod and position sample;

10. Power supplies for hexapod and controller;

11. Cabling between hexapod and controller; and

12. LabVIEW driver or LabVIEW Software Development Kit to facilitate hexapod control from customer’s data acquisition and control programs.

IV. Site Preparation

N/A

V. Delivery Delivery shall be FOB Destination (or equivalent terms, such as INCOTERMS Delivered Duties Paid) are required and shall occur not later than (NLT) 30 weeks ARO.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

The National Institute of Standards and Technology 100 Bureau Drive, Building 245 Gaithersburg, MD 20899 VI. Inspection and Acceptance In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

No additional acceptance tests beyond the demonstration of specifications under section VII are required.

The Government will test, inspect, and accept the equipment onsite within 7 business days of the receipt of the hexapod alignment system. A visual inspection of the hexapod alignment system will be performed by the NIST TPOC to identify surface defects or any form of indication that hexapod alignment system was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the hexapod alignment system due to defects and/or nonconformance.

VII. Installation The system shall be installed by the Contractor and meet contract specifications no later than 2 weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, (Gaithersburg, MD- Building 245.)

VIII. Training

The contractor shall conduct 1 day training session on-site for up to five users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST immediately after installation/set-up and on-site measurements demonstrating that no damage or misalignment issues arose during transportation and installation, but shall be completed no later than 14 days after installation. Comment by Timberlake, Elizabeth R. (Fed): Is this training onsite or virtual Comment by Vest, Rob (Fed): I would prefer on site, but virtual is probably acceptable. The main thing is that we need to know how to use their positioning software. However that goal is accomplished is ok. For an instrument like this, being able to see it and point to it is probably helpful, though. Comment by Timberlake, Elizabeth R. (Fed): Onsite is fine just need to be clear in solicitation

IX. Warranty The contractor shall warrant the entire system for a period of a minimum of 3 years after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4

X. Payment Schedule The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after installation and acceptance by the TPOC of fully installed system.

2. The Government anticipates inspection will occur upon:

a. After the testing procedures set forth in this document have been completed.

TRAVEL

The contractor shall be responsible for all travel expenses.

CONTRACTOR SUPPLIED MATERIALS

The contractor shall supply all parts, hardware, equipment, and labor required to perform the tasks listed.

Attachments:

Drawing for load size and dimensions.

MISCELLANEOUS INFORMATION

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Regular Business Hours. Regular business hours are Monday through Friday, 8:00 am to 5:00 pm Eastern Time, excluding Federal holidays and NIST closures.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.