N00173-21-Q-GD03 A0001.docx

DOCX document 12 KB Posted

Attached to
Evaporator System Federal contract opportunity
Solicitation number
N00173-21-Q-GD03
Issued by
Department of the Navy Secretary of the Navy Office of Naval Research

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This document contains questions and answers related to solicitation number N00173-21-Q-GD03 for an Evaporator System. The Naval Research Lab seeks one e-beam evaporator system with a 3-inch wafer size. While a two-chamber system with e-beam, ion milling, and transfer was proposed, only a single-chamber e-beam system would be acceptable. The solicitation provides additional details on product requirements and response guidelines.

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Combined Synopsis-Solicitation - 56-9103-21 draft.docx DOCX document

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Questions and Answers 1

N00173-21-Q-GD03

1. What is the wafer size?

Answer: 3 inches

1. Would you consider a system with two chambers: one for E-Beam and the other for Ion Milling having an in vacuum transfer chamber?

Answer: No, this would not be acceptable.

File details come from the government source that posted it. Updated .