PR_Specs.doc

Requirement Document for Multi-purpose X-ray Diffraction System

PR NUMBER:

NRL requires a Commercially Available, of the shelf, high resolution x-ray diffraction system with the following requirements:

9kW or higher rotating anode generator on a vertical theta-theta goniometer with horizontal sample mount. This is required to optimally attain the high intensity x-rays which needs to be combined with the optics and a theta-theta goniometer for ultra high resolution measurements we require on MBE grown thin film layers with complex structure, and ultra thin ALD grown films.

The system must be able to perform x-ray rocking curve maps (symmetric and asymmetric reflections) for a full 6-inch wafer with a 5 arcsec resolution. The sample must be maintained on stage and not flipped to obtain the full 6-inch map.

Permanently mounted optics (without adding or removing modules) to switch between Bragg-Brentano or Parallel Beam from parabolic x-ray mirror configurations without any required manual realignment.

Four bounce channel cut Germanium (220) and (440) optics module to be used with parabolic x-ray mirror optics, with the capability of automatic software recognition and alignment with the system. This item is essential for a parallel and monochromatic incident x-ray beam necessary to perform high resolution x-ray diffraction measurements.

Fully computer software controlled, four circle goniometer mounted on full size Eulerian cradle, with X, Y, and Z sample stage capable of performing rocking curve mapping on a full 6” diameter sample.

In-plane diffraction goniometer arm mounted on a high resolution theta-theta system is essential to obtain precise in-plane lattice constants to solve the material structure. The sample will be mounted and measured horizontally for both out-of-plane and in-plane measurements. Switching between out-of-plane and in-plane geometries should only require soller slit change. Compatibility with the system software is essential.

Fully Automatic Alignment of the System via Computer Control. This will minimize downtime and enable to perform the measurements in a fast manner.

Fully automated measurement software for data acquisition and control of all the instrument motions with a step flow approach to guide the user to perform the desired measurement techniques. The software should also be capable to avoid performing instrument motions or measurements that could potentially damage the instrument in any way. The software should recognize the various optics and setups on the system, recommend the optimized configuration for a given sample and desired result, and align the instrument automatically.

Integrated analysis software of the data files, including rocking curve analysis, x-ray reflectivity, dynamical thin film multilayer simulation, pattern recognition using databases, Reitvield analysis, reciprocal space map analysis, automated peak fitting. This software should be capable of installation and operation on at least 10 computers independently.

On-site installation with verified operation of the instrument, and 3 days of customer training. The vendor also should have the capability of servicing the instrument on-site if required.

The system shall be provided with a 1-year factory warranty that covers all parts, labor and travel expenses for on-site support of the equipment. The warranty period shall begin on the date of system acceptance. The warranty terms and options must be included in the system price.