Attch 1 - Minimum Requirements.pdf

FA875122R0023

Attch 1 - Minimum Specifications – Wafer Probing Solution

The Government requires a wafer probing solution which, is capable of simultaneous, automatic, measurement of electrical and optical components:

This station must be controllable through:

o intuitive computer interface keyboard and mouse as well as multitouch screen capable touch to move, zoom, align to structures

Single window, minimum popup interruptions

Single time license fee, free upgrades for life of system o TCPIP, GPIB, USB3, RS232 control o Joystick control for programmable motion components o third-party python, C, C++, C#, and MatLab integration o capable of automated wafer characterization with reticle and die mapping o import wafer maps from third party vendors o be able to automate alignment, scanning, and extraction of multi-device parameters (electrical and optical) o dual 27” touchscreen monitors with a minimum resolution of 1080p

The station must have a chuck which:

o Supports up to and including 300 mm wafers o Has vacuum regions which automate closing for smaller wafers, die of at most 4 mm by 4mm, and multi-die support o Is temperature stabilized at a minimum from 20 to 200° C

Stability to at worst 0.1° C

Uniformity of at worst ±0.5° C

Be capable of reaching temperature in less than 30 min

Upgradable to extended temperature range of at least -55° C to meet MILSPEC o motion programmable thermally stabilized chuck travel a minimum of 310mm X, 310mm Y, 30mm Z repeatability of at worst ±1 micron accuracy of at worst ±2 micron theta rotation ± 5.0° repeatability of at worst 1 micron at edge accuracy of at worst 2 micron at edge

The station must have at least one microscope:

o programmable motion control

XY Travel of at least 40 mm by 40 mm

At worst 1 micron resolution

At worst 2 micron repeatability

At worst 5 micron accuracy

Z travel of at least 140 mm, repeatable to < 2 micron at worst 0.05 micron resolution o optical magnification of 5x or greater working distance of at least 45 mm o compatible with M Pan objectives o at least 6.5 MP live video resolution o high stability placement (no boom or pole)

Optical measurement must be:

o Configurable between the following combinations: west and east; west and north; west and south o Capable of edge coupling: single cladded fibers; single bare optical fiber; single fibers with ferrule; v-groove arrays, die and wafer-scale edge coupling of fiber arrays o Capable of grating coupling at 8 degrees: single cladded fibers; single bare optical fiber;

single fibers with ferrule; v-groove arrays o Able to measure distance to surface of wafer, die, or chuck surface of at least 1 mm

At resolution of at worst 50 nm o Be capable of preventing optical to optical collisions o Capable of achieving optical coupling in a 100 micron x 100 micron area in at worst 1 second

The optical measurement must have at least two positioners:

o At least one positioner must be fully programmable over 6 degrees of freedom

Be capable of picking an arbitrary pivot-point

Travel at least ±6 mm X, ±16 mm Y, ±8 mm Z, ±14° ΘX, ±10° ΘY, ±10° ΘZ

Fine resolution of at worst 3 nm in closed loop operation o At least one positioner must:

Be fully programmable over 3 degrees of freedom

Automated as well as manual travel at least 25 mm X, 25 mm Y, 10 mm Z

Fine resolution of at worst 3 nm closed loop incremental motion repeatable to at most 2 nm uncertainty

Manual control of ±10° ΘX, ±10° ΘY, ±10° ΘZ

Be capable of holding and controlling a swappable electrical probe (DC, RF probe)

There must be at least 2 optical detectors:

o Capable of measuring from 400 to 1550 nm wavelength o Incorporated in the auto alignment of either one or two simultaneous optical channels o Maximum detection power of at least 30 mw o Minimum detection power of at worst 90 nW

The electrical measurement must be:

o Capable of motion automation by at least one stage (see optical positioners) o Capable of simultaneous placement of wedge style probes of up to four positions from west, north, east, south with the ability to swap up to two positions with optical probes o Capable of DC or RF measurement up to at least 60 GHz

Incorporated calibration substrates

The station must have vibration isolation.

The station must include a retractable light tight enclosure for safe operation at high voltages, currents and light emission.