NB687100-19-02346_DRAFT_SOW.pdf

Statement of Work

ATOMIC LAYER DEPOSITION SYSTEM

NB687100-19-02346

1. BACKGROUND INFORMATION

a. NIST-Boulder has a state-of-the-art research laboratory (the Katharine Bloggett Gebbie Building) to support the most sensitive research done at NIST. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-fabrication Facility (BMF). The BMF is expanding its capabilities in producing photonic and superconducting device and needs to possess the capability of depositing metals and dielectric films that are several monolayers thick to produce its next-generation devices. Deposition of monolayers of material is traditionally accomplished through the use of Atomic Layer Deposition (ALD).

Therefore, the BMF requires an ALD system.

2. SCOPE OF WORK

a. Objective:

i. The goal of this contract is to supply, install, and train new users on an ALD system that meets the needs of the BMF community.

b. General:

i. The CONTRACTOR shall:

1. Provide evidence of experience of suppling, installing, and training new users on an ALD system with similar requirements to those in the statement of work. Evidence of this criterion shall be demonstrated with an appropriate reference.

2. Provide personnel that pass required Government background checks to be issued badges for work on site.

3. Provide a quote proposal which details all planned materials, consumables, travel, labor, equipment, and expenses.

4. Supply the installation manual, utility requirements, and a diagram showing the tool footprint, measurements, and wall penetrations along with quote.

ii. Specifications for the Work:

1. All staff from selected vendor shall be badged by NIST Security.

No one may enter the site without a badge.

2. All work shall be scheduled with the TPOC prior to arrival to do the work.

c. Specific Requirements:

i. At a time to be coordinated after the award of the contract, the CONTRACTOR shall:

1. Supply, install and train new users on an ALD that meets the following technical specifications.

ii. The ALD system shall:

1. Be constructed with materials that are compatible for use in an ISO Class 5 cleanroom.

2. Be a vacuum system with a base pressure of 20 mTorr or less. The vacuum system shall use only oil-free, dry pumps. To meet the BMF standardized vacuum pump criteria, any chemical processing pumps must be a new Edwards iH-80. The vacuum system shall include foreline purge/vent protection and a foreline throttle valve.

3. Contain a single wafer vacuum load lock system with a base pressure of 5.0 x 10-7 Torr or less. This load lock shall:

a. Have a vacuum system containing a turbomolecular and/or molecular drag pump that is backed by an oil-free, dry scroll pump. To meet the BMF standardized vacuum pump criteria, the scroll pump must be a new Edwards nXDS-10i.

b. Have a high vacuum valve between the load lock and ALD chamber.

c. Have an isolation valve for the turbomolecular and/or molecular drag pump to allow fast pump down and venting of the chamber.

d. Have appropriate gauges to measure the pressure.

e. Be able to automatically transfer substrates from the load lock to the ALD chamber.

f. Have the ability to load 150 mm SEMI spec wafers into the

ALD chamber.

g. Have the ability to load substrates from chips to 150 mm

SEMI spec wafers with the use of adaptors.

h. Have the ability to load under viscous laminar flow conditions that establish a diffusion barrier and prevents any back streaming of any reactor byproducts.

i. Have a port for connection of vacuum diagnostic equipment.

4. Include appropriate interlocks to ensure that the tool is safely operated.

5. Include an ozone sensor and appropriate interlocks to the tool.

6. Include the ability to prevent the unwanted mixing of precursors.

For example: limiting the explosive combination of H2 and O2 and limiting undesirable cross contamination of precursors.

7. Be constructed with gas lines and connectors that are suitable for handling toxic gases.

8. Be constructed such that all connectors in the toxic gas line occur in an enclosed space that is vented.

9. Be controlled by software that is able to control all aspects of the tool. This software must also provide users a Graphical User Interface (GUI) that: shows users the state of the tool (such as valve positions and pressure), allows users to change the state of the tool, allows users to create and store recipes, and allows users to run recipes to run process on the tool automatically.

