68-5060-16_Technical_Specifications.docx

SPECIFICATIONS FOR ELECTRON ENERGY ANALYZERS

The Naval Research Laboratory (NRL) has a requirement for four (4) commercially-available electron energy analyzers based on a standard off-the-shelf design to be installed NRL, Washington, DC 20375. No new analyzer designs requiring major customization will be acceptable. The analyzers will be used to characterize the chemical, electronic, and crystallographic structure of various electronic materials being developed and studied at NRL. The energy analyzers will be mounted onto existing ultra-high-vacuum (UHV) chambers using UHV conflat hardware and they must be compatible with the geometrical constraints of these existing systems (as reflected in the specifications indicated below). The analyzers must be constructed using vacuum-compatible materials and must be bakeable to ensure operation at pressures as low as 1 x 10-10 Torr. All necessary electronics, software, and hardware must be included with the analyzers to allow for manual and computer-controlled operation by the user. The analyzers must be standard commercially-available products with defined performance specifications. Used equipment or components are not acceptable unless otherwise specified. The required specifications for each analyzer are indicated below. The offeror should provide analyzer spec sheets, drawings, and experimental data necessary to demonstrate the offeror's ability to meet or exceed the following minimum specifications:

1. HEMISPHERICAL ELECTRON SPECTROMETERS FOR XPS, AES, UPS, SEES

(TWO EACH)

These spectrometers will be used in UHV chambers to perform high-resolution chemical analysis using x-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) measurement techniques in order to quantify the surface chemical composition of electronic materials of interest. Additionally, they will be used to perform high-resolution electron energy analysis using ultraviolet photoelectron spectroscopy (UPS) and secondary electron emission spectroscopy (SEES) in order to determine the electronic band structure of electronic materials of interest.

Of particular importance, the instruments will analyze low-energy electrons created by thermionic emission, UV photoemission, and secondary electron emission. The analyzer design must allow the sample to be biased up to -200V with respect to ground. The negative sample bias is required to provide a sufficiently large space charge current limit for very low energy electrons.

• Hemispherical energy analyzer

· True 180° double-focusing geometry

· Large mean radius ~ 125 mm

· High energy resolution of at least 20 meV

· 6” OD conflat mounting flange

· 30-mm working distance

· 10” flange-to-sample distance

· Mu-metal shielding for complete magnetic shielding

· Bakeable to 150°C

• Multi-element small spot lens

· 3 magnifications and acceptance angles for variable spot size from >10 mm to 60 µm

· 6 in-situ selectable apertures for definition of analysis area down to 60-µm image resolution

· Pass energy must be continually changeable up to 200 eV to match the kinetic energy range

· Maximum count rate > 70 Mcps (>10 Mcps/channel)

· Low noise fiber optical transmission to PC

· Easily serviceable detector

• Spectrometer control unit

· Digital control for electron spectroscopy with kinetic energy range up to 2000 eV, including UPS mode

· Low noise HV supplies for analyzer and lens voltages

· Includes all cables and filter box

• Optical sample alignment capabilities

· Reproducible, precise positioning in x, y, and z of sample in analyzer focal point

· Includes CCD camera, light source, lenses, mounts, viewports, computer software/hardware

• Data acquisition system

· Software and hardware for electron and ion spectroscopy measurement control

· Required capability for user to modify software program to customize experimental parameters and operations

· CasaXPS data analysis software is strongly preferred for compatibility with other analysis facilities at NRL

· Software compatible with Windows XP; must include updates for at least 2 years

· Includes PC computer with all software and hardware pre-loaded

• Upgradable to 128-channel detector

This analyzer will be used to detect and analyze the energy of electrons field-emitted from microstructures due to electric voltages applied to the microstructures via probes. The field emission current and energy distributions may change quickly with time, hence it is important to collect the energy distribution spectra over short time scales. Within the same chamber the emission sites need to be analyzed with XPS chemical analysis.

