JEOL_JBX-6300FS__PWS.docx

PERFORMANCE WORK STATEMENT

FOR JEOL JBX-6300FS

ELECTRON BEAM LITHOGRAPHY SYSTEM SERVICE AND MAINTENANCE

WRIGHT PATTERSON AIR FORCE BASE

20 Oct 2016

TABLE OF CONTENTS

SECTION NUMBER & TITLE

I. Description of Services

1.1. Service Requirements

1.2. Quality Assurance

1.3. Hours of Operation

1.4. Security Requirements

1.5. Safety Requirement

1.6. Continuation of Contractor Services during Base Exercises, Local Emergencies, or Contingencies and Implementation

1.7. Contractor Labor Hours Reporting

II. Services Summary III. Government Furnished Services

3.1. Emergency Medical Service

3.2. Security Police and Fire Protection

3.3. Physical Security

PERFORMANCE WORK STATEMENT

FOR JEOL JBX-6300FS

ELECTRON BEAM LITHOGRAPHY SYSTEM SERVICE

I. DESCRIPTION OF SERVICES

The contractor shall provide all personnel, equipment, tools, materials, vehicles, supervision, and other items and services to perform routine and emergency service and maintenance of the JEOL JBX-6300FS electron beam lithography (EBL) system located in Building 620, Area B, Wright-Patterson Air Force Base (WPAFB), Ohio. The contractor shall perform to the standards in the contract as well as all local, state, and federal regulations. All services on the system shall be accomplished by Original Equipment Manufacturer (OEM) trained service engineers/technicians (TSE/T) in the JBX-6300FS. Travel of service personnel and accommodations shall be the responsibility of the contractor and at no cost to the Government.

1.1. SERVICE REQUIREMENTS

1.1.1. Routine and Preventative Maintenance Inspections. In the event the start of the contract occurs during a lapse in Service Agreement, the TSE/T shall do an initial assessment of the e-beam lithography system at no additional charge to the Government. If the system is found defective, the Government will arrange for repairs before it is the responsibility of the contractor to perform such repairs. The contractor shall provide a minimum of one routine preventative maintenance visit per year. The contractor shall ensure long-term performance and reliability. The contractor shall replace all non-functioning components and ensure operability after service. Scheduling of routine visits shall be coordinated with the Government. Routine preventative maintenance visits shall be scheduled and a copy of the service report shall be submitted within 30 days after the visit to the COR by the contractor. The contractor shall provide system log file analysis by a TSE/T at least monthly, sooner if required, to monitor the health of the system. If the system is suspected of having symptoms of pending failure, as determined by the TSE/T, corrective action, as prescribed by the TSE/T, shall be taken immediately, including ordering parts needed to restore the system to OEM operating conditions, if applicable. The contractor shall provide telephone support directly with a TSE/T when: a problem is suspected, a problem has occurred and the TSE/T has determined that telephone support is sufficient to resolve the problem, or for consultation for a course of action in operating the system. All maintenance replacement parts, as determined by the OEM system requirement schedule, shall be replaced at no charge.

1.1.2. Application Engineering Support. The contractor shall provide OEM application engineering support, as needed, for process development and system interface support at no additional charge to the Government. System interface support shall include assistance of a TSE/T with installation, calibration, and maintenance of third party component interfaces (e.g. electromagnetic interference (EMI) field cancellation system, integrated uninterruptible power supply (UPS), etc.) that enhance the system.

1.1.3. Emergency Service. Whenever the instrument becomes inoperable or fails to perform to specifications due to a failure associated with the instrument, AND the said failure is not the result of operator error, abuse, or misuse, the contractor shall make appropriate repairs during the contractor’s regularly scheduled business hours, at no additional charge to the Government. Said service is to be initiated either onsite by a TSE/T or by telephone support with the TSE/T, should the TSE/T determine that telephone support is sufficient to resolve the problem, no later than 5 business days after a service call has been created. There shall be no more than 2 months continuous down time for the system or a total of 3 months down time for the entire year, barring delays due to government requirements.