Additionally, the system control software must have the ability to email notification of user defined warning triggers and must be able to save a log file of deposition runs.

10. Include all computer systems, power supplies, chillers (if necessary) and all ancillary equipment required for the system to operate.

11. Have the ability to deposit films using both thermal and plasma enhanced ALD processes.

12. Have the ability to deliver precursors through at least 5 independent source positions, referred to Positions A-E:

a. Position A: Single vapor delivery source for high vapor pressure liquids/solids. This source shall:

i. Be able to accommodate at least a 50-cc ampoule.

ii. Have 3 heater zones that are controlled by the tool software. The heaters must have less than 5% heater non-uniformity per zone.

iii. Have an independent Mass Flow Controller (MFC) and an isolation valve.

b. Position B: Flow Through Module delivery source for low vapor pressure liquids/solids. An example of this include passing an inert gas through a heated bubbler. The source shall:

i. Have at least four heater zones at the input line, valve, ampoule manual valve, and ampoule.

ii. Allow for custom bubblers.

iii. Have an independent MFC and isolation valve.

c. Position C: Multi-source Vapor delivery source for moderate to high vapor pressure liquids/solids. This source shall:

i. Be able to accommodate at least five 50 cc ampoules connected in parallel.

ii. Have an independent input line.

iii. Have an independent MFC and isolation valve for each source.

iv. Have seven (7) heater zones: one at the input line, one at the valve, and one for each source ampoule.

The heaters must have less than 5% heater non-uniformity per zone.

d. Position D: Plasma Source. The plasma source must create an Inductively Coupled Plasma (ICP) that can be used for plasma-enhanced ALD. This source shall include:

i. Its own dedicated lines, MFC, and isolation valve.

ii. A 1 kW RF power supply or greater.

iii. 5 or more reactant gas lines each with its own MFC and isolation valve.

iv. A method to prevent mixing of incompatible gasses, for example, H2 and O2.

v. An ozone source that delivers ozone through the ICP when enabled.

e. Position E: A location for future expansion for additional precursors. This source must be able to be expandable for precursors required to deposit W (Tungsten).

f. For each position, the required heaters must have the ability to tune each heater zone, have easy access to over temperature settings, and have dual thermocouples per zone for redundancy setup.

13. Have ALD valve timing resolution of at least 0.01 ms.

14. Have the ability to provide a high conductance path to pump reactant lines back to their respective sources.

15. Have the capability to deliver the ALD precursors required for and the ability to deposit the following materials:

a. HfO2

b. Al2O3

c. SiO2

d. TiO2

e. Pt

f. TiN

g. AlN

h. SiN

16. Include an ellipsometer that is able to perform in-situ measurements on the sample during the ALD process. The ellipsometer shall have a minimum of 4-wavelength LED light source with 465 nm, 525 nm, 580 nm, and 635 nm light wavelengths. The results of the ellipsometer measurements shall be able to be read out through software, real time, during film deposition.

17. Include a method of minimizing precursor interactions with chamber sidewalls and ports. An example method could include an inert gas shrouding and focuses the precursors at the substrate.

18. Have the capability of being installed through a wall so that the system load lock is located in the cleanroom bay and the main chamber is located in the adjacent cleanroom chase. The ALD system must be able to fit in a space that is 4 feet wide, 4 feet deep, and 7.5 feet tall in the cleanroom bay and 4 feet wide, 5 feet deep, and 7.5 feet tall in the cleanroom chase. The required ALD system computer and monitors do not to fit in this space, but the monitor and keyboard must be on the left side of the tool when standing at the front of the tool facing the cleanroom bay wall.

19. Have all precursors located within a sealed, ventilated part of the system. No external gas cabinets are to be required.

20. Include a heated substrate stage that can operate between ambient to 500 C and have a temperature uniformity of better than ± 3% across a 150 mm SEMI spec silicon wafer.