• Hemispherical energy analyzer

· True 180° double-focusing geometry

· 125-mm mean radius

· 20-meV energy resolution

· 6” OD Conflat mounting flange

· 30-mm working distance

· 10” flange-to-sample distance

· Mu-metal shielding for complete magnetic shielding

· Bakeable to 150°C

• Multi-element small spot lens

· 3 magnifications and acceptance angles for variable spot size from >10 mm to 60 µm

· 6 in-situ selectable apertures for definition of analysis area down to 60-µm image resolution

· Electrostatic deflection to accurately position analysis area

• Detector

· 128-channel stripe anode detector with on-board preamps and counters

· Must provide massive parallel detection

· Detector channels at the exit of the hemisphere must be oriented along the dispersive plane

· Must record 128 different energies in parallel while integrating signals along the non-dispersive plane

· Provides snapshot-mode XPS: records fixed energy window (14% of Epass) simultaneously without scanning (high speed data collection)

· Pass energy must be continually changeable up to 200 eV to match the kinetic energy range

· Possible to measure time evolution of sample e.g. for sputtering or chemical reactions etc.

· Linear detector response needed for quantitative analysis

• Compression Unit

· Lens design must deliver a line focus at the entrance of the hemisphere

· Compression lens must transform a divergent electron beam originating from an extended round analysis area into a flat beam that passes the entrance slit without transmission losses

· Conventional axially symmetric lenses is inadequate

• Spectrometer control unit

· Digital control for electron spectroscopy with kinetic energy range up to 2000 eV, including UPS mode

· Low noise HV supplies for analyzer and lens voltages

· Includes all cables and filter box

• Optical sample alignment tool

· Reproducible, precise positioning in x, y, and z of sample in analyzer focal point

· Includes CCD camera, light source, lenses, mounts, viewports, computer software/hardware

• Data acquisition system

· Software and hardware for electron and ion spectroscopy measurement control

· Required capability for user to modify software program to customize experimental parameters and operations

· CasaXPS data analysis software is strongly preferred for compatibility with other analysis facilities at NRL

· Software compatible with Windows XP; must include updates for at least 2 years

• Imaging XPS capabilities

3. LEED/AUGER ENERGY ANALYZER

(ONE EACH)

This energy analyzer will be used to perform chemical analysis using AES to quantify the surface chemical composition as well as crystallographic analysis using low energy electron diffreaction (LEED) to determine the surface crystal structure of electronic materials of interest. Additionally, retarding energy analysis will be used to obtained information about the electronic band structure of the material.

• 4-grid retarding energy analyzer

· Rearview LEED optics

· Non-magnetic Au-plated Mo grids

· Mu-metal cylinder for magnetic shielding

· Wide viewing angle of ≥ 102°

· High grid transparency of ≥ 82%

· 8” OD double-sided conflat mounting flange

· 8” OD viewport

· 13.7” flange-to-sample distance

· 22-mm working distance

· Bakeable to 220°C

• Internal retraction

· Internal retraction length of at least 120 mm

- High-stability movement must use single rotary drive and 3 internal lead drive screws

• LaB6 filament

- Single-crystal LaB6

· High emission current of ≥ 30 microamps

· High beam current stability of at least 3%

· Low emission of stray light

• Sample biasing capabilities

· Negative sample bias must be possible in retarding energy analysis configuration for very-low-energy electron detection

• Power Supply

· High voltage modules for variable beam energy of 0 eV to 3.5 keV

· 7 keV high voltage supply for screen

· Emission-regulated high-stability filament supply

· Beam current monitor from 20 nA to 100 microamp

· Integrated lock-in amplifier and oscillator module for AES operation

· Cables for LEED screen, grids, and electron source for LEED operation

· Matching cables with modulator and preamplifier for AES operation

• Integrated Shutter

· Complete protection of grid assembly when closed

· Full viewing angle available when open

· Shutter projects < 8 mm in front of optics

• Data acquisition system

· Experimental control and data analysis software

· Oscilloscope mode for instrument set up

· PCI interface board to provide:

16-bit DAC for energy sweep

· Required capability for user to modify software program to customize experimental parameters and operations

· Includes computer with all software and hardware pre-loaded