1.1.4. Parts Replacement and Updates. The contractor shall provide labor, all OEM repair parts, and OEM consumables (including FE emitter), as determined by the TSE/T. The contractor shall provide electron source exchange coverage on the instrument. The contractor can provide refurbished and/or rebuilt parts and materials, at the sole discretion of the TSE/T, in the repair and maintenance of the JBX-6300FS system. Replaced parts requiring a core exchange by the OEM shall become the property of the contractor. The contractor shall provide replacement of the aperture strip, liner tube, and all associated maintenance components for the JBX-6300FS during the routine preventative maintenance visit, per para. 1.1.1. The contractor shall provide software and hardware updates to the system when available by the OEM at no additional cost to the Government. The uninterruptable power supply (UPS) is NOT covered by this contract, but its interface support is (as stated in 1.1.2).

1.1.5. Electron Source Replacement. The contractor shall provide the electron source replacement, TSE/T support, transportation, and shipping at no additional cost to the government as an annual maintenance item, or as determined by the TSE/T to minimize down time. The electron source replacement shall be scheduled based upon availability of the part from the contractor, but downtime shall not be longer than 2 months. Electron source replacement shall be coordinated with the Government no less than 15 days prior to the replacement component being shipped. The contractor shall provide the required personnel (TSE/T) and tools to replace the electron source. The Government provides a forklift and trained personnel to unload the crated component from the delivery truck, uncrate the component, transport the component by forklift to the electron beam lithography system room, crate the used component and transport the crate to the loading dock by forklift. The Government coordinates a mutually acceptable time and date for this replacement effort with the contractor. The contractor shall make all arrangements for the pick-up and shipping of the used electron source component.

1.1.6. Facility Support. The Government provides all support facilities, to include water, power, nitrogen, and air conditioning and climate control. The contractor shall provide all OEM system operation and environmental specifications to ensure operation of the JBX-6300FS.

1.1.7. Materiel Support. The Government provides all required test wafers, processing chemicals and metals, and instrumentation for onsite system certification and troubleshooting.

1.2. QUALITY ASSURANCE

1.2.1. QUALITY ASSURANCE. The Government will evaluate the contractor’s performance. The contractor shall be notified when an inspection indicates a defect in performance. The contractor shall review and sign the inspection report and state what action will be taken to correct the deficiency, re-inspection date and time, and measures taken to preclude reoccurrence. The signing of the inspection does not necessarily constitute the contractor’s concurrence with the inspection, only acknowledgement that the contractor has been made aware of the inspection and its findings.

1.3. HOURS OF OPERATION

1.3.1. Normal Hours: The hours of operation are Monday through Friday, 0800 to 1700, except federal holidays. The contractor may work, with prior approval of the Government, extended hours to ensure timely completion of work at no additional cost to the Government.

1.3.2. Holidays: The contractor is not required to provide service on the following days:

1.4. SECURITY REQUIREMENTS

1.4.1. Contractor employees shall comply with all security requirements imposed by the local commander at all times while employees are on the installation and shall follow instructions of the local organizational commander pertaining to security.

1.4.2. Only United States citizens shall be allowed unescorted access onto the installation and work site. Contractor employees shall obtain a temporary base pass at the installation visitor’s center. The Government shall contact the security personnel at the visitor’s center with the required contractor employee information to include the visitor’s full name exactly as it appears on their driver’s license/identification card, the valid e-mail address for the visitor, and the visitor’s full driver’s license/identification card number and state of issue as well as any information required for unescorted base access. The duration of the temporary pass will be at the discretion of the Government. In addition, contractor employees shall obtain a visitor’s badge at the Building 600 Reception Center. The visitor’s badge shall be worn at all times while on the work premises. The contractor shall notify the Government if a foreign national citizen will visit the installation to perform contracted services at least 35 days prior to arrival. The contractor shall provide the employee’s dates of visit, full name, date of birth, city and country of birth, country of citizenship, passport number and passport expiration date, and employer name and address as well as any additional information as required by the U.S. Air Force. Foreign national citizens shall be escorted at all times by the Government or a government appointee while on the work premises. Foreign national citizens shall only have access to the water chiller room, electron beam lithography system control room, electron beam lithography system room, scanning electron microscopy room, and areas cleared for access by designated security officials.