21. Include heaters that can heat the following components to the specified temperatures:

a. Process chamber: 250 C with a ± 5 % uniformity or better.

b. Delivery lines: 250 C with a ± 5 % uniformity or better.

c. Delivery valve heating: 200 C with a ± 5 % uniformity or better.

d. Precursor heating: 200 C with a ± 5 % uniformity or better.

22. Produce Al2O3 greater than 10 nm thick films with 1 sigma uniformity across a 150 mm SEMI spec wafer of ± 1 % or better, excluding a 10 mm exclusion zone from the edge of the wafer, using both thermal and plasma enhanced ALD. The index of refraction of these Al2O3 films shall have a uniformity of ± 1 % or better.

23. Produce AlN greater than 10 nm films with 1 sigma uniformity across a 150 mm SEMI spec wafer of ± 3 % or better, excluding a 10 mm exclusion zone from the edge of the wafer, using plasma enhanced ALD. The uniformity of the index of refraction of this AlN film shall be ± 1.5% or better.

24. Produce films with low oxygen content. This criterion may be supported through published literature.

25. Have the ability to accommodate substrate sizes from chips to 2 inch, 3 inch, 100 mm, and 150 mm SEMI spec wafers, each with a height up to 5 mm, through the use of adaptors. The tool should be able to process these substrate sizes without any changes to the load lock or process chamber.

26. Be able to be powered using 120 V or 208 V, single or 3-phase power source(s).

iii. Before shipping the system, the CONTRACTOR shall provide the Government a factory acceptance report demonstrating that the ALD system performs according to tool specifications listed in this statement of work. The Government reserves the right to be present during the factory acceptance test. The CONTRACTOR shall provide the Government with a schedule of the factory acceptance test at least 2 weeks prior to the test to ensure that the Government has enough time to arrange for travel to the factory. During the factory acceptance test, the only films the Government requires a demonstration of is the deposition of Al2O3 and AlN; demonstration of deposition of the other films listed in 2.c.ii. are not required. The tool must be able to meet all other specifications in 2.c.ii.

The tool must meet these conditions before it is shipped. The

CONTRACTOR shall be responsible for providing the precursors for the required Al2O3 and AlN demonstration.

iv. The CONTRACTOR shall be responsible for delivering ALD system to its final location in the BMF (Building 81 room 1B100). This is to include all required rigging from the delivery truck to final tool placement in the BMF. The installation and rigging shall be performed in a method that is compatible with the cleanliness requirements of ISO class 5 cleanroom and NIST structural requirements. Items entering the cleanroom shall be cleaned to standards outlined in ISO 14644. The Government reserves the right to have the tool delivered to its final location in the BMF and then be able to facilitize the tool for a period between tool delivery and site acceptance test. This time period shall be at least 4 weeks and will not exceed 12 weeks, and the actual time period will be agreed upon between the Government and the CONTRACTOR. If facilitization occurs faster than the agreed upon time period, then the CONTRACTOR may start the site acceptance test on a date that is mutually agreeable between the Government and the CONTRACTOR.

v. During tool installation, the CONTRACTOR shall provide a working set of standard recipes that will deposit the materials listed in section 2.c.ii.

along with appropriate cleaning recipes.

vi. After tool installation, the CONTRACTOR shall demonstrate the ALD system performs according to tool specifications using a standard site acceptance test. This test shall include demonstrating that the tool can deposit the materials listed in section 2.c.ii. The Government will provide the precursors required for this test. The tool must meet the stated performance requirements before it will be accepted.

vii. After the tool passes the site acceptance test, the CONTRACTOR shall provide on-site applications training.

viii. The CONTRACTOR shall provide at least two days of tool setup and training time.

ix. The CONTRACTOR shall supply the installation manual, utility requirements, and a diagram showing the tool footprint, measurements, and wall penetrations along with quote.

x. After award of contract, the CONTRACTOR shall supply a schedule for when the required work will be performed.

xi. The CONTRACTOR shall supply all parts, hardware, equipment, and labor required to perform the tasks listed.

xii. The CONTRACTOR shall supply a one-year warranty on all parts and labor. The CONTRACTOR shall also provide pricing for the option contract line item number (CLIN) with quote for an additional 1-year warranty as required by section 6.a.

xiii. The CONTRACTOR shall schedule all visits to the BMF with the TPOC at least 2 weeks before arriving at the site.

xiv. Within one week of the completion of the work, the CONTRACTOR shall provide the TPOC a report of the work done, the results of the acceptance test, and any issues identified.

