SOW_OpticalProfiler_Open_160726_20160830125531.386_X.docx
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- 3D Optical Profiler Federal contract opportunity
- Solicitation number
- NNG16596030
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Statement of work
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Statement of Work 3D Optical Profiler for Surface Measurements
Purpose:
GSFC X-Ray Astrophysics Laboratory (Code 662) requires an optical surface profiler to measure the surface topography of x-ray mirrors.
The optical profiler are to meet the following broard technical requirements:
(a) Surface measurement repeatability of 0.1 nm in a single measurement, resulting in sub-Å rms repeatability or resolution at optical magnifications ranging from 0.5X to 100X to sample lateral scale of sufficiently large range.
(b) Sensor array of at least 1K x 1K for adequate spatial sampling.
(c) High resolution focus drive (sub-m resolution) with a step height scanning range of 150 m, with a full vertical scan range of 20 mm to accommodate large, curved parts.
(d) Optics that works with a wide range of materials or surfaces: specular/rough, transparent/opaque, metallic/non-conducting material such as glass or silicon, with reflectance ranging from 1% to 100%.
(e) Motorized stage that enables stitching functions.
(f) System vibrational isolation or system is insenstive to vibration.
(g) User-friendly software for instrument control of motorized XYZ stages, autofocusing, auto adjustment for light intensity.
(h) Software for topographical analysis including statistics (Ra, Rq, etc.), low order terms removal, frequency domain analysis (power spectral density, low/high pass filtering), selection of linear cut for analysis, masking of a 2-D region for analysis, reference subtraction.
(i) Multiple output file types, including text-based data output. Ability to read MetroPro data is prefered (this procurement is to replace an exisiting system by Zygo Corporation.)
(j) Computer operating system: Windows 7 (this is a specific requirement to meet NASA IT requirements.
Technical Requirements:
I. Optical:
| Magnification: | 0.5X to 100X in a selection of at least 4 objectives. | ||
| Selectable additional optical zoom from 0.5X to 2.0X. | |||
| Field of View: | 0.05 – 15 mm | ||
| Surface repeatability: | 0.15 nm | ||
| Sq (rms) repeatability: | 0.01 nm | ||
| Vertical scan range: | 20 mm | ||
| Step height scanning: | 150 m range | ||
| Vertical scan accuracy: | better than 1% full scan | ||
| Measurable surfaces: | specular/rough, transparent/opaque, metallic/non-conducting material such as glass or silicon | ||
| Measurable curvature: | cylindrical and spherical surface with curvature up to 1/(100 mm) | ||
| Camera: | >1K x 1K | ||
| Illumination: | White light with selectable spectral filters or single wavelength light source | ||
| Field and aperture stops: | Yes |
II. Stage and Drive:
| Z-Stage range: | 100 mm sample range and space |
| Z-Stage resolution: | 0.1 m |
| XY-Stage: | 150 mm or larger platform |
| Motorized XY-stage: | Yes |
| Tip/Tilt platform: | Yes, 3 or better |
III. Computer, interfaces and software:
| Computer: | 64-bit computer, > 16 GB memory, > 1TB hard disc |
| Operating system: | Windows 7 |
| Control software: | Control motorized XYZ stages for sample location, stitching functions, auto-focusing, auto-adjustment for light intensity |
| Analysis software: | Software capable of basic topographical analysis, including Ra, Rq, low order surface terms, terms removal, interactive analysis of a linear section, analysis of region of interest, histogram, statistics, analysis in frequency domain (such as power spectral density, Fourier analysis, high and low pass filtering), graphical output, reference subtraction, output multiple data types including text-based data. |
IV. System:
| Objective turret: | Motorized, parcentric |
| Vibration isolation: | Vibration isolation table or system is insensitive to vibration |
| Calibration standards: | Flat standard and step height standard |
| Manual: | Online help function and manual |
| Training: | Include application training of users |
File details come from the government source that posted it. Updated .