1.4.3. Foreign national citizens shall not drive on the military installation. The contractor shall make arrangements with the Government to provide transportation to and from the installation.

1.4.4. Personal computers, photographic or video cameras, and cellular phone recording devices are not allowed on the work premises unless authorized by the Government organization security representatives. Contractor employees shall not connect any work-related computer system to the facility computer network either through hardwire or wireless connection. Infractions will result in confiscation of the property and the incident shall be immediately reported to designated Government security officials.

1.4.5. All visitor badges shall be returned at the end of the day to the Building 600 Reception Center.

1.5. SAFETY REQUIREMENTS: The contractor shall:

1.5.1. Conform and comply with the safety requirements of OSHA, federal, state, and local laws and regulations and requirements regarding safety for all activities related to the accomplishment of the work.

1.5.2. Record and report promptly, within one hour, to the Contracting Officer and COR, all available facts relating to each instance of damage to government property, contractors’ property, or injury to either contractor or government personnel.

1.5.3. In the event of an accident/mishap, take reasonable and prudent action to establish control of the accident/mishap scene, prevent further damage to persons or property, and preserve evidence until released by the accident/mishap investigative authority through the Contracting Officer.

1.5.4. If the Government elects to conduct an investigation of the accident/mishap, the contractor shall cooperate fully and assist government personnel in the conduct of investigation until the investigation is completed.

1.5.5. The contractor shall submit a safety plan.

1.6. Continuation of Contractor Services during Base Exercises, Local Emergencies, or Contingencies and Implementation

1.6.1. It has been determined that none of the services specified in this PWS are required to be performed during (and/or in support of, whichever is appropriate) base exercises, local emergencies or contingencies, or implementation of local contingency plans.

1.7 Contractor Labor Hours Reporting

1.7.1. The contractor shall report ALL contractor labor hours (including subcontractor labor hours) required for performance of services provided under this contract for the JEOL JBX-6300FS Electron Beam Lithography System Service via a secure data collection site. The contractor is required to completely fill in all required data fields using the following web address: http://www.ecmra.mil.

Reporting inputs will be for the labor executed during the period of performance during each Government fiscal year (FY), which runs 1 October through 30 September. While inputs may be reported any time during the FY, all data shall be reported no later than 31 October of each calendar year. Contractors may direct questions to the help desk at: http://www.ecmra.mil/

Uses and Safeguarding of Information: Information from the secured web site is considered to be proprietary in nature when the contract number and contractor identity are associated with the direct labor hours and direct labor dollars. At no time will any data be released to the public with the contractor name and contract number associated with the data.

User Manuals: Data for Air Force service requirements must be input at the Air Force CMRA link. However, user manuals for government personnel and contractors are available at the Army CMRA link at http://www.ecmra.mil

II. SERVICES SUMMARY

The contractor service requirements are summarized into performance objectives that relate directly to mission essential items. The performance threshold briefly describes the minimum acceptable levels of service required for each requirement. These thresholds are critical to mission success.

III. GOVERNMENT-FURNISHED SERVICES

3.1. Emergency Medical Service. The Government shall provide emergency medical treatment and emergency patient transportation service for contractor personnel who are injured or become critically ill during the performance of this contract. The contractor shall reimburse the Government for the cost of medical treatment and patient transportation service at the current inpatient or outpatient treatment rate, as appropriate.

3.2. Security Police and Fire Protection. The Government shall provide general on-base Security Police service, fire prevention and protection, inspection and maintenance of government-furnished fire extinguishers and systems. The Fire Department and Security Police phone extension is 911 (or 937-257-9111 if dialing from a cell phone) for emergencies, 937-257-3033 for routine calls to the Fire Department, and 937-257-6516 for routine call to the Security Police.

3.3. Physical Security. The contractor shall safeguard all government property provided for contractor use. At the end of each work period, government facilities, property, equipment and materials shall be secured. Damage caused by contractor personnel to government items such as building, finishes, furnishings, equipment, etc. shall require the contractor to repair, clean, replace, or restore damaged items to the prior condition. The contractor shall adhere to the provisions of AFI 31-209. The Resource Protection Program, for safeguarding the government-furnished facilities and material contained therein.