3. WARRANTY MAINTENANCE SERVICES

a. The CONTRACTOR shall provide four additional option years of preventative maintenance and repair services on the system in accordance with the following:

i. All services performed shall be provided by personnel who are trained and authorized by the manufacturer to perform maintenance and repair services.

ii. All parts shall be approved for use with the instrument by the manufacturer.

iii. At least a 90 day to 1-year warranty shall apply to all repairs and OEM parts.

iv. The CONTRACTOR shall respond to all service calls Monday through Friday, between 8:00 am and 5:30: pm Mountian Time. The CONTRACTOR shall provide a service technician/engineer on-site at NIST Boulder, CO, within 48 hours after the service call is placed by the Government. No weekend service visits are incipated, but subject to change.

v. In the event that the CONTRACTOR is unable to resolve the problem during the service call, the CONTRACTOR shall provide telephone support and on-site support as needed to expedite a solution for NIST and

BMF.

vi. The CONTRACTOR is responsible to obtain all parts required for all repairs and maintenance. The CONTRACTOR shall make a commercially reasonable effort to secure parts within 72 hours after identifying the need for a replacement part for the covered equipment. The CONTRACTOR shall make a commercially reasonable effort to secure parts within three business days after identifying the need for a replacement part for the covered equipment. Parts requiring a lead time of longer than two weeks shall be identified by the CONTRACTOR in writing to the COR and a plan submitted detailing a temporary solution that would allow the equipment to continue working while the part is sourced.

vii. Replacement parts must be approved for use by the Original Equipment Manufacturer (OEM).

viii. All repairs must result in the instruments meeting manufacturer’s specifications.

ix. Any parts or components removed for replacement shall become the property of the CONTRACTOR unless otherwise agreed to by the parties.

The CONTRACTOR shall remove the parts from the NIST campus at the time of the service call and that no shipping charges will be incurred by the Government. The CONTRACTOR shall assume liability for all parts removed from the NIST campus.

x. Provide at least one (1) preventive maintenance visit during each period of performance as specified in the manufacturer’s operations and maintenance manual at time of award of this requirement for each tool/instrument. Should the preventative maintenance schedule in future be reduced, from the current maintenance schedule, the CONTRACTOR shall receive approval of the reduction of preventative maintenance from the COR prior to implementing the revised procedures. At least 30 days prior to the need for preventative maintenance, the CONTRACTOR shall contact the NIST TPOC to schedule the time and date of preventative maintenance services.

4. SERVICE TICKETS

a. The Contractor shall submit a service ticket prior to departure from NIST on any given service call for maintenance or repairs. The service ticket shall include the following:

i. Date and time of arrival to NIST.

ii. Description of service performed.

iii. Name and quantity of any parts that were repaired.

iv. Name and quantity of any parts that were replaced.

v. Date and time of departure from NIST.

vi. Diagnostic test results or narrative summary demonstrating that the instrument and/or accessories are meeting the performance standards.

vii. Any comments or recommendations.

viii. Signature of Contractor’s service person

ix. Signature block for NIST personnel accepting the services rendered.

