Attachment 1- FESEM Requirements.pdf

Requirements for high resolution, variable pressure SEM with automated load-lock and Python API

The Materials Science and Technology Division at the US Naval Research Laboratory (NRL) is in need of a high-resolution, variable pressure Shottky field emission scanning electron microscope (SEM) that is capable of automated operation, including a automated sample loading/unloading load-lock system, and user accessible

Python Application Programming Interface (API). Further requirements are listed below:

1.) The system must include a variable pressure system that can image both at high vacuum conditions (less than 1x10-3 Pa) or in a low vacuum condition (7 – 500 Pa).

2.) The system must be equipped with a field-free ultra high resolution Shottky field emission scanning electron column capable of:

a.) Accelerating voltages from 50 eV (or lower) to 30 keV (or higher).

b.) Spatial resolutions that are less than/equal to 1.3 nm at 1 keV; less than/equal to 0.9 nm at 15 keV in high vacuum mode. With low vacuum mode, the resolution should be less than/equal to 2.0 nm at 30 keV.

c.) Probe current range that is adjustable from less than/equal to 2 pA to greater than/equal to 400 nA.

d.) Capable of achieving a distortion free field of view of greater than/equal to 4.5 mm at a working distance of

10 mm, and greater than 50 mm at maximum working distance.

3.) Must be equipped with detectors and imaging system consisting of:

a.) Secondary electron (Everhart-Thornley) detector.

b.) Motorized retractable annular back-scattered secondary-electron detector (with one or more detection zones).

c.) Imaging system capable of greater than/equal to 16,000 x 16,000 pixel frame sizes with simultaneous channel data collection.

And may be equipped with d.) In column energy filtered detector.

e.) In column axial detector.

The user must be able to generate images using any of these detectors, or combinations of these detector signals.

4.) The system must include a motorized 4-axis stage capable of:

a.) X,Y travel greater than/equal to 130 mm.

b.) Z axis travel greater than/equal to 100 mm.

c.) Tilt range from less than/equal to -70° to greater than/equal to 90°.

d.) Accommodating a max specimen height of 130 mm or greater.

e.) Accommodating a max specimen weight of 8 kg or greater.

f.) Active vibration isolation system.

5.) The system must have an automated load-lock that includes:

a.) Automatic loading/unloading to/gram the main analysis chamber.

b.) The load-lock must be compatible with the NRL Robomet Sample pucks. These are custom designed pucks, 50 mm in diameter, 25 mm in height, that carry samples that are an additional 20-30 mm in height. These pucks integrate with other processing/analysis equipment. Design drawings can be provided on request.

c.) Placement of the NRL Sample pucks onto the SEM stage must have a precision of less than 50 microns in X-

Y, with less than 10 micron preferred.

6.) The system must be equipped with automation software that includes:

a.) Fully scriptable operation of the microscope through a Python API that must include, automatic sample loading/unloading through the load-lock, vacuum system control, electron column controls for all scanning modes, detectors settings and positions, brightness/contrast, focus, stage movements, beam voltage, beam current, magnification, and imaging parameters. The API must include full compatibility with the already developed NRL scripting routines based on the SharkSEM API.

b.) Additional automation features must include at least, auto focus, auto contrast/brightness, auto sigmation correction, objective centering, and sigmator centering.

7.) The system installation shall include:

a.) Environmental survey of the planned installation room.

b.) Delivery of the system, and installation and checkout of SEM operation.

c.) Transfer of the already acquired EDAX Inc Octane energy dispersive spectroscopy (EDS) and electron backscatter diffraction (EBSD) detectors from NRL’s current SEM to this new SEM.

d.) Two day onsite training of SEM operation.

8.) The system must have a service contract that spans three years and includes:

a.) labor, travel, living expenses and replacement parts coverage (including system software and/or software updates applicable to current configuration) b.) Two preventive maintenance visits per year c.) Unlimited technical support via email, phone or web.