5. PERIOD OF PERFORMANCE

a. The CONTRACTOR shall supply evidence of supplying similar ALD tools and the installation manual along with the quote. The CONTRACTOR shall supply a schedule for the required work within 4 weeks after receipt of award (ARO). The Government will provide the opportunity for a site visit within 4 weeks ARO. The CONTRACTOR shall provide the Government with a schedule of the factory acceptance test at least 2 weeks prior to the test to ensure that the Government has enough time to arrange for travel to the factory. Before the tool is shipped, the CONTRACTOR shall provide the Government a factory acceptance report demonstrating that the ALD system performs according to tool specifications. The CONTRACTOR shall deliver the tool within 20 weeks of AOR. After the tool is delivered in its final place in the BMF, the Government will take a minimum of 4 weeks and a maximum of 12 weeks to install and connect facilities to the tool.

Within two weeks after the Government installs the tool, the contactor shall have commissioned the ALD such that it passes the site acceptance test, and users are trained on the operation of the tool. Within one week of the completion of the work, the CONTRACTOR shall provide the TPOC a report of the work done, the results of the acceptance test, and any issues identified. After the Government receives the report, the tool shall be accepted.

6. PLACE OF PERFORMANCE

a. All work shall be performed at the 325 Broadway, Boulder, Colorado, Building 81, room 1B100.

b. The Government will provide access to Building 81 to the CONTRACTOR for the entire period of performance of this contract.

c. The day-to-day supervision and direct control over the work performed by the on-site CONTRACTOR personnel shall be the sole responsibility of the

CONTRACTOR.

7. GOVERNMENT FURNISHED PROPERTY

a. The Government will provide the opportunity for the CONTRACTOR to perform a site visit to ensure:

i. The tool will be able to be delivered to its final position in the BMF from the Building 81 dock. This should include ensuring that the tool can travel through all required hallways, doorways, and elevators.

ii. The tool will be able to fit in the required space in the BMF as required by section 2.c.ii.18.

iii. The tool will be able to be installed through the cleanroom wall as required by section 2.c.ii.18.

b. After the site visit, it is the CONTRACTORs responsibility to ensure that the tool can meet the required specifications in section 2.c.ii.

c. The Government will facilitize the tool during a time period of at least 4 weeks but not to exceed 12 weeks after the tool is delivered to the BMF. The CONTRACTOR may provide a facilitization checklist for the Government to fill out and sign.

d. The Government will provide the appropriate precursors for the site acceptance tests.

8. GENERAL INFORMATION

a. Safety

i. The Contractor employee shall be responsible for knowing and complying with NIST installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

b. Security

i. NIST is a restricted campus. An identification badge is required for access for entry into buildings and also is shown to the armed Security Police when entering the campus. All CONTRACTOR personnel shall pass required Government background checks to be issued a badge for work on site.

c. Identification Badges

i. Contractor employees shall comply with NIST identification and access requirements. Each Contractor employee shall wear a visible identification badge provided by the NIST Security Office.

d. Vehicle Registration dentification

i. All Contractor employees must register their vehicles with the NIST

Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass shall be displayed on the vehicle’s rear view mirror in accordance with instructions.

9. OPTION CONTRACT LINE ITEMS

a. EXTEND WARRANTY

i. The CONTRACTOR shall include at least a one (1) year warranty on the

ALD after standard warranty expires if option is exercised.

ii. The service contract should include the following:

iii. One routine and preventative maintenance visit per year to ensure long-term performance and reliability of the instrument.

iv. Dispatch of a technician for emergency service when the instrument becomes inoperable or fails to perform to specifications due to a failure in the instrument.

v. Replacement of defective parts with parts approved for use by the OEM.

b. LOAD LOCK RESIDUAL GAS ANALYZER (RGA)

i. The CONTRACTOR shall provide a RGA if option is exercised.

10. DELIVERABLES

Specification Number Reference

Description Due Date Format (if applicable)

2.b.i.1 Provide evidence of experience of suppling, installing, and training new users on an ALD with similar requirements to those in the statement of work. Evidence of this criterion shall be demonstrated with an appropriate reference.

With Quote Electronic (PDF, .doc, .docx, etc.)

2.c.ix Provide the Government with the installation manual, utility requirements, and a diagram showing the tool footprint, measurements, and wall penetrations along with quote. The CONTRACTOR may provide a facilitization checklist for the Government to fill out and sign.

With Quote Electronic (PDF, .doc, .docx, etc.)

2.c.x The CONTRACTOR shall supply a schedule for when the required work will be performed.

4 weeks

ARO.

Electronic (e-mail, PDF, .doc, .docx, etc.)

5.a The Government will provide the opportunity for the CONTRACTOR to perform a site visit

4 weeks

ARO.

N/A

2.c.iii The CONTRACTOR shall provide the Government with a schedule of the factory acceptance test at least 2 weeks prior to the test to ensure that the Government has enough time to arrange for travel to the factory.

2 weeks before factory acceptance test

Electronic (e-mail, PDF, .doc, .docx, etc.)

2.c.iii The CONTRACTOR shall provide the Government a factory acceptance report demonstrating that the ALD system performs according to tool specifications.

Before the tool is shipped

Electronic (e-mail, PDF, .doc, .docx, etc.)

2.c.iv The ALD tool is delivered to its final place in the

BMF

20 weeks

ARO

N/A

2.c.v The CONTRACTOR shall provide a working set of standard recipes that will deposit the materials listed in section 2.c.ii. along with appropriate cleaning recipes.

During site acceptance

Recipes provided in the tool database

2.c.vi The CONTRACTOR shall demonstrate the ALD system performs according to tool specifications using a standard site acceptance test.

34 weeks

ARO.

N/A

2.c.xiv The CONTRACTOR shall supply the TPOC with a copy of a report summarizing, work done, the results of the acceptance test, and any issues identified with in one week after their site visit.

35 weeks

ARO.

Electronic (e-mail, PDF, .doc, .docx, etc.)

2.c.xiii The CONTRACTOR shall schedule all visits to the BMF with the TPOC at least 2 weeks before arriving at the site.

N/A Electronic (e-mail, PDF, .doc, .docx, etc.)

a. Performance requirements:

i. The CONTRACTOR shall install the instrument in the NIST BMF

Laboratory.

ii. Assist the Government by supplying, setting up, and provide training new training for up to 5 NIST personnel instructing them on proper use, troubleshooting and basic ALD system maintenance that meets the specifications as defined section 2.

iii. Performance Indicators

1. After ALD is installed and tested, it meets the tool requirements described in section 2.

iv. Performance Standards

1. The technical requirements defined in section 2, the CONTRACTOR provides at least 2 days of tool training, and the delivery of the report described in section 6 within one week of completion.

v. Acceptable Quality Level

1. Set up and testing of the ALD system is performed according to industry standards. After the ALD is installed, it meets the tools’ requirements described in section 2.

11. ACCEPTANCE CRITERIA

a. Formal acceptance of the system will be given at the time the Contractor demonstrates that all performance standards in this statement of work have been met. The CONTRACTOR shall provide a 1-year warranty after NIST writtern acceptance. The warranty period shall begin the date of NIST acceptance.

12. WARRANTY

a. The Contractor shall include at least a one (1) year warranty on the ALD.

b. The warranty period should include the following

i. One routine and preventative maintenance visit per year to ensure long-term performance and reliability of the instrument.

ii. Dispatch of a technician for emergency service when the instrument becomes inoperable or fails to perform to specifications due to a failure in the instrument.

iii. Replacement of defective parts with parts approved for use by the OEM.

13. TRAVEL

a. The CONTRACTOR shall be responsible for all travel expenses.

14. CONTRACTOR SUPPLIED MATERIALS

a. The CONTRACTOR shall supply all parts, hardware, equipment, and labor required to perform the tasks listed.

15. CONTRACTOR’S MINIMUM QUALIFICATIONS

a. The CONTRACTOR shall:

i. Provide a qualified technician(s) that can perform install, troubleshoot, successfully ensure the ALD is fully operational without the assistance of NIST man-power personnel in terms of labor.

16. CONFIDENTIALITY

a. The information developed under this contract is the property of the U.S.

Government and shall be kept in strict